Silicon-germanium-carbon - a novel opto-mechanic material for optical micro-electromechanical systems

从过去的黑白图像发展而来，到目前的红绿蓝多光谱功能，未来的远程成像系统有望在低成本系统中实现更广泛的波长范围内的光谱功能。然而，每个特定频段的多种材料和技术的高成本将它们限制在高成本的行业部门。该项目提出了一种基于硅-锗-碳薄膜的简单、低成本的单一材料技术，用于从紫外线到长波红外的机械和光学应用，使光谱成像能够广泛应用于从气候变化研究、资源勘探到癌症检测和航空航天/国防的多个领域。

Evolving from past black-and-white images, through present red-green-blue multi-spectral capability, future remote imaging systems promise spectroscopic functionality across much broader wavelength ranges in a low-cost system. However, the high cost of multiple materials and technologies for each specific spectral band limits them to high-cost industry sectors. This project proposes a simple, low-cost, single material technology based on silicon-germanium-carbon thin films for mechanical and optical applications from ultraviolet to long-wave infrared, enabling widespread application of spectroscopic imaging to multiple fields extending from climate change research, through resource exploration, to cancer detection, and aerospace/defense.