An Ion Source and A Universal Micro/Nano Mechanical Tester Platform for Synthesis and Characterization of Nanostructured Surface Coatings

薄膜、涂层和其它表面层在包括微机电系统和纳米机电系统（MEMS/NEMS）的无数应用中用于各种功能、装饰和保护目的。其纳米摩擦学、力学和形貌特性的合成和表征对于开发具有显著改善的表面性能的新型纳米结构薄膜/涂层以满足纳米科学和纳米技术快速发展的需求至关重要。所提出的离子源将使精确控制的纳米结构薄膜，涂层和其他表面层的合成和通用微/纳米机械测试仪的拟议平台将允许有效的定量微/纳米表征的表面形貌，硬度，杨氏模量，摩擦和磨损，薄膜/涂层附着力的开发薄膜/涂层的基板与可忽略的基板效应。由于萨斯喀彻温大学或该省其他地方没有类似的设备，该设备的收购将对萨斯喀彻温大学现有的薄膜，涂层，MEMS/NEMS和其他表面层相关的研究计划产生重大影响。该研究领域处于材料科学的前沿，该设备将帮助研究人员在开发具有更好表面性能的材料方面做出高度贡献，用于各种工业和生物医学应用。拟议的设备还将为高素质的受训人员提供极好的机会，以获得纳米科学和纳米技术方面的实际经验和专门知识。

Thin films, coatings, and other surface layers are used for a variety of functional, decorative, and protective purpose in a myriad of applications including micro- and nano- electromechanical system (MEMS/NEMS). The synthesis and characterization of their nano tribological, mechanical, and topographic properties is of paramount importance for the development of novel nano-structured thin films/coatings with much improved surface properties to meet the demand of rapid development of nanoscience and nanotechnology. The proposed ion source will enable synthesis of precisely controlled nanostructured thin films, coatings and other surface layers and the proposed platform for the Universal Micro/nano Mechanical tester will allow effective quantitative micro/nano characterization of the surface topography, hardness, Young's modulus, friction and wear, film/coating adhesion to substrate of the developed thin films/coatings with a negligible substrate effect. Since there is no similar equipment existing in the University of Saskatchewan or elsewhere in the province, the acquisition of the equipment will have significant impact on the existing research programs related to thin films, coatings, MEMS/NEMS and other surface layers at the University of Saskatchewan. This research area is at the forefront of material science, and the equipment will help researchers make highly riginal contributions in the development of materials with much improved surface properties for various industrial and biomedical applications. The proposed equipment will also provide excellent opportunities for highly qualified trainees to gain practical experience and expertise in nanoscience and nanotechnology.