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An Optical Surface Profiler for Characterization of Surface Features

用于表征表面特征的光学表面轮廓仪

基本信息

批准号：
458623-2014
负责人：
Yang, Qiaoqin
金额：
$ 10.93万
依托单位：
University of Saskatchewan
依托单位国家：
加拿大
项目类别：
Research Tools and Instruments - Category 1 (<$150,000)
财政年份：
2013
资助国家：
加拿大
起止时间：
2013-01-01 至 2014-12-31
项目状态：
已结题

来源：
https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=541988
关键词：
Optical Surface Profiler Characterization Features

项目摘要

Thin films, coatings, and other surface layers are used for a variety of functional, decorative, and protective purpose in a myriad of applications including electronic, optical, photonic, sensor, aerospace, nuclear, and biomedical applications. Their surface characteristics and thickness are of paramount importance for the development of novel surfaces with much improved properties to meet the demand of rapid development of surface science and technology. The proposed Optical Surface Profiler will enable effective quantitative characterization of surface roughness, surface stress, thin film thickness, and wear depth in nanometer scale. Since there is no similar equipment existing in the University of Saskatchewan or elsewhere in the province, the acquisition of the instrument will have significant impact on the existing research programs related to surface science and engineering at the University of Saskatchewan. This research area is at the forefront of material science, and the instrument will help researchers make highly original contributions in the development of materials with much improved surface properties for various industrial and biomedical applications. The proposed equipment will also provide excellent opportunities for highly qualified trainees to gain practical experience and expertise in advanced surface science and technology.

薄膜、涂层和其它表面层在包括电子、光学、光子、传感器、航空航天、核和生物医学应用的无数应用中用于各种功能、装饰和保护目的。为了满足表面科学和技术快速发展的需要，开发具有更高性能的新型表面，它们的表面特性和厚度是至关重要的。光学表面轮廓仪将使表面粗糙度，表面应力，薄膜厚度和磨损深度在纳米级的有效定量表征。由于萨斯喀彻温大学或该省其他地方没有类似的设备，该仪器的收购将对萨斯喀彻温大学现有的表面科学和工程相关的研究计划产生重大影响。该研究领域处于材料科学的最前沿，该仪器将帮助研究人员在开发具有更好表面性能的材料方面做出高度原创性的贡献，用于各种工业和生物医学应用。拟议的设备还将为高素质的受训人员提供极好的机会，以获得先进表面科学和技术方面的实际经验和专门知识。