Multi-Magnetron Sputter Deposition System for the Synthesis of Nanocomposite Thin Films/Surface Coatings

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Thin films, coatings, and other surface layers are used for a variety of functional, decorative, and protective purpose in a myriad of applications including micro- and nano- electromechanical system (MEMS/NEMS). The synthesis of the novel nanostructured coatings requires appropriate deposition systems in addition to the existing ones at the University of Saskatchewan. One essential deposition system, a muliti-magnetron sputter Deposition System, which is not yet available at the University or elsewhere in the region, is requested in this proposal for the sysnthesis of nanocomposite composite coatings. It is the key infrastructure for the Nano-Engineering Materials Laboratory and very important for more than ten other related research programs on campus to make novel research contributions. It is well accepted that the synthesis of nanostructured thin films/coatings with controlled nanostructures is of paramount importance for the development of novel functional materials with much improved surface properties to meet the demand of rapid development of nanoscience and nanotechnology. Since there is no similar equipment existing in the University of Saskatchewan or elsewhere in the province, the acquisition of the proposed equipment will have significant positive impact on the existing research programs related to thin films, coatings, MEMS/NEMS and other surface layers at the University of Saskatchewan, which is at the forefront of material science. The requesed system will be used to fabricate nanocomposite thin films/coatings on various substrate materials under controlled conditions and help researchers make highly original contributions in the development of novel functional nanomaterials with much improved surface properties for various industrial and biomedical applications. It will also provide excellent opportunities for highly qualified trainees to gain practical experience and expertise in nanoscience and nanotechnology.