Large Area Deposition of Adherent Diamond-Like Carbon Thin Films on Plastics Using End-Hall Ion Sources

使用端霍尔离子源在塑料上大面积沉积粘附的类金刚石碳薄膜

• 批准号: 477753-2015
• 负责人: Yang, Qiaoqin
• 金额: $ 1.82万
• 依托单位: University of Saskatchewan
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=579058
• 关键词: Large; Area; Deposition; Adherent; Diamond

Intlvac Canada Inc. (Intlvac) desires to develop DLC thin films on plastics for barrier and optical applications by using the EHI sources, particularly on larger scale production. However, the company is lack of expertise in deposition and characterization of DLC thin films and thus looking for experts in the area for collaboration. This project aims to develop new research partnerships between Dr. Yang at the University of Saskatchewan (U of S) and Intlvac on developing processing techniques to obtain adherent DLC thin films on large area polyester (PET) by using low cost EHI sources. The key issues to be addressed include introduction of surface treatments and different carbon sources to increase the deposition rates and the adhesion of DLC. Dr. Yang has been working on DLC, diamond, and other physical/chemical vapor deposited thin films for thirty years. Her team has successfully developed many innovative techniques for synthesizing diamond based thin films on various substrates. Especially, her team has successfully deposited high quality adherent DLC films on PTFE, Ti, and Si using an EHI ion source. On the other hand, Intlvac pioneers in vapor deposition equipment for thin film deposition. Specifically, the company has successfully developed Ion Beam Deposition (IBD) system with EHI sources. It is evident that both partners have complementary expertise and equipment, and thus the development of a partnership between Dr. Yang's group and Intlvac would produce strong synergy for addressing the issues in using DLC as barrier and optical coatings, and finally commercialize new systems/products to meet the increasing demands of markets in the area. The completion of the project will produce enormous economic benefit to Canada as both the IBD system with multi EHI sources and synthesis techniques can be directly delivered to the markets to make full use of the outstanding properties of DLC for various industrial and biomedical applications. Furthermore, the new processes will enable large area production of DLC on plastics, which will enable much improved food/beverage containers and biomedical implants, minimizing pollution and wastage and improving life quality.

Intlvac Canada Inc.（Intlvac）希望在塑料上开发用于阻隔和光学应用的DLC薄膜 通过使用EHI源，特别是在大规模生产中。然而，该公司缺乏专业知识， 沉积和表征DLC薄膜，因此寻找该领域的专家进行合作。 该项目旨在发展新的研究伙伴关系， （美国）和Intlvac开发加工技术，以获得大面积粘附的DLC薄膜 聚酯（PET）通过使用低成本EHI源。要解决的关键问题包括引入表面 处理和不同的碳源，以提高沉积速率和DLC的附着力。 博士Yang一直致力于DLC，金刚石和其他物理/化学气相沉积薄膜的研究， 三十年她的团队已经成功地开发了许多创新技术， 在各种衬底上的薄膜。特别是，她的团队已经成功地沉积了高质量的粘附性DLC 薄膜上的PTFE，钛，硅使用EHI离子源。另一方面，Intlvac是气相沉积领域的先驱 用于薄膜沉积的设备。具体而言，该公司已成功开发出离子束 具有EHI源的沉积（IBD）系统。显然，双方合作伙伴都拥有互补的专业知识， 设备，因此，杨博士的集团和Intlvac之间的伙伴关系的发展将产生 解决使用DLC作为屏障和光学涂层的问题的强大协同作用， 使新系统/产品商业化，以满足该地区市场日益增长的需求。完成 该项目将为加拿大带来巨大的经济效益，因为IBD系统具有多个EHI源 合成技术可直接投放市场，充分发挥其优异性能 用于各种工业和生物医学应用。此外，新工艺将使大型 在塑料上生产DLC，这将大大改善食品/饮料容器， 生物医学植入物，最大限度地减少污染和浪费，提高生活质量。