Large Area Deposition of Adherent Diamond-Like Carbon Thin Films on Plastics Using End-Hall Ion Sources

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Intlvac Canada Inc. (Intlvac) desires to develop DLC thin films on plastics for barrier and optical applications by using the EHI sources, particularly on larger scale production. However, the company is lack of expertise in deposition and characterization of DLC thin films and thus looking for experts in the area for collaboration. This project aims to develop new research partnerships between Dr. Yang at the University of Saskatchewan (U of S) and Intlvac on developing processing techniques to obtain adherent DLC thin films on large area polyester (PET) by using low cost EHI sources. The key issues to be addressed include introduction of surface treatments and different carbon sources to increase the deposition rates and the adhesion of DLC. Dr. Yang has been working on DLC, diamond, and other physical/chemical vapor deposited thin films for thirty years. Her team has successfully developed many innovative techniques for synthesizing diamond based thin films on various substrates. Especially, her team has successfully deposited high quality adherent DLC films on PTFE, Ti, and Si using an EHI ion source. On the other hand, Intlvac pioneers in vapor deposition equipment for thin film deposition. Specifically, the company has successfully developed Ion Beam Deposition (IBD) system with EHI sources. It is evident that both partners have complementary expertise and equipment, and thus the development of a partnership between Dr. Yang's group and Intlvac would produce strong synergy for addressing the issues in using DLC as barrier and optical coatings, and finally commercialize new systems/products to meet the increasing demands of markets in the area. The completion of the project will produce enormous economic benefit to Canada as both the IBD system with multi EHI sources and synthesis techniques can be directly delivered to the markets to make full use of the outstanding properties of DLC for various industrial and biomedical applications. Furthermore, the new processes will enable large area production of DLC on plastics, which will enable much improved food/beverage containers and biomedical implants, minimizing pollution and wastage and improving life quality.