A new MEMS gyroscope design based on nonlinear coupling and internal resonance

微陀螺仪是继压力传感器和加速度计成功商业化之后MEMS（微机电系统）技术的下一个主要传感应用。MEMS陀螺仪的市场价值预计将在2017年超过15.7亿美元。这些传感器采用振动质量来通过结构的振动模式的耦合来检测角速率。然而，MEMS陀螺仪通常受到有限的分辨率和长期漂移的影响。这部分是由于这些设备产生的小信号和制造的非理想性。 该方案利用非线性耦合和内共振现象来提高振动式MEMS陀螺仪的性能。模式之间的非线性耦合将是器件设计的结果，并且可以通过静电力来增强。对宏观和微观系统进行了理论和初步实验研究。我们的实验表明，在宏观尺度上，这种非线性耦合可以显着提高陀螺仪的感测模式的性能，扩大其谐振峰。这增加了陀螺仪的信噪比，并对灵敏度产生积极影响。我们对微器件的实验揭示了微尺度下的内共振现象。该提案将初步研究的结果提升到一个新的水平，通过设计和实现一个新的类别的微陀螺仪的基础上的内部谐振现象。这项研究的结果将是一个重大突破，在开发廉价的陀螺仪的许多应用。该战略项目的重点是非线性陀螺仪的优化设计、制造和接口，并采用新一代陀螺仪制造的设计方法。建议书的主要焦点福尔斯最好落在NSERC制造战略目标领域内。通过与具有成功商业化记录的工业合作伙伴合作，我们为设备的商业化制定了研究和技术路线图。该项目将在其过程中培训8名HQP。

Micro-gyroscopes are the next major sensory application of the MEMS (Micro Electro Mechanical System) technology after the successful commercialization of pressure sensors and accelerometers. The market value of MEMS gyros is expected to be in excess of $1.57B in 2017. These sensors employ a vibrating mass to detect angular rate through coupling of vibration modes of a structure. However, MEMS gyros often suffer from limited resolution and long-term drift. This is partly due to the small signals produced by these devices and manufacturing non-idealities. This proposal utilizes nonlinear coupling and the phenomenon of internal resonance to improve the performance of vibratory MEMS gyroscopes. The nonlinear coupling between the modes will be a result of the device designs and can be enhanced with electrostatic forces. Theoretical and preliminary experimental work on macro- and micro-systems have been conducted. Our experiments at the macro-scales demonstrate that this nonlinear coupling can significantly enhance the gyro's sense mode performance by widening its resonance peak. This increases the gyro signal to noise ratio and positively influences the sensitivity. Our experiments on the microdevices reveal internal resonance at micro-scales. This proposal takes the results of the preliminary research to the next level through design and implementation of a novel category of micro-gyroscopes based on internal resonance phenomenon. The outcome of this research will be a major breakthrough in the development of inexpensive gyros for numerous applications. The proposed strategic project focuses on the optimized design, fabrication, and interfacing of the nonlinear gyroscopes, and employs the design methodology for the fabrication of new generation of gyros. The primary focus of the proposal falls best within NSERC Strategic target area of Manufacturing. Through working with an industrial partner with a successful commercialization track record, we define a research and technology roadmap for the commercialization of the devices. This project will train eight HQP's during its course.