3-D Laser Doppler Vibrometer for Versatile Engineering and Scientific Measurements

** 要求的设备是3-D IVS-500工业振动计，这是一种非接触式和可靠的传感器，具有激光精度。拟议的设备是至关重要的，非常需要支持纽芬兰纪念大学三个部门的三个研究项目。这些研究计划是：（一）设计和控制新的精密运动系统的未来机器的光刻过程。这些新的运动系统将提高光刻工艺的精度，以制造更快，更智能，更轻的集成电路（IC），（ii）石油和天然气勘探和生产期间以及大地震后岩石的非线性弹性特性的测量和研究，以及（iii）设计和优化新的压电MEMS振动能量采集器，用于低功率电子应用。** 这台工业设备将是纽芬兰纪念大学和纽芬兰和拉布拉多省第一台提供三自由度亚纳米精度高精度评估的设备。因此，上述研究计划的先进性和结果的质量取决于所提出的设备。这些研究计划包括不同的和顺序的研究阶段（3-D测量，设计，开发，优化和控制），需要3-D位移测量和3-D速度测量。这意味着研究的先进性、连续进展和质量取决于拟议的设备。电子实验室笔记本软件将用于管理和安排uPrecision机电实验室中3-D IVS-500工业振动计的使用，该软件将使研究小组能够设置用户并安排设备使用。每年有20多名HQP在申请人的监督下，他们将首先接受设备培训，并将使用该设备进行各种研究和学术活动。这些HQP将获得独特的专业知识和测量技能与此设备。拟议的设备将为学生提供一个特殊的培训平台，以深入科学地了解3-D IVS-500工业振动计。来自申请人研究小组的HQP（包括研究生和本科生）将接受指定同事的培训。还预计购买拟议的设备将吸引纽芬兰和拉布拉多省工业界的研究人员。因此，它将刺激新的跨机构和学术-工业合作。**“新型精密运动系统研究”的一个主要成果是提高EUV光刻系统的精度，这将导致制造更快、更智能、更轻的IC。这也将导致EUV光刻工艺的亚纳米精度，以制造用于新应用和未来挑战的IC，包括用于自动驾驶汽车的微处理器。

******The equipment requested is a 3-D IVS-500 industrial vibrometer, which is a non-contacting and reliable sensor with laser precision. The proposed equipment is crucial and highly needed to support three research programs in three departments at Memorial University of Newfoundland. These research programs are: (i) design and control new precision motion systems for the future machines of the lithography process. These new motion systems will enhance the accuracy of the lithography process to manufacture faster, smarter, lighter integrated circuits (ICs), (ii) measurement and study of the nonlinear elastic properties of rocks during oil and gas exploration and production and after large earthquakes, and (iii) design and optimization of new piezoelectric MEMS vibration energy harvesters for low-power electronic applications. ******This industrial equipment will be the first of its kind at Memorial University of Newfoundland and the province of Newfoundland and Labrador to provide three degrees-of-freedom high-precision evaluations with sub-nanometre accuracy. Thus, the advancement and the quality of the result of the above-mentioned research programs depend on the proposed equipment. These research programs include different and sequential research stages (3-D measurements, design, development, optimization, and control) that need both 3-D displacement measurements and 3-D velocity measurements. This means that the advancement, sequential progress, and quality of the research depends on the proposed equipment. An electronic laboratory notebook software will be used to manage and schedule the usage of the 3-D IVS-500 industrial vibrometer in the uPrecision Mechatronic Laboratory, and this software will enable the research groups to set up users and schedule equipment use.******Each year over 20 HQP under the applicants' supervision, who will be first trained on the equipment, will use it to conduct various research and academic activities. These HQP will acquire unique and specialized knowledge and measurements skills with this equipment. The proposed equipment will provide an exceptional training platform for students to acquire an in-depth scientific understanding of the 3-D IVS-500 Industrial Vibrometer. HQP from the applicants' research groups which include graduate and undergraduate students, will receive training from designated associates. It is also anticipated that the purchase of the proposed equipment will attract researchers from industry in the province of Newfoundland and Labrador. Thus, it will stimulate new cross-institutional and academic-industrial collaborations. ******A major outcome of the "new precision motion systems research" is to enhance the precision of EUV lithography systems, which will lead to fabricating faster, smarter, and lighter ICs. This will also lead to sub-nanometer accuracy of the EUV lithography process to manufacture ICs for new applications and future challenges, including microprocessors for the autonomous car.**