A Dual-Arm Wafer Robot Handler for Precision Mechatronics and MEMS Characterizations

所要求的设备是最近开发的自动化双臂晶圆处理机器人（DAWHR），用于更快地处理半导体晶圆（每小时晶圆）。半导体在电子工业中用于制造集成电路（IC）。数字信号处理器、微控制器和存储芯片是使用集成电路的许多电气和电子设备的几个例子。所要求的机器人可以在各个阶段和工位之间精确而快速地移动晶圆。这样就可以进行抛光、蚀刻和植入等操作。具体来说，纪念大学机械工程系和电气与计算机工程系的两个研究项目需要这个机器人进行有影响力的研究。这些研究项目的重点是晶圆扫描系统的精密机电一体化和压电电磁能量采集器的特性。在晶圆扫描系统的精密机电一体化研究项目中，主要目标是提高运行光刻机（晶圆扫描仪）的机器人和执行器的性能和精度。为了提高光刻工艺，主要目标是设计非常精确的致动器和控制运动的算法。这将使光刻技术制造出更轻、更快、更智能的集成电路。提出的研究有一个很好的机会，导致先进的运动系统，新的运动轮廓，更好地控制DAWHR晶圆扫描仪系统。这将通过减少定位误差和加快过程来提高ic的分辨率。这将导致许多重要新技术的诞生，比如自动驾驶汽车、手机、电脑和微型机器人。MEMS特性研究项目包括为低功率、低电压小型电子设备、便携式商业振动能量收集产品（如风能和海浪能）提供直流电压。DAWHR将支持表征和测试新型微尺度振动能量采集器的研究，该采集器可以可靠地为小型电子设备供电，例如在陆地或海上使用的物联网应用中的传感器，以解决不同的工业可再生能源问题，特别是通过利用环境振动。DAWHR对于找出用于电源管理的新型压电能量收集器和印刷电子设备的工作原理和测试至关重要。所要求的DAWHR将安装在纪念大学的新洁净室。在制造、抛光、蚀刻和植入方面有研究兴趣的HQP将有权使用该设备。在他们的论文工作中使用所要求的行业级运动系统，将为申请人的学生，包括所有指定的代表性不足的群体，提供宝贵的培训经验。因此，HQP将具有竞争优势，通过提高研究能力和新的实践技能，在高科技产业中获得工作。

The requested equipment is a recently developed automated Dual- Arm Wafer- Handling Robot (DAWHR), which is used to process semiconductor wafers more rapidly (wafers per hour). Semiconductors are used to produce integrated circuits (IC) in the electronics industry. Digital signal processors, microcontrollers, and memory chips are a few examples of the many electrical and electronic devices that use ICs. The requested robot can move wafers between stages and stations with precision and speed. This enables operations like polishing, etching, and implanting to take place. Specifically, two research programs at Memorial University departments of Mechanical Eng and Electrical and Computer Eng require this robot to conduct impactful research. These research programs focus on precision mechatronics for wafer scanner systems and characterizations for piezoMEMS energy harvesters. In the precision mechatronics for wafer scanner systems research program, the main goal is to improve the performance and accuracy of the robots and actuators that run lithography machines (wafer scanners). To enhance the lithography process, the main goal is to design very precise actuators and algorithms for controlling motion. This will let lithography make ICs that are lighter, faster, and smarter. The proposed research has an excellent chance of leading to advanced motion systems, new motion profiles, and better control of the DAWHR wafer scanner system. This will improve the resolution of ICs by reducing positioning errors and speeding up the process. This will lead to the creation of many important new technologies, such as self-driving cars, cell phones, computers, and micro--robotics. The MEMS characterizations research program involves supplying direct current voltage to low power, low voltage small electronic devices, portable commercial vibration based energy harvesting products, like wind energy and ocean wave energy. The DAWHR will support research to characterize and test new microscale vibration energy harvesters that can reliably power small electronic devices, such as sensors in Internet -of -Things applications that are used on land or at sea, in order to solve different industrial renewable energy problems, especially by taking advantage of ambient vibration. The DAWHR is essential for figuring out how new piezoMEMS energy harvesters and printed electronics for power management work and testing them. The requested DAWHR will be installed in the new cleanroom at Memorial University. HQP with research interests in fabrication, polishing, etching, and implanting will have access to the equipment. Using the requested industry -class motion system daily in their thesis work will give the applicants' students, including all designated underrepresented groups, valuable training experience. As a result, the HQP will have a competitive advantage to secure jobs in the high-tech industry with improved research abilities and new practical skills.