Engineering Research Equipment Grant: Ion Gun System for Ion-Assisted Deposition of Tribologic Elements for Micro Electro Mechanical Systems

工程研究设备补助金：用于微机电系统摩擦元件离子辅助沉积的离子枪系统

• 批准号: 9111785
• 负责人: John Wood
• 金额: $ 4.1万
• 依托单位: University of Utah
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1991
• 资助国家: 美国
• 起止时间: 1991-10-01 至 1993-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9111785&HistoricalAwards=false
• 关键词: Engineering; Research; Equipment; Grant; Ion

This is a grant for research equipment to be used in research on microelectromechanical systems (MEMS). The overall objective of this research is the development of a new class of actuators, sensors, and spatial light modulation devices, built on the integration of micro-chip sensing elements with moving mechanical elements. In some devices, sensory feedback and model-based dynamics are employed in order to control small object (0.5 to 500 microns). Specific applications include small sensors to measure strain, deflection, pressure, angular displacement, and force; small sensors constructed to detect inertial parameters such as acceleration and roll rate; small, electromagnetically levitated elements whose orientation can be controlled so that they function as reflecting micropositioners for modulation of light beams; and small microactuators for cutting or imaging; and large-scale actuators built from micron-scale components.

这是一笔赠款，用于资助用于微机电系统 (MEMS) 研究的研究设备。 这项研究的总体目标是开发新型执行器、传感器和空间光调制设备，这些设备建立在微芯片传感元件与移动机械元件的集成之上。 在一些设备中，采用感官反馈和基于模型的动力学来控制小物体（0.5 至 500 微米）。 具体应用包括用于测量应变、偏转、压力、角位移和力的小型传感器；用于检测加速度和侧倾率等惯性参数的小型传感器；小型电磁悬浮元件，其方向可以控制，以便它们充当用于调制光束的反射微定位器；用于切割或成像的小型微执行器；以及由微米级组件构建的大型执行器。