Engineering Research Equipment Grant: Ion Gun System for Ion-Assisted Deposition of Tribologic Elements for Micro Electro Mechanical Systems

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This is a grant for research equipment to be used in research on microelectromechanical systems (MEMS). The overall objective of this research is the development of a new class of actuators, sensors, and spatial light modulation devices, built on the integration of micro-chip sensing elements with moving mechanical elements. In some devices, sensory feedback and model-based dynamics are employed in order to control small object (0.5 to 500 microns). Specific applications include small sensors to measure strain, deflection, pressure, angular displacement, and force; small sensors constructed to detect inertial parameters such as acceleration and roll rate; small, electromagnetically levitated elements whose orientation can be controlled so that they function as reflecting micropositioners for modulation of light beams; and small microactuators for cutting or imaging; and large-scale actuators built from micron-scale components.