Engineering Research Equipment Grant: Ion Gun System for Ion-Assisted Deposition of Tribologic Elements for Micro Electro Mechanical Systems

这是一笔用于研究微机电系统（MEMS）的研究设备的拨款。这项研究的总体目标是开发一种新型的执行器、传感器和空间光调制装置，建立在集成微芯片传感元件和移动机械元件的基础上。在一些设备中，为了控制小物体（0.5至500微米），采用了感觉反馈和基于模型的动力学。具体应用包括测量应变、挠度、压力、角位移和力的小型传感器；用于检测惯性参数（如加速度和滚转速率）的小型传感器；小型的电磁悬浮元件，其方向可以控制，从而作为反射微定位器来调制光束；以及用于切割或成像的小型微驱动器；以及由微米级元件制成的大型执行器。

This is a grant for research equipment to be used in research on microelectromechanical systems (MEMS). The overall objective of this research is the development of a new class of actuators, sensors, and spatial light modulation devices, built on the integration of micro-chip sensing elements with moving mechanical elements. In some devices, sensory feedback and model-based dynamics are employed in order to control small object (0.5 to 500 microns). Specific applications include small sensors to measure strain, deflection, pressure, angular displacement, and force; small sensors constructed to detect inertial parameters such as acceleration and roll rate; small, electromagnetically levitated elements whose orientation can be controlled so that they function as reflecting micropositioners for modulation of light beams; and small microactuators for cutting or imaging; and large-scale actuators built from micron-scale components.