Cross-Training Technicians and Engineers for Semiconductor Manufacturing

半导体制造技术人员和工程师的交叉培训

• 批准号: 0101311
• 负责人: John Wood
• 金额: $ 52万
• 依托单位: University of New Mexico
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-07-15 至 2004-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0101311&HistoricalAwards=false
• 关键词: Cross; Training; Technicians; Engineers; Semiconductor

The project extends work begun under Award No. 9850310.A consortium consisting of three universities (University of New Mexico, Arizona State University, and University of Texas at Austin) and three community college systems (Albuquerque Technical Vocational Institute, Maricopa County Community College District, and Austin Community College) in three contiguous states, each of which has semiconductor manufacturing as an economic backdrop, is implementing "cross-training" of technicians and engineers.Supported by a previous NSF grant, the consortium developed a suite of six computer-based training (CBT) modules designed to be integrated into factory-like labs and related courses for co-training of technicians and engineers. The first six modules covered lithography, metalization, design of experiments, etch, chemical vapor deposition, and statistical process control. In the current project, the consortium is (1) developing three more modules covering oxidation and diffusion, doping and annealing, and factory dynamics; (2) deploying the modules in side-by-side training of engineering and technician students at the partnering universities and community colleges; and (3) completing the evaluation of the full suite of nine modules.The project is built around the premise that "cross-training" technicians and engineers, such that each group better understands the roles and skill sets of the other, will enhance their effectiveness as team members in real factory settings. The project's CBT modules cover basic semiconductor unit processes (lithography, metalization, etch) and their facility demands, design of experiments, and factory-level dynamics from both the technician's and the engineer's perspectives. The modules include interactive, schematic-based simulator panels for selected manufacturing machines, to support a need-based, top-down learning paradigm. In addition, the modules have structured exercises that require interactive roles between technicians and engineers. The "side-by-side" presentation of text, graphics, animations, videos, simulations, and exercises give technicians enhanced exposure to mathematics and science and give engineers enhanced exposure to machine (tool) operation issues. The multimedia modules are designed to operate stand-alone or coupled to a multi-level manufacturing simulator package. They can serve training needs in real, mock, or virtual factory-like labs.

该项目扩展了在第9850310号合同下开始的工作。（新墨西哥州大学、亚利桑那州州立大学和德克萨斯大学奥斯汀分校）和三个社区学院系统（阿尔伯克基技术职业学院、马尔马拉县社区学院区和奥斯汀社区学院）在三个相邻的州，每个州都以半导体制造业为经济背景，在先前NSF拨款的支持下，该联盟开发了一套六个基于计算机的培训（CBT）模块，旨在集成到工厂式实验室和相关课程中，以共同培训技术人员和工程师。前六个模块涵盖了光刻，金属化，实验设计，蚀刻，化学气相沉积和统计过程控制。在目前的项目中，该联合体正在（1）开发另外三个模块，涵盖氧化和扩散、掺杂和退火以及工厂动力学;（2）在合作大学和社区学院对工程和技术人员学生进行并行培训时部署这些模块;（3）完成了九个模块的评估。该项目围绕“交叉培训”技术人员和工程师，使得每一组更好地理解另一组的角色和技能集，这将增强他们作为真实的工厂环境中的团队成员的有效性。该项目的CBT模块涵盖基本半导体单元工艺（光刻、金属化、蚀刻）及其设施需求、实验设计以及技术人员和工程师角度的工厂级动态。这些模块包括用于选定制造机器的交互式、基于示意图的模拟器面板，以支持基于需求的自上而下的学习范式。此外，这些模块有结构化的练习，需要技术人员和工程师之间的互动作用。文本、图形、动画、视频、模拟和练习的“并排”演示使技术人员更好地接触数学和科学，并使工程师更好地接触机器（工具）操作问题。多媒体模块被设计为独立操作或耦合到多级制造模拟器包。它们可以满足真实的、模拟或虚拟工厂式实验室中的培训需求。