MRI: Acquisition of Process Equipment for Bio-MEMS Research, Training and Commercialization

新墨西哥州大学（UNM）是卡内基博士/研究型大学，也是一个西班牙裔服务机构，正在其制造培训和技术中心（MTTC）内建造一个洁净室，以支持微电子和微机电系统（MEMS）的研究，培训和商业化。 无尘室的建设资金来自联邦和州政府，主要设备来自私营部门。 由NSF MRI提供的深反应离子蚀刻器和聚对二甲苯涂布器将使洁净室不仅能够支持传统的半导体工艺，而且还能够支持生物微机电系统（bio-MEMS）的制造。 特别是，该设备将允许UNM制造具有深通道的生物MEMS设备，例如，以及植入式设备所需的生物相容性涂层。 具体的设备可能包括植入式药物输送设备、用于更局部成像的微型超声发射器和检测器、微型癌症治疗探针、基于光子学的细胞分选器和芯片上的微型马达。 应用将扩展到人类疾病的诊断和治疗，空间任务所需的传感器和致动器，或环境污染物，毒素和传染性病原体的监测。 除了研究和开发支持外，MTTC洁净室内所需的设备将可用于与区域社区学院（CC）的技术人员共同培训UNM的各种工程专业学生。 而且，这些设备将可供私营公司在大规模制造之前证明设备的可制造性。

The University of New Mexico (UNM), a Carnegie Doctoral/Research University-Extensive and a Hispanic-serving Institution, is building a cleanroom within its Manufacturing Training and Technology Center (MTTC), to support research, training and commercialization of microelectronics and microelectromechanical systems (MEMS). The cleanroom has received construction funding from federal and state sources, and major equipment from private sector sources. The deep reactive ion etcher, and the parylene coater provided by NSF MRI will enable the cleanroom to support not only conventional semiconductor processes, but to also support fabrication of bio- microelectromechanical systems (bio-MEMS). In particular, this equipment will allow UNM to make bio-MEMS devices with deep channels, for example, and biocompatible coatings needed for implantable devices. Specific devices might include implantable drug delivery devices, micro-scale ultrasound emitters and detectors for more localized imaging, micro-scale cancer treatment probes, photonics-based cell sorters, and micro-motors on a chip. Applications will extend to the diagnosis and treatment of human disease, sensors and actuators needed for space missions, or monitoring of environmental pollutants, toxins and infectious agents. In addition to research and development support, the requested equipment, set within the MTTC Cleanroom, will be available to co-train a diverse population of engineering students at UNM with technicians from regional community colleges (CCs). And, the equipment will be available for private companies to prove the manufacturability of a device prior to large-scale manufacturing.