Investigation of the Surface Chemical Physics of Light- Enhanced Epitaxy on II-VI Semiconductor Surfaces
Investigation of the Surface Chemical Physics of Light- Enhanced Epitaxy on II-VI Semiconductor Surfaces
批准号:
9225134
负责人:
Richard Osgood
金额:
$22.0万
依托单位:
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
1993
资助国家:
美国
项目状态:
已结题
起止时间:
1993-08-15 至 1997-07-31
中文摘要
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英文摘要
9225134 Osgood Investigations of fundamental surface-chemical mechanisms important in light-enhanced MOCVD (or MOMBE) epitaxy of specific II-VI compound semiconductors will be conducted. The research will utilize time-of-flight mass spectroscopy and total-internal-reflection infrared spectroscopy as well as a variety of standard UHV surface probes to determine the as-yet-unknown mechanisms for photo-induced reactions on II-VI surfaces. In addition, reaction cross-sections, yields, and products will be measured, and in the course of these measurements, consideration will be given to techniques for proper preparation of atomically clean surfaces. The primary surfaces for study will be those on ZnSe and CdTe. The study is expected to give insight into the processes initiating reactions and to guide selection of light-source wavelengths, precursor molecules, and general growth conditions for epitaxy of II-VI materials. %%% This research is expected to provide deeper fundamental understanding of photo-assisted chemistry on surfaces and its relation to photo-assisted epitaxy of compound semiconductor materials. From an application point of view, the results will provide guidance for the use of lasers and other light sources to do patterning in an MOCVD epitaxy chamber, and will be important to the general advancement in the technology of II-VI optoelectronics leading to improvements in the performance of advanced devices and integrated circuits used in computing, information processing, and telecommunications. ***
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资助金额:$52.0万
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依托单位:
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批准号:9632456
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资助金额:$25.2万
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Direct Writing of High-Resolution, Modulated Doping ProfilesUsing Laser Photochemical Reactions
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财政年份:1982
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负责人:Richard Osgood
-
依托单位:
国内基金
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