Renovation of Advanced Thin Film Smart Materials Processing Research Laboratory

NSF的资金将支持洁净室的开发，作为马里兰州大学帕克分校材料与核工程项目先进薄膜材料实验室的一部分。 翻新后的设施将位于30岁的J.M.帕特森大楼，将是一个关键的资源薄膜沉积和样品制备的智能+材料。 该设施将为下一代铁电器件和微机电（MEMS）结构的先进互连带来突破。 材料加工需要一个无尘的环境，过滤再循环的去离子水和无振动的地板。 现有空间缺乏这些必需品，与该部为这项工作已经拥有和使用的资本设备不相容。 对设备和研究活动空间的改造有望消除科学突破的一个主要障碍。 目前的空间已经暴露了天花板水管，不包括去离子水。 设备的电力是通过危险的悬挂线提供的，房间没有空气再循环过滤系统。 窗户、墙壁和门都没有充分密封，防止颗粒物。 现有的通风柜数量不足，不能在可接受的安全标准范围内发挥作用。 翻新工作将提供一个1,000级的洁净室环境，层压完成刨花板墙板和门，吊顶和一个新的乙烯基地板完成。 垂直衣柜式空调装置将放置在设施附近，以确保内部温度和湿度稳定性以及绝对H.E.P.A.天花板上会安装过滤器，以确保空气循环系统能百分之一百有效地清除微粒。 新设施将为研究生培训提供材料加工的新机会。 研究活动将包括薄膜马氏体、铁电氧化物和薄膜的快速热处理。 薄膜马氏体研究强调薄膜复合材料的弹性和滞弹性性能，并将导致独特的微机械器件的发展。 铁电氧化物中的活性将直接从铁电薄膜、光存储器和光信号处理器中获得。 快速热处理将允许研究人员定制表面和界面材料特性。 七名教师和他们的研究生将是新实验室设施的直接受益者。

NSF funds will support the development of a clean room as part of the Advanced Thin Film Materials Laboratory for the Materials and Nuclear Engineering program at the University of Maryland, College Park. The renovated facility will be located in the 30-year old J.M. Patterson building and will be a critical resource for film deposition and sample preparation of -smart+ materials. The facility will enable breakthroughs for advanced interconnects for the next generation of ferroelectric devices and micro-electromechanical (MEMS) structures. Materials processing requires a dust-free environment with filtered recirculated de-ionized water and vibration-free flooring. The existing space lacks these necessities and is incompatible with the capital equipment already owned and utilized by the department for this work. The renovation of space to house the equipment and the research activity promises to remove a major impediment to scientific breakthroughs. The current space has exposed ceiling pipes for water and does not include access to de-ionized water. Power to the equipment is provided through dangerous hanging cords, and the rooms are without an air recirculation filtration system. The windows, walls and doors are not adequately sealed against particulate matter. The existing hoods are insufficient in number and do not function within acceptable standards of safety. The renovation effort will provide a class 1,000 clean room environment with laminate finish chipboard wall panels and doors, suspended ceilings and a new vinyl floor finish. Vertical wardrobe-type air conditioning units will be placed adjacent to the facility to assure internal temperature and humidity stability, and absolute H.E.P.A. filters will be mounted in the ceiling to assure almost 100% efficiency in particulate removal in air recirculation. The new facility will provide new opportunities in materials processing for graduate student training. Research activities will include thin film martensite, ferroelectric oxides, and rapid thermal processing of thin films. Thin film martensite investigations emphasize elastic and anelastic properties of thin film composites and will lead to the development of unique micro-mechanical devices. The activities in ferroelectric oxides will feed directly from ferroelectric films optical memories and optical signal processors. Rapid thermal processing will allow the researcher to tailor surface and interface material properties. Seven faculty and their graduate researchers will be the direct beneficiaries of the new laboratory facility.