Laboratory Development for Microelectronics Technology

本项目改进了一个半导体制造实验室，为本科生提供针对行业的微电子教育。为此，电子技术部正在采购三台半导体晶圆测试设备和一台真空检漏仪。该实验室主要面向电子技术专业和核心电子专业的学生，同时为制造技术、自动化、机器人、电信、计算机维护、制图与设计、信息处理和工业管理等高级课程的学生提供交叉选修课程和深入项目的新能力。用高科技来教授高科技，半导体制造实验室模仿当前的工业趋势，为学生提供在这个日益复杂的领域取得成功所需的更高技能水平。新设备是可编程的工艺关键设备，允许学生进行晶圆测试和测量，通常仅限于少数四年制学位学校的工程专业学生。从第一次晶圆清洗到最终的电气测试，他们在受控的m4.5 （Class 1000）环境中实时生产集成电路，与商业晶圆厂生产的集成电路仅在几何形状上有所不同。

This project provides improvement of a semiconductor manufacturing laboratory that provides industry-specific microelectronics education for undergraduates. To this end, the Electronics Technology Department is obtaining three pieces of semiconductor wafer testing equipment and a vacuum leak detector. While geared in the main toward Electronics Technology students and Core Electronics students, the laboratory affords new capabilities for crossover electives and in-depth projects for students in advanced courses in Manufacturing Technology, Automation, Robotics, Telecommunications, Computer Maintenance, Drafting and Design, Information Processing, and Industrial Management. With high technology used to teach high technology, the semiconductor manufacturing lab emulates current trends in industry and provides the students with the higher skill levels required for success in this increasingly complex field. The new equipment is programmable, process-critical equipment that allows students to make wafer tests and measurements usually exclusively limited to small numbers of engineering students at 4-year degree schools. They produce, from the first wafer cleaning to the final electrical test, in real time in a controlled M 4.5 (Class 1000) environment, integrated circuits that differ from those produced in commercial fabs only in their geometries.