Ion Scattering Studies of Surfaces and Thin Films

表面和薄膜的离子散射研究

• 批准号: 9705367
• 负责人: Torgny Gustafsson
• 金额: $ 33.7万
• 依托单位: Rutgers University New Brunswick
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-08-01 至 2002-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9705367&HistoricalAwards=false
• 关键词: Ion; Scattering; Studies; Surfaces; Thin

w:\awards\awards96\num.doc 9705367 Gustafsson This experimental research project is in the area of surface analysis based on the use of ion beam scattering. A first project centers on study of the unexpectedly large spacing observed between the two outermost layers on surfaces of Ag and Cu, at elevated temperatures in ultra high vacuum. Study of this expansion effect will be extended to binary systems, and will be compared with recently generated theoretical predictions. The second major project is a study of initial stages of oxidation, the first 1 - 10nm of oxide growth, making use of great advances in surface analysis techniques that have been made since classic oxidation studies. Emphasis is on the mechanism of growth and the microstructure of the resulting oxide. A wide range of systems, including Si, Ni, Al, Cu, Ge and SiC will be studied. A variety of additional tools, including STM, AFM and photoelectron spectroscopy will be employed in the project. The primary experimental tool is high-resolution medium energy ion scattering, which can provide information on surface structure, growth mechanisms, and kinetics. %%%% This experimental research uses advance surface science instrumentation to study at the atomic level the process of oxide film growth on metals and semiconductors. Oxide growth is of immense importance in wide areas of technology, for example in the silicon technology where gate oxides are central, to passivation layers on metals such as aluminum. Previous studies have been limited in the availability of experimental techniques and equipment, leaving many questions on how oxidation occurs, especially during the first few atomic layers. This experimental study will depend primarily upon medium energy ion scattering, supplemented by other techniques including scanning tunneling microscopy and atomic fo rce microscopy. Materials of interest in this project are Si, Ni, Al, Cu, Ge and SiC. Results from this research may include unusual new effects which may find application in technology. This research project is interdisciplinary in nature and involves graduate and postgraduate students who will be excellently trained to enter positions in industry, government or education. ***

w：\awards\awards96\num.doc 9705367 Gustafsson 该实验研究项目是基于使用离子束散射的表面分析领域。 第一个项目集中在研究Ag和Cu表面上的两个最外层之间在超高真空中的高温下观察到的出乎意料的大间距。这种膨胀效应的研究将扩展到二元系统，并将与最近产生的理论预测进行比较。 第二个主要项目是研究氧化的初始阶段， - 10纳米的氧化物生长，利用自经典氧化研究以来在表面分析技术方面取得的巨大进步。重点是生长机制和所得氧化物的微观结构。广泛的系统，包括Si，Ni，Al，Cu，Ge和SiC将被研究。 各种额外的工具，包括STM，AFM和光电子能谱将在该项目中使用。 初步实验 工具 是高分辨率的 介质 能源 离子散射，它可以提供有关表面结构，生长机制和动力学的信息。 %这个 实验 研究使用先进 表面 在原子水平上研究金属和半导体上氧化膜生长过程的科学仪器。氧化物生长在广泛的技术领域中是极其重要的，例如在以栅极氧化物为中心的硅技术中， 涉及金属如铝上的钝化层。以前的研究受到实验技术和设备的限制，留下了许多关于氧化如何发生的问题，特别是在最初的几个原子层。这项实验研究将主要依赖于中能离子散射，辅以其他技术，包括扫描隧道显微镜和原子力显微镜。在这个项目中感兴趣的材料是Si，Ni，Al，Cu，Ge和SiC。本研究的结果 可能包括不寻常的新影响， 找到应用 在 技术. 这 研究 项目 是跨学科 在 性质 和 涉及 研究生 和研究生谁将得到良好的培训，进入工业，政府或教育职位。 ***