Structural Studies of Thin Films for Microelectronics Applications

微电子应用薄膜的结构研究

• 批准号: 1106070
• 负责人: Torgny Gustafsson
• 金额: $ 43万
• 依托单位: Rutgers University New Brunswick
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-07-01 至 2016-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1106070&HistoricalAwards=false
• 关键词: Structural; Studies; Thin; Films; Microelectronics

This project is co-funded by the Electronic and Photonic Materials (EPM) and Ceramics (CER) Programs in the Division of Materials Research (DMR).Technical: The past several years have seen a significant increase in research of ultrathin (up to 5 nanometers) epitaxial films. Exciting, new phenomena, such as novel electronic functionalities found in oxide materials, have been discovered. The properties of interfaces and surfaces are central to an understanding of these new phenomena. This project is centered on developing an atomistic picture of the structure and composition of several materials systems. The main experimental approach is medium-energy ion scattering, which is complemented and correlated in particular with scanning transmission electron microscopy, and also with scanning probe microscopy, photoelectron spectroscopy and electrical measurements. Specific research projects include (i) investigations of the interfaces between complex oxide materials, (ii) studies of materials whose bandgap can be manipulated over a very large range, making them promising candidates for novel optical and photochemical applications, and (iii) epitaxial films of topological insulators with potential impact on quantum computing.Nontechnical: A central focus of materials science today is the creation of new materials with novel and useful properties. Entirely new functionalities can result in commercially important new devices for computation, communication and energy applications. In order to understand the properties of these materials it is crucial to know on an atomic level their composition and the way the different atoms are arranged. This project is centered on studies of the structure and composition of several new materials systems. The main experimental approach is based on using energetic ions to probe surface and interface composition, a powerful tool to probe buried interfaces. It is complemented with a wide variety of spectroscopies sensitive to the electronic structure. The research project provides excellent opportunities for hands-on experience for students in the development and use of sophisticated scientific equipment and broadens their scientific horizons through established collaborations with scientists from Latin America. The direct and visually oriented nature of the information obtained makes it easy to communicate the excitement of materials science to students all the way from middle school to advanced graduate students.

该项目由材料研究部（DMR）的电子和光子材料（ETM）和陶瓷（CER）项目共同资助。技术：在过去的几年里，对ETM（高达5纳米）外延薄膜的研究有了显著的增长。令人兴奋的新现象，如在氧化物材料中发现的新的电子功能，已经被发现。界面和表面的性质是理解这些新现象的核心。该项目的重点是开发几种材料系统的结构和组成的原子图。主要的实验方法是中等能量离子散射，这是补充和相关的，特别是与扫描透射电子显微镜，也与扫描探针显微镜，光电子能谱和电气测量。具体的研究项目包括（i）复杂氧化物材料之间界面的研究，（ii）带隙可以在很大范围内操纵的材料的研究，使它们成为新的光学和光化学应用的有希望的候选者，以及（iii）拓扑绝缘体的外延膜对量子计算的潜在影响。当今材料科学的中心焦点是创造具有新颖和有用特性的新材料。新的功能可以产生商业上重要的新设备，用于计算，通信和能源应用。为了了解这些材料的性质，在原子水平上了解它们的组成以及不同原子的排列方式至关重要。该项目的重点是研究几种新材料系统的结构和组成。主要的实验方法是基于使用高能离子探测表面和界面的组成，一个强大的工具，探测埋界面。它补充了各种各样的光谱敏感的电子结构。该研究项目为学生提供了开发和使用先进科学设备的实践经验的绝佳机会，并通过与拉丁美洲科学家的既定合作拓宽了他们的科学视野。所获得的信息的直接和视觉导向的性质使得它很容易传达材料科学的兴奋，从中学到高级研究生的学生。