MRI: Development of an Integrated Ion Scattering and Vibrational Spectroscopy Facility for Quantitative Analysis of Hydrogen for Research and Education

简短的技术摘要：量化氢和低质量原子的浓度，同时确定其键合构型和深度分布的能力是科学，工程和工业中广泛应用所必需的。氢几乎总是存在于薄膜中，通常集中在表面和界面处，并且可以以实质性的方式影响材料特性。例如，氢可以通过钝化或在界面处引入缺陷来改善或降低微电子器件的性能。在其他类别的材料中，氢会降低机械性能并可能导致脆化。氢也是未来能源使用的关键元素。氢、碳、氧和氮是聚合物、有机物、药物和生物分子的基本元素。因此，氢和低质量元素浓度的定量测定对于薄膜和生物界面的全面表征至关重要，而薄膜和生物界面构成了生物技术的基石。我们建议构建一个集成的超高真空室，结合原位红外吸收光谱（IRAS）与NRA和ERDA检测氢，和掠射角检测（GAD）检测其他低质量原子。当结合红外光谱对氢和轻原子的键合状态的灵敏度时，ERDA不仅可以提供关键的精确定量，还可以提供氢和其他低质量物质的类型和数量的形态，从而可以大大加快我们理解其材料化学背后的基础科学的能力，并在实际应用中更好地控制这些物质。拟议的建设项目的目的是提供表面，界面和薄膜（无机，有机和生物）的定量化学和结构信息，其中氢和轻原子起着重要作用。新设施将对罗格斯大学内外的研究和教育计划产生广泛的影响，包括生物学，生物催化，药物合成，纳米电子学，绝缘体上硅（SOI）制造和H存储。氢气可以说是自然界中最重要的元素;它是所有燃料和软物质（塑料，胶水等）的一部分，对硬物质的性质（金属脆化、药物）起着重要作用，是重要的能源。为了了解它的作用并充分利用它的特性，必须使用精确的测量方法来检测和表征氢。虽然可以使用红外光谱法（一种测量氢的特征振动的方法）确定化学状态（键合构型），但要测量材料内或界面处的氢总量要困难得多。最好的方法是将高能离子送入感兴趣的材料中，并测量喷射出的氢原子的数量（由于进入的重离子与材料内较轻的氢原子之间的强烈碰撞）。 在这里，我们建议构建一个集成的系统，结合红外光谱与各种方法的基础上离子散射检测材料中的氢的化学性质和数量。该设施将大大加快我们理解材料化学背后的基础科学的能力，并为各种应用提供更好的氢气控制。新设施还将对罗格斯大学内外的研究和教育计划产生广泛的影响，包括生物学，生物催化，药物合成，纳米电子学，微芯片制造和储氢。

Short technical abstract:The ability to quantify the concentration of hydrogen and low mass atoms while determining their bonding configuration and depth profile is needed for a wide range of applications in science, engineering and industry. Hydrogen is almost always present in thin films, is often concentrated at surfaces and interfaces, and can affect material properties in a substantial manner. For example, hydrogen can either improve or degrade the performance of microelectronic devices by passivating or introducing defects at interfaces. In other classes of materials, hydrogen degrades mechanical properties and can lead to embrittlement. Hydrogen is also a critical element for future energy use. Hydrogen, carbon, oxygen and nitrogen are the basic elements of polymers, organic, pharmaceutical and biological molecules. Quantitative determination of hydrogen and low mass element concentration is therefore essential for full characterization of thin films and bio-interfaces, which constitute the building blocks for biotechnology. We propose to construct an integrated ultra-high vacuum chamber that combines in-situ infrared absorption spectroscopy (IRAS) with NRA and ERDA to detect hydrogen, and glancing angle detection (GAD) to detect other low-mass atoms. When combined with the sensitivity of IR spectroscopy to the bonding state of hydrogen and light atoms, ERDA will provide not only critical accurate quantification but also speciation of the types and amounts of hydrogen and other low mass species, thus making it possible to greatly accelerate our ability to understand the basic science behind their materials chemistry, and to yield better control of these species in practical applications. The purpose of the proposed construction project is to provide quantitative chemical and structural information of surfaces, interfaces and thin films (inorganic, organic, and biological) in which hydrogen and light atoms play an important role. The new facility will have a wide-reaching influence on research and education programs within and outside Rutgers spanning a number of areas, including biology, bio-catalysis, drugs synthesis, nano-electronics, silicon-on-insulator (SOI) fabrication, and H-storage. Short technical abstract:Hydrogen is arguably the most important element in nature; it is part of all fuels and soft matter (plastics, glue, etc.), plays an important role in the properties of hard matter (metal embrittlement, drugs), and is an important source of energy. To understand its role and to take full advantage of its properties, precise measurement methods must use to detect and characterize hydrogen. While is chemical state (bonding configuration) can be determined using infrared spectroscopy (a method to measure the characteristic vibrations of hydrogen), it is much more difficult to measure the total amount of hydrogen within a material, or at an interface. The best method is to send high energy ions into the material of interest and to measure the number of hydrogen atoms ejected (due to the strong collision between the heavy incoming ion and lighter hydrogen atom inside the material). We propose here to construct an integrated system that combines infrared spectroscopy with various methods based on ion scattering to detect both the chemical nature and quantity of hydrogen in materials. This facility will make it possible to greatly accelerate our ability to understand the basic science behind materials chemistry, and to yield better control of hydrogen for various applications. The new facility will also have a wide-reaching influence on research and education programs within and outside Rutgers spanning a number of areas, including biology, bio-catalysis, drugs synthesis, nano-electronics, microchip fabrication, and hydrogen storage.