MRI: Development of an Integrated Ion Scattering and Vibrational Spectroscopy Facility for Quantitative Analysis of Hydrogen for Research and Education

简短的技术摘要：在科学、工程和工业的广泛应用中，需要量化氢和低质量原子的浓度，同时确定它们的键构型和深度分布。氢几乎总是存在于薄膜中，通常集中在表面和界面上，并且可以在很大程度上影响材料的性能。例如，氢可以通过钝化或引入界面缺陷来改善或降低微电子器件的性能。在其他种类的材料中，氢会降低机械性能并导致脆化。氢也是未来能源使用的关键元素。氢、碳、氧和氮是聚合物、有机分子、药物和生物分子的基本元素。因此，氢和低质量元素浓度的定量测定对于薄膜和生物界面的全面表征至关重要，而薄膜和生物界面构成了生物技术的基石。我们提出构建一个集原位红外吸收光谱（IRAS）与NRA和ERDA相结合的集成超高真空室，用于检测氢，并结合掠射角检测（GAD）来检测其他低质量原子。当与红外光谱对氢和光原子键合状态的灵敏度相结合时，ERDA不仅可以提供关键的精确定量，还可以提供氢和其他低质量物质的类型和数量的物种形成，从而可以大大加快我们理解其材料化学背后的基础科学的能力，并在实际应用中更好地控制这些物质。拟建设项目的目的是提供氢和光原子起重要作用的表面、界面和薄膜（无机、有机和生物）的定量化学和结构信息。新设施将对罗格斯大学内外的研究和教育项目产生广泛的影响，涉及多个领域，包括生物学、生物催化、药物合成、纳米电子学、绝缘体上硅（SOI）制造和氢存储。简短的技术摘要：氢可以说是自然界中最重要的元素；它是所有燃料和软物质（塑料、胶水等）的组成部分，对硬物质（金属脆化、药品）的性能起着重要作用，是能源的重要来源。为了了解它的作用并充分利用它的特性，必须使用精确的测量方法来探测和表征氢。虽然它的化学状态（键构型）可以用红外光谱（一种测量氢的特征振动的方法）来确定，但要测量材料内或界面上的氢的总量要困难得多。最好的方法是将高能离子送入感兴趣的材料，并测量喷出的氢原子的数量（由于入射的重离子和材料内部较轻的氢原子之间的强烈碰撞）。在此，我们建议构建一个结合红外光谱和基于离子散射的各种方法的综合系统来检测材料中氢的化学性质和数量。这个设施将大大加快我们理解材料化学背后的基础科学的能力，并为各种应用提供更好的氢控制。新设施还将对罗格斯大学内外的多个领域的研究和教育项目产生广泛的影响，包括生物学、生物催化、药物合成、纳米电子学、微芯片制造和氢储存。

Short technical abstract:The ability to quantify the concentration of hydrogen and low mass atoms while determining their bonding configuration and depth profile is needed for a wide range of applications in science, engineering and industry. Hydrogen is almost always present in thin films, is often concentrated at surfaces and interfaces, and can affect material properties in a substantial manner. For example, hydrogen can either improve or degrade the performance of microelectronic devices by passivating or introducing defects at interfaces. In other classes of materials, hydrogen degrades mechanical properties and can lead to embrittlement. Hydrogen is also a critical element for future energy use. Hydrogen, carbon, oxygen and nitrogen are the basic elements of polymers, organic, pharmaceutical and biological molecules. Quantitative determination of hydrogen and low mass element concentration is therefore essential for full characterization of thin films and bio-interfaces, which constitute the building blocks for biotechnology. We propose to construct an integrated ultra-high vacuum chamber that combines in-situ infrared absorption spectroscopy (IRAS) with NRA and ERDA to detect hydrogen, and glancing angle detection (GAD) to detect other low-mass atoms. When combined with the sensitivity of IR spectroscopy to the bonding state of hydrogen and light atoms, ERDA will provide not only critical accurate quantification but also speciation of the types and amounts of hydrogen and other low mass species, thus making it possible to greatly accelerate our ability to understand the basic science behind their materials chemistry, and to yield better control of these species in practical applications. The purpose of the proposed construction project is to provide quantitative chemical and structural information of surfaces, interfaces and thin films (inorganic, organic, and biological) in which hydrogen and light atoms play an important role. The new facility will have a wide-reaching influence on research and education programs within and outside Rutgers spanning a number of areas, including biology, bio-catalysis, drugs synthesis, nano-electronics, silicon-on-insulator (SOI) fabrication, and H-storage. Short technical abstract:Hydrogen is arguably the most important element in nature; it is part of all fuels and soft matter (plastics, glue, etc.), plays an important role in the properties of hard matter (metal embrittlement, drugs), and is an important source of energy. To understand its role and to take full advantage of its properties, precise measurement methods must use to detect and characterize hydrogen. While is chemical state (bonding configuration) can be determined using infrared spectroscopy (a method to measure the characteristic vibrations of hydrogen), it is much more difficult to measure the total amount of hydrogen within a material, or at an interface. The best method is to send high energy ions into the material of interest and to measure the number of hydrogen atoms ejected (due to the strong collision between the heavy incoming ion and lighter hydrogen atom inside the material). We propose here to construct an integrated system that combines infrared spectroscopy with various methods based on ion scattering to detect both the chemical nature and quantity of hydrogen in materials. This facility will make it possible to greatly accelerate our ability to understand the basic science behind materials chemistry, and to yield better control of hydrogen for various applications. The new facility will also have a wide-reaching influence on research and education programs within and outside Rutgers spanning a number of areas, including biology, bio-catalysis, drugs synthesis, nano-electronics, microchip fabrication, and hydrogen storage.