SBIR Phase I: Micromachined Vacuum Microelectronic Devices Using Nanoscale Self-Assembly

9861546这个小型企业创新研究第一阶段项目将探索利用自组织氧化铝陶瓷微细制造真空微电子组件的新的低成本制造技术。这种方法是基于自组装的无机前驱体，由于其独特的纳米级形貌，可以各向异性地刻蚀。所提出的创新允许创建高深宽比、高分辨率的微部件，并且不需要昂贵的深X射线光刻来进行微加工。感兴趣的器件包括真空集成电路，以及具有高机械、温度和辐射稳定性的高功率和高效率真空微器件。该技术在概念验证阶段的能力将在第一阶段以真空三极管原型为基础进行评估。在第二阶段，NRC将优化和扩大技术，第三阶段将专注于商业化。超快、耐辐射和耐高温的微器件可能使真空微电子的性能和功能达到新的水平。该技术具有很好的应用潜力。任何需要高功率电子设备能够在恶劣条件下工作的应用，如空间、卫星通信、雷达、深井钻探、核反应堆控制等，都将受益于这种方法。衍生应用将包括快速响应、低功耗、低功耗传感器和执行器、平板显示器、静电推进器、化学处理微系统和其他微电子机械。

9861546 This Small Business Innovation Research Phase I project will explore novel low-cost manufacturing technology for micro-fabrication of vacuum microelectronics components from self-organized alumina ceramic. The approach is based on self-assembled Inorganic precursor, that can be anisotropically etched due to its unique nanoscale morphology The proposed innovation allows the creation of high aspect ratio high resolution micro-components, and does not require expensive deep X-ray lithography for micro-machining. The devices of interest include vacuum integrated circuits, as well as high power and high efficiency vacuum micro-devices with high mechanical, temperature and radiation stability. The capabilities of the technology at the proof-of-concept stage will be evaluated during the Phase I based on the prototype vacuum triode. During Phase II NRC will optimize and scale-up the technology, and Phase III will be a focused on commercialization. Ultrafast, radiation and temperature resistant micro-devices can potentially enable new level of performance and functionality of vacuum microelectronics. The application potential of the proposed technology is exceptional. Any application requiring high power electronic devices capable of functioning in the harsh conditions, such as space, satellite communications, radars, deep well drilling, control of nuclear reactors, and others, will benefit from this approach. Spin-off applications will include fast response low power low power sensors and actuators, flat panel displays, electrostatic thrusters, chemical processing micro-systems, and other micro-electro-mech