SBIR Phase I: Micromachined Vacuum Microelectronic Devices Using Nanoscale Self-Assembly

这个小企业创新研究第一阶段项目将探索用自组织氧化铝陶瓷制造真空微电子元件的新型低成本制造技术。该方法基于自组装的无机前驱体，由于其独特的纳米级形态，可以进行各向异性蚀刻。提出的创新允许创建高纵横比高分辨率的微组件，并且不需要昂贵的深x射线光刻进行微加工。真空集成电路以及具有高机械稳定性、温度稳定性和辐射稳定性的大功率、高效率真空微器件是研究的热点。该技术在概念验证阶段的能力将在基于真空三极管原型的第一阶段进行评估。在第二阶段，NRC将优化和扩大技术规模，第三阶段将专注于商业化。超快，耐辐射和耐温度的微器件可能使真空微电子的性能和功能达到新的水平。所提出的技术的应用潜力是非凡的。任何需要在恶劣条件下工作的高功率电子设备的应用，如太空、卫星通信、雷达、深井钻井、核反应堆控制等，都将受益于这种方法。衍生应用将包括快速响应低功耗低功耗传感器和执行器，平板显示器，静电推进器，化学处理微系统和其他微型机电

9861546 This Small Business Innovation Research Phase I project will explore novel low-cost manufacturing technology for micro-fabrication of vacuum microelectronics components from self-organized alumina ceramic. The approach is based on self-assembled Inorganic precursor, that can be anisotropically etched due to its unique nanoscale morphology The proposed innovation allows the creation of high aspect ratio high resolution micro-components, and does not require expensive deep X-ray lithography for micro-machining. The devices of interest include vacuum integrated circuits, as well as high power and high efficiency vacuum micro-devices with high mechanical, temperature and radiation stability. The capabilities of the technology at the proof-of-concept stage will be evaluated during the Phase I based on the prototype vacuum triode. During Phase II NRC will optimize and scale-up the technology, and Phase III will be a focused on commercialization. Ultrafast, radiation and temperature resistant micro-devices can potentially enable new level of performance and functionality of vacuum microelectronics. The application potential of the proposed technology is exceptional. Any application requiring high power electronic devices capable of functioning in the harsh conditions, such as space, satellite communications, radars, deep well drilling, control of nuclear reactors, and others, will benefit from this approach. Spin-off applications will include fast response low power low power sensors and actuators, flat panel displays, electrostatic thrusters, chemical processing micro-systems, and other micro-electro-mech