SBIR Phase I: Micromachined Vacuum Microelectronic Devices Using Nanoscale Self-Assembly

SBIR 第一阶段：利用纳米级自组装的微机械真空微电子器件

• 批准号: 9861546
• 负责人: Peter Mardilovich
• 金额: $ 10万
• 依托单位: Nanomaterials Research LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-01-01 至 1999-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9861546&HistoricalAwards=false
• 关键词: SBIR; Phase; Micromachined; Vacuum; Microelectronic

9861546 This Small Business Innovation Research Phase I project will explore novel low-cost manufacturing technology for micro-fabrication of vacuum microelectronics components from self-organized alumina ceramic. The approach is based on self-assembled Inorganic precursor, that can be anisotropically etched due to its unique nanoscale morphology The proposed innovation allows the creation of high aspect ratio high resolution micro-components, and does not require expensive deep X-ray lithography for micro-machining. The devices of interest include vacuum integrated circuits, as well as high power and high efficiency vacuum micro-devices with high mechanical, temperature and radiation stability. The capabilities of the technology at the proof-of-concept stage will be evaluated during the Phase I based on the prototype vacuum triode. During Phase II NRC will optimize and scale-up the technology, and Phase III will be a focused on commercialization. Ultrafast, radiation and temperature resistant micro-devices can potentially enable new level of performance and functionality of vacuum microelectronics. The application potential of the proposed technology is exceptional. Any application requiring high power electronic devices capable of functioning in the harsh conditions, such as space, satellite communications, radars, deep well drilling, control of nuclear reactors, and others, will benefit from this approach. Spin-off applications will include fast response low power low power sensors and actuators, flat panel displays, electrostatic thrusters, chemical processing micro-systems, and other micro-electro-mech

9861546 这个小型企业创新研究第一阶段项目将探索新型低成本制造技术，用于利用自组织氧化铝陶瓷微制造真空微电子元件。该方法基于自组装无机前驱体，由于其独特的纳米级形态，可以进行各向异性蚀刻。所提出的创新允许创建高纵横比高分辨率微型元件，并且不需要昂贵的深度X射线光刻来进行微加工。感兴趣的器件包括真空集成电路，以及具有高机械、温度和辐射稳定性的高功率和高效率真空微型器件。该技术在概念验证阶段的能力将在第一阶段基于原型真空三极管进行评估。在第二阶段，NRC 将优化和扩大该技术，第三阶段将重点关注商业化。 超快、耐辐射和耐高温的微型器件有可能使真空微电子学的性能和功能达到新的水平。所提出的技术的应用潜力是非凡的。任何需要能够在恶劣条件下运行的高功率电子设备的应用，例如太空、卫星通信、雷达、深井钻探、核反应堆控制等，都将从这种方法中受益。衍生应用将包括快速响应低功耗传感器和执行器、平板显示器、静电推进器、化学处理微系统和其他微机电