CAREER: IC-Compatible Ferromagnetic MEMS

9876285Judy申请人提出了一个职业发展计划，目标如下：(I)发展一个强大的基于实验室的微机电系统（MEMS）教育计划，这将对各种背景的研究生和本科生的培训产生多学科影响；(2)制定强有力的研究计划，重点研究铁磁材料、MEMS和集成电路的兼容集成方法和应用。本研究计划的目标是：(1)开发铁磁材料与MEMS和ic兼容集成的方法；(2)将铁磁材料与微机械弯曲和电容式位置检测ic（与微机械惯性传感器中使用的ic非常相似）相结合，生产出灵敏度极高的微功率磁力计（适用于长期无线传感器网络）；(3)开发集成密集高长径比绕组的方法，该方法嵌入基板中，可以使高磁力微致动器消耗更少的功率和模具面积。教育计划：这个职业规划的教育部分包括几个主要的努力，包括开发一个夏季拓展计划和四门新课程，这将补充加州大学洛杉矶分校现有的研究生水平的MEMS课程。(1)微加工与微机电系统导论，这是一门以微加工为重点的微机电系统本科课程，每周有4小时的实验。本课程将作为对MEMS感兴趣的所有背景的学生的入门课程。(2)先进微加工与MEMS实验室；一个研究生水平的微机械加工实验室，将为学生提供宝贵的实践经验，他们将在MEMS研究中使用相同的设备。(3)磁性材料导论（Introduction to Magnetic Materials），这是一门面向大四/研究生的课程，将服务于整个校园，因为目前没有深入介绍磁性材料工程性质的课程。(4) MEMS研讨会系列，每周一次的研讨会，为来自校园的学生和访问MEMS的海外研究人员提供了一个论坛。(5) MEMS暑期研究和推广项目，专门为加州大学洛杉矶分校的本科生和来自洛杉矶周边地区的高三学生量身定制

9876285Judy This applicant proposes a career development program with the following objectives: (I) to develop a strong laboratory-based microelectromechanical systems (MEMS) educational program, that will have a multidisciplinary impact on the training of graduate and undergraduate students of all backgrounds; (2) to develop a strong research program that focuses on the methods and applications of compatibly integrating ferromagnetic materials, MEMS, and ICs.The objectives of this research program are: (I.) to develop methods of compatibly integrating ferromagnetic materials with MEMS and ICs; (2) to combine ferromagnetic materials with micromachined flexures and capacitive position detecting ICs (very similar to those used in micromachined inertial sensors), to produce extremely sensitive micropower magnetometers (suitable for long-term wireless sensor networks); (3) to develop methods of integrating dense high aspect ratio windings, that are imbedded into the substrate and can enable high-force magnetic microactuators that consume less power and die area.Educational Program:The educational part this career plan consists of several major efforts, including the development of a summer outreach program and four new courses, which will compliment the existing graduate-level MEMS courses available at UCLA. (1) Introduction to Micromachining and MEMS, an undergraduate course on MEMS that emphasizes micromachining and has an accompanying weekly 4-hour laboratory. This course will serve as an entry course for students of all backgrounds who have an interest in MEMS. (2) Advanced Micromachining and MEMS Laboratory; a graduate-level laboratory on micromachining that wiJJ give students valnabie hands-on experience with the same equipment they will use in their research on MEMS. (3) Introduction to Magnetic Materials, a course taught at the senior/graduate level that will serve the entire campus, since there is presently no course that covers the engineering properties of magnetic materials in depth. (4) MEMS Seminar Series, a weekly seminar that provides a forum for featuring speakers varying from students on campus to visiting MEMS researchers from overseas. (5) MEMS Summer Research and Outreach Program, specifically tailored for UCLA undergraduates and advanced high school seniors from the surrounding Los Angeles area.***