CAREER: IC-Compatible Ferromagnetic MEMS

这个申请者提出了一个职业发展计划，目标如下：(I)发展一个强有力的以实验室为基础的微型机电系统(MEMS)教育计划，该计划将对所有背景的研究生和本科生的培养产生多学科的影响；(2)发展一个强有力的研究计划，专注于铁磁材料、MEMS和集成电路的兼容集成的方法和应用。该研究计划的目标是：(I)开发铁磁材料与MEMS和IC兼容集成的方法；(2)将铁磁材料与微机械弯曲和电容式位置检测IC(与微机械惯性传感器中使用的非常相似)相结合，制造极灵敏的微功率磁强计(适用于长期无线传感器网络)；(3)开发集成高密度高纵横比绕组的方法，这种绕组嵌入到基板中，可以实现功耗更低、死亡面积更小的高力磁微执行器。教育计划：教育部分本职业计划包括几个主要努力，包括开发一个暑期外展计划和四个新课程，这些课程将补充加州大学洛杉矶分校现有的研究生水平的MEMS课程。(1)微机械和微机械概论，这是一门关于微机械的本科课程，重点是微机械加工，并有每周4小时的附属实验室。本课程将作为对MEMS感兴趣的所有背景的学生的入门课程。(2)先进微机械与MEMS实验室：一个研究生级别的微机械实验室，JJ为学生提供了有效的动手体验，使用的设备与他们将在MEMS研究中使用的相同。(3)磁性材料导论，这是一门在高级/研究生阶段教授的课程，将服务于整个校园，因为目前还没有深入讨论磁性材料工程性质的课程。(4)MEMS研讨会系列，这是一个每周一次的研讨会，为来自校园的学生和来自海外的访问MEMS研究人员的演讲者提供一个论坛。(5)MEMS夏季研究和推广计划，专门为加州大学洛杉矶分校的本科生和洛杉矶周边地区的高三学生量身定做。*

9876285Judy This applicant proposes a career development program with the following objectives: (I) to develop a strong laboratory-based microelectromechanical systems (MEMS) educational program, that will have a multidisciplinary impact on the training of graduate and undergraduate students of all backgrounds; (2) to develop a strong research program that focuses on the methods and applications of compatibly integrating ferromagnetic materials, MEMS, and ICs.The objectives of this research program are: (I.) to develop methods of compatibly integrating ferromagnetic materials with MEMS and ICs; (2) to combine ferromagnetic materials with micromachined flexures and capacitive position detecting ICs (very similar to those used in micromachined inertial sensors), to produce extremely sensitive micropower magnetometers (suitable for long-term wireless sensor networks); (3) to develop methods of integrating dense high aspect ratio windings, that are imbedded into the substrate and can enable high-force magnetic microactuators that consume less power and die area.Educational Program:The educational part this career plan consists of several major efforts, including the development of a summer outreach program and four new courses, which will compliment the existing graduate-level MEMS courses available at UCLA. (1) Introduction to Micromachining and MEMS, an undergraduate course on MEMS that emphasizes micromachining and has an accompanying weekly 4-hour laboratory. This course will serve as an entry course for students of all backgrounds who have an interest in MEMS. (2) Advanced Micromachining and MEMS Laboratory; a graduate-level laboratory on micromachining that wiJJ give students valnabie hands-on experience with the same equipment they will use in their research on MEMS. (3) Introduction to Magnetic Materials, a course taught at the senior/graduate level that will serve the entire campus, since there is presently no course that covers the engineering properties of magnetic materials in depth. (4) MEMS Seminar Series, a weekly seminar that provides a forum for featuring speakers varying from students on campus to visiting MEMS researchers from overseas. (5) MEMS Summer Research and Outreach Program, specifically tailored for UCLA undergraduates and advanced high school seniors from the surrounding Los Angeles area.***