CAREER: IC-Compatible Ferromagnetic MEMS

9876285朱迪本申请人提出了一个职业发展计划，具有以下目标：（一）发展一个强大的实验室为基础的微机电系统（MEMS）教育计划，这将对所有背景的研究生和本科生的培训产生多学科的影响;（2）发展一个强大的研究计划，重点是兼容集成铁磁材料，MEMS，和集成电路。本研究计划的目标是：（一）（2）将铁磁材料与微机械弯曲件和电容式位置检测集成电路联合收割机相结合（非常类似于微机械惯性传感器中使用的那些），以生产极其灵敏的微功率磁力计（适用于长期无线传感器网络）;（3）开发集成密集的高纵横比绕组的方法，这些绕组嵌入到衬底中，并且可以实现消耗更少功率和管芯面积的高力磁性微致动器。该职业计划的教育部分包括几项主要工作，包括开发夏季推广计划和四门新课程，这将补充加州大学洛杉矶分校现有的研究生水平MEMS课程。(1)微机械加工和MEMS介绍，MEMS的本科课程，强调微机械加工，并有一个每周4小时的实验室。本课程将作为对MEMS感兴趣的所有背景的学生的入门课程。(2)先进的微机械加工和MEMS实验室;一个研究生水平的微机械加工实验室，wiJJ给学生valnabie实践经验与相同的设备，他们将使用在他们的MEMS研究。(3)介绍磁性材料，在高年级/研究生水平，将服务于整个校园，因为目前还没有课程，深入涵盖磁性材料的工程特性教授的课程。(4)MEMS研讨会系列，每周一次的研讨会，提供了一个论坛，从校园学生到来自海外的访问MEMS研究人员的演讲者。(5)MEMS暑期研究和推广计划，专门为加州大学洛杉矶分校的本科生和来自周边洛杉矶地区的高中高年级学生量身定制。*

9876285Judy This applicant proposes a career development program with the following objectives: (I) to develop a strong laboratory-based microelectromechanical systems (MEMS) educational program, that will have a multidisciplinary impact on the training of graduate and undergraduate students of all backgrounds; (2) to develop a strong research program that focuses on the methods and applications of compatibly integrating ferromagnetic materials, MEMS, and ICs.The objectives of this research program are: (I.) to develop methods of compatibly integrating ferromagnetic materials with MEMS and ICs; (2) to combine ferromagnetic materials with micromachined flexures and capacitive position detecting ICs (very similar to those used in micromachined inertial sensors), to produce extremely sensitive micropower magnetometers (suitable for long-term wireless sensor networks); (3) to develop methods of integrating dense high aspect ratio windings, that are imbedded into the substrate and can enable high-force magnetic microactuators that consume less power and die area.Educational Program:The educational part this career plan consists of several major efforts, including the development of a summer outreach program and four new courses, which will compliment the existing graduate-level MEMS courses available at UCLA. (1) Introduction to Micromachining and MEMS, an undergraduate course on MEMS that emphasizes micromachining and has an accompanying weekly 4-hour laboratory. This course will serve as an entry course for students of all backgrounds who have an interest in MEMS. (2) Advanced Micromachining and MEMS Laboratory; a graduate-level laboratory on micromachining that wiJJ give students valnabie hands-on experience with the same equipment they will use in their research on MEMS. (3) Introduction to Magnetic Materials, a course taught at the senior/graduate level that will serve the entire campus, since there is presently no course that covers the engineering properties of magnetic materials in depth. (4) MEMS Seminar Series, a weekly seminar that provides a forum for featuring speakers varying from students on campus to visiting MEMS researchers from overseas. (5) MEMS Summer Research and Outreach Program, specifically tailored for UCLA undergraduates and advanced high school seniors from the surrounding Los Angeles area.***