Acquisition of a Deep Ultraviolet/Infrared Mask Aligner for Microscale/Nanoscale Device Research and Education

采购深紫外/红外掩模对准器用于微尺度/纳米尺度器件研究和教育

• 批准号: 0114252
• 负责人: Linda Olafsen
• 金额: $ 12.79万
• 依托单位: University of Kansas Center for Research Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-08-01 至 2002-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0114252&HistoricalAwards=false
• 关键词: Acquisition; Deep; Ultraviolet; Infrared; Mask

This award from the Instrumentation for Materials Research program will allow the University of Kansas (UK) to acquire a deep ultraviolet/infrared (UV/IR) mask aligner. This instrument will support the research of five different groups for fabrication of micron-scale and nano-scale devices. These devices include superconducting thin films and tunnel junctions, semiconductor lasers and detectors, III-N devices, and microchip-based electrophoresis devices. This acquisition will enhance existing materials research infrastructure at KU and will greatly improve KU's nanoscience and technology and materials research competitiveness. In addition, the instrument will be an excellent education and training platform providing a unique opportunity to learn thin film device and integrated circuit fabrication technologies. Deep UV and IR lamps are critical features of the proposed acquisition. The acquisition of a deep UV/IR mask aligner is essential to research programs that span the Physics and Astronomy, Chemical and Petroleum Engineering, and Pharmaceutical Chemistry departments. These studies will have direct impact on the development of the next-generation of information, computing, semiconductors and pharmaceutical technology.This award from the Instrumentation for Materials Research program will allow the University of Kansas (UK) to acquire a deep ultraviolet/infrared (UV/IR) mask aligner. This instrument will support the research of five different groups for fabrication of micron-scale and nano-scale devices. These devices include superconducting thin films and tunnel junctions, semiconductor lasers and detectors, III-N devices, and microchip-based electrophoresis devices. This acquisition will enhance existing materials research infrastructure at KU and will greatly improve KU's nanoscience and technology and materials research competitiveness. In addition, the instrument will be an excellent education and training platform providing a unique opportunity to learn thin film device and integrated circuit fabrication technologies. Deep UV and IR lamps are critical features of the proposed acquisition. The acquisition of a deep UV/IR mask aligner is essential to research programs that span the Physics and Astronomy, Chemical and Petroleum Engineering, and Pharmaceutical Chemistry departments. These studies will have direct impact on the development of the next-generation of information, computing, semiconductors and pharmaceutical technology..

这项来自材料研究计划仪器的奖励将使堪萨斯大学（英国）获得深紫外/红外（UV/IR）掩模对准器。该仪器将支持五个不同小组的研究，以制造微米级和纳米级器件。这些器件包括超导薄膜和隧道结、半导体激光器和探测器、III-N器件和基于微芯片的电泳器件。此次收购将增强KU现有的材料研究基础设施，并将大大提高KU的纳米科学技术和材料研究竞争力。此外，该仪器将是一个优秀的教育和培训平台，为学习薄膜器件和集成电路制造技术提供了一个独特的机会。深紫外线和红外线灯是拟议收购的关键特征。深紫外/红外掩模对准器的收购是必不可少的研究计划，跨越物理和天文学，化学和石油工程，以及药物化学部门。这些研究将对下一代信息、计算、半导体和制药技术的发展产生直接影响。材料研究仪器项目的这一奖项将使堪萨斯大学（英国）获得一种深紫外/红外（UV/IR）掩模对准器。该仪器将支持五个不同小组的研究，以制造微米级和纳米级器件。这些器件包括超导薄膜和隧道结、半导体激光器和探测器、III-N器件和基于微芯片的电泳器件。此次收购将增强KU现有的材料研究基础设施，并将大大提高KU的纳米科学技术和材料研究竞争力。此外，该仪器将是一个优秀的教育和培训平台，为学习薄膜器件和集成电路制造技术提供了一个独特的机会。深紫外线和红外线灯是拟议收购的关键特征。深紫外/红外掩模对准器的收购是必不可少的研究计划，跨越物理和天文学，化学和石油工程，以及药物化学部门。这些研究将对下一代信息、计算、半导体和制药技术的发展产生直接影响。