In-Line Optical Measurement of MicroElectroMechanical Systems (MEMS) Devices During Production

生产过程中微机电系统 (MEMS) 器件的在线光学测量

• 批准号: 0200331
• 负责人: Levent Degertekin
• 金额: --
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-07-01 至 2006-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0200331&HistoricalAwards=false
• 关键词: Line; Optical; Measurement; MicroElectroMechanical; Systems

This grant provides for the development of a metrology tool to enhance quality assurance of micro-electro-mechanical systems (MEMS). The micro-interferometers developed will enable the high-speed geometric measurement of micro-geometries providing feedback as to the conformance of the micro-part geometry to target specifications. The sensors to be developed in this research are based on diffraction grating interferometry making them extremely accurate, reliable and fast. As the sensors are fabricated using MEMS technology, they can be inexpensively fabricated in the form of an array. Furthermore, electrostatic drives will be integrated into the sensor arrays along with electronics and logic for tuning individual sensors in the array. This will permit the generation of self-tuning, parallel sensors increasing the speed at which a group of MEMS parts can be measured with sub-nanometer resolution. Inspection results will be generated for several known geometries to validate the sensors. The micro-interferometer arrays, which provide three-dimensional information, will also be compared to current two-dimensional metrology systems used in IC fabrication as another means of determining their capabilities.If successful, the proposed work will enable the measurement of micro-components that are critical in micro-electro-mechanical systems (MEMS). To date, measurement of such devices has been slow and inaccurate at best. The new metrology capabilities will enable both an increased understanding of the quality level of such systems that will, in turn, permit the monitoring and enhancement of the processes that are used in fabricating such systems. Furthermore, the speed at which measurement can be taken with the proposed sensors will enable dynamic measurement of moving MEMS devices. This will permit the validation of not only the static geometry of the devices, but also the validation of the dynamic behavior of these devices.

这笔赠款用于开发计量工具，以增强微机电系统 (MEMS) 的质量保证。所开发的微干涉仪将能够对微几何形状进行高速几何测量，并提供有关微零件几何形状是否符合目标规格的反馈。本研究中开发的传感器基于衍射光栅干涉测量法，使其极其准确、可靠和快速。由于传感器是使用 MEMS 技术制造的，因此可以以阵列的形式廉价地制造它们。此外，静电驱动器将与电子器件和逻辑器件一起集成到传感器阵列中，用于调整阵列中的各个传感器。这将允许产生自调谐并行传感器，提高以亚纳米分辨率测量一组 MEMS 零件的速度。将为几个已知的几何形状生成检查结果以验证传感器。提供三维信息的微干涉仪阵列还将与当前 IC 制造中使用的二维计量系统进行比较，作为确定其功能的另一种方法。如果成功，拟议的工作将能够测量微机电系统 (MEMS) 中至关重要的微型元件。迄今为止，对此类设备的测量充其量是缓慢且不准确的。新的计量功能将使人们更好地了解此类系统的质量水平，从而能够监控和增强用于制造此类系统的工艺。此外，所提出的传感器的测量速度将使移动 MEMS 设备的动态测量成为可能。这不仅可以验证设备的静态几何形状，还可以验证这些设备的动态行为。