CAREER: Quantitative Ultrasonic Atomic Force Microscopy of Thin Films and Subsurface Interfaces

职业：薄膜和地下界面的定量超声原子力显微镜

• 批准号: 0348582
• 负责人: Levent Degertekin
• 金额: $ 40万
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-05-01 至 2010-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0348582&HistoricalAwards=false
• 关键词: CAREER; Quantitative; Ultrasonic; Atomic; Force

The atomic force microscope (AFM) has become an indispensable tool for nanoscience and nanotechnology providing excellent lateral and vertical surface topography resolution non-destructively using soft cantilevers with sharp tips. To probe the mechanical properties of solid surfaces and obtain information about subsurface interfaces and defects, however, the AFM cantilever needs to be stiffer. One can increase the effective stiffness of the AFM by vibrating the AFM cantilever at ultrasonic frequencies surfaces while maintaining the outstanding lateral resolution with low DC or tapping contact force. This research proposal aims to investigate the potential of ultrasonic AFM techniques for non-destructive, quantitative measurements of thin film material properties and interfaces, and more specifically, for in-situ imaging of subsurface defects in electronic interconnect structures and other nanoscale devices. The proposed innovative research plan has the following specific aims: (a) Development of theoretical models of the interactions of the AFM cantilever tip and patterned surfaces and subsurface defects at ultrasonic frequencies, (b) Development of measurement methods combining tapping mode imaging with ultrasonic AFM to have repeatable, intermittent contact force with the samples for quantitative, in-situ measurements, and an ultrasonic AFM to apply shear stresses to the sample surface at the nanoscale for enhanced sensitivity to interface defects. Furthermore, these techniques will be applied in fluidic environments for biological and chemical applications using acoustic radiation pressure actuation of AFM cantilevers. The educational development plan is focused on long-term contributions to the partnership programs between the local K-12 education institutions and Georgia Tech through mentoring of participating graduate and undergraduate students, supporting high school student science projects, and K-12 educators. Undergraduate research assistants selected from minorities and underrepresented groups will be involved in the research project as well as graduate students from different disciplines. In addition to hands on training of students in the nanotechnology area, a graduate level course on Scanning Probe Microscopy will be developed in collaboration with other faculty members at Georgia Tech.

原子力显微镜 (AFM) 已成为纳米科学和纳米技术不可或缺的工具，使用带有锋利尖端的软悬臂非破坏性地提供出色的横向和垂直表面形貌分辨率。然而，为了探测固体表面的机械性能并获取有关地下界面和缺陷的信息，AFM 悬臂需要更硬。人们可以通过在超声波频率表面振动 AFM 悬臂来增加 AFM 的有效刚度，同时以低直流或敲击接触力保持出色的横向分辨率。本研究计划旨在研究超声波 AFM 技术在薄膜材料特性和界面的非破坏性定量测量方面的潜力，更具体地说，在电子互连结构和其他纳米级器件中的表面缺陷的原位成像方面的潜力。拟议的创新研究计划有以下具体目标：（a）开发超声波频率下AFM悬臂尖端与图案化表面和地下缺陷相互作用的理论模型，（b）开发将敲击模式成像与超声波AFM相结合的测量方法，以与样品产生可重复的间歇接触力，以进行定量、原位测量，并应用超声波AFM 在纳米尺度上对样品表面施加剪切应力，以增强对界面缺陷的敏感性。此外，这些技术将通过 AFM 悬臂的声辐射压力驱动应用于生物和化学应用的流体环境中。该教育发展计划的重点是通过指导参与的研究生和本科生、支持高中生科学项目和 K-12 教育工作者，为当地 K-12 教育机构和佐治亚理工学院之间的合作伙伴计划做出长期贡献。从少数族裔和代表性不足群体中选出的本科生研究助理以及来自不同学科的研究生将参与该研究项目。除了对纳米技术领域的学生进行实践培训外，还将与佐治亚理工学院的其他教员合作开发扫描探针显微镜的研究生课程。