NER: Acoustic Radiation Pressure Driven Atomic Force Microscope for Fast Imaging and Parallel Sensing of Biological and Chemical Processes at the Nanoscale

NER：声辐射压力驱动原子力显微镜，用于纳米级生物和化学过程的快速成像和并行传感

• 批准号: 0210415
• 负责人: Levent Degertekin
• 金额: $ 9万
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-08-01 至 2004-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0210415&HistoricalAwards=false
• 关键词: NER; Acoustic; Radiation; Pressure; Driven

0210415DegertekinThe capability of operating in liquid environments has been one of the key reasons for the atomic force microscope's (AFM) indisputable role in the recent advances in nanoscience and nanotechnology. This capability has not only enabled imaging biological samples and observation of biological and chemical processes at the nanoscale, but also led to the development of many microcantilever-based devices in the area of biosensing and proteomics.The liquid environment presents significant challenges to the operation of the AFM, especially in dynamic imaging modes such as tapping mode, and fast imaging applications. As compared to air, the liquids provide a more efficient coupling medium for mechanical perturbations. Hence regular piezoelectric actuation of the AFM cantilever results in spurious resonant signals due to the liquid filled cavity surrounding the sample and the actuator structure. Several novel actuators, based on magnetic, electrostatic, and thin-film piezoelectric techniques have been developed to solve this problem, but these methods severely limit the type of cantilevers and liquids that can be used for experiments. Furthermore, these methods are not suitable for actuation of individual cantilevers in an array, an important capability required for biosensing applications.This exploratory research proposal aims to remove these important obstacles in the implementation of a versatile AFM for applications in liquids using a novel microcantilever actuation technique. The technique uses the acoustic radiation force generated by collimated high frequency (100-400MHz) acoustic waves directed to the AFM cantilever to actuate the cantilever in the DC-MHz frequency range. Promising initial results using the technique have been recently obtained and presented in the proposal. Based on these results, the following objectives are proposed:-Design and microfabrication of individual and arrays of acoustic radiation pressure (ARP) actuators: The actuators will be fabricated on silicon substrates using a thin Zinc Oxide film to generate acoustic waves around 250MHz and silicon micromachining techniques will be used to fabricate acoustic Fresnel lenses to direct the acoustic beams to AFM cantilevers.-Integration of the actuator to a widely available commercial AFM system: A fluid-cell including an ARP actuator will be manufactured and used on a commercial AFM system with appropriate electronics.-Evaluation of the capabilities and limitations of the integrated actuator: The performance of the ARP actuator for fast imaging, as well as array operation will be tested and compared with conventional methods.-Study of possible adverse effects of the ARP actuator: Interaction of high frequency acoustic waves with biological processes will be explored on several important samples and the actuator design will be improved accordingly. Successful implementation of this project will impact numerous areas of nanoscience and engineering, because it will help researchers in the testing and implementation of innovative ideas and in probing a wider variety of biological and chemical processes at the nanoscale.

0210415 Degertekin在液体环境中操作的能力一直是原子力显微镜（AFM）在纳米科学和纳米技术的最新进展中无可争议的作用的关键原因之一。这种能力不仅使生物样品的成像和生物和化学过程的观察在纳米尺度上，但也导致了许多基于微电子显微镜的设备在生物传感和蛋白质组学领域的发展。液体环境提出了重大挑战的操作的AFM，特别是在动态成像模式，如轻敲模式，和快速成像应用。与空气相比，液体为机械扰动提供了更有效的耦合介质。因此，AFM悬臂的常规压电致动由于围绕样品和致动器结构的充满液体的腔而导致寄生谐振信号。已经开发了几种基于磁性、静电和薄膜压电技术的新型致动器来解决这个问题，但这些方法严重限制了可用于实验的杠杆和液体的类型。此外，这些方法是不适合在一个阵列，生物传感application.This探索性的研究建议所需的一个重要能力的驱动单个悬臂梁，旨在消除这些重要的障碍，在实施中的一个多功能的原子力显微镜在液体中的应用，使用一种新的微悬臂梁驱动技术。该技术使用由指向AFM悬臂的准直高频（100- 400 MHz）声波产生的声辐射力在DC-MHz频率范围内致动悬臂。最近已经获得了使用该技术的有希望的初步结果，并在提案中提出。基于这些结果，提出了以下目标：-单个和阵列的声辐射压力（阿普）致动器的设计和微制造：将使用薄氧化锌膜在硅衬底上制造致动器以产生约250 MHz的声波，并且将使用硅微加工技术来制造声菲涅耳透镜以将声束引导到AFM杠杆。将致动器集成到广泛使用的商业AFM系统中：将制造包括阿普致动器的流体单元，并将其用于具有适当电子器件的商业AFM系统。评估集成致动器的能力和局限性：将测试阿普致动器用于快速成像以及阵列操作的性能，并与传统方法进行比较。阿普致动器可能的不良影响研究：将在几个重要样本上探索高频声波与生物过程的相互作用，并相应改进致动器设计。 该项目的成功实施将影响纳米科学和工程的许多领域，因为它将帮助研究人员测试和实施创新想法，并在纳米尺度上探索更广泛的生物和化学过程。