Advanced atomic force microscopy using the FIRAT probe

使用 FIRAT 探针的先进原子力显微镜

• 批准号: 0725618
• 负责人: Levent Degertekin
• 金额: $ 29.98万
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-09-01 至 2011-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0725618&HistoricalAwards=false
• 关键词: Advanced; atomic; force; microscopy; using

OBJECTIVE AND APPROACHThe objective of this research is to develop novel probes and imaging methods for atomic force microscopy to enable high speed tapping mode imaging and quantitative material characterization at the nanoscale. The approach is to take advantage of recent developments in microfabrication and microscale optical sensing technologies to implement high performance probe structures. These probes use integrated electrostatic actuation and optical interferometric detection for improved speed and detection sensitivity, eliminating several bottlenecks in high speed imaging at nanoscale. TECHNICAL MERITTo achieve probes large actuation range (2-5um) that is adequate for a variety of target applications while maintaining the interferometric detection sensitivity, novel diffraction based optical structures will be investigated. Practical probe designs suitable for batch fabrication and with proper dynamics and noise -- imaging bandwidths in the 50-100kHz, and thermal noise levels in the nN range ? will be developed. Finally, control systems and methods using the unique capabilities of these probes will be designed and implemented.BROADER IMPACTThis research can move the atomic force microscope from research labs to industrial platforms such as inline semiconductor device metrology to build faster computers, as well as broadening its use in basic science applications. Through dissemination of devices and know-how, a rapid impact in nanotechnology and nanoscience is targeted. In addition to involvement of teachers from K-12 institutions, and undergraduate students in the research project, the long term objective is to provide each high school with an easily operated, fast atomic force microscope, opening a real window for students to explore the nanoscale phenomena.

目的和方法本研究的目标是开发用于原子力显微镜的新型探针和成像方法，以便能够在纳米尺度上进行高速敲击模式成像和定量材料表征。该方法是利用微制造和微尺度光学传感技术的最新发展来实现高性能的探头结构。这些探头使用集成的静电驱动和光学干涉检测，以提高速度和检测灵敏度，消除了纳米级高速成像的几个瓶颈。技术要点为了获得大的激励范围(2-5微米)，在保持干涉检测灵敏度的同时，能够满足各种目标应用，将研究新型的基于衍射的光学结构。适合批量生产的实用探头设计，具有适当的动力学和噪声--成像带宽在50-100 kHz，热噪声水平在NN范围内？将会被开发出来。最后，利用这些探头的独特能力设计和实现控制系统和方法。BROADER IMPACT这项研究可以将原子力显微镜从研究实验室转移到工业平台，如在线半导体器件计量学，以建立更快的计算机，以及扩大其在基础科学应用中的用途。通过传播设备和专门知识，目标是在纳米技术和纳米科学方面产生快速影响。除了K-12院校的老师和本科生参与研究项目外，长期目标是为每所高中提供一台易于操作的快速原子力显微镜，为学生探索纳米级现象打开一扇真正的窗口。