U.S.-Turkey Cooperative Research: Optical Metrology of MEMS

美国-土耳其合作研究：MEMS光学计量

• 批准号: 0423403
• 负责人: Levent Degertekin
• 金额: --
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2008-02-29
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0423403&HistoricalAwards=false
• 关键词: U.S.; Turkey; Cooperative; Research; Optical

0423403 KurfessDescription: This project supports a cooperative project by Dr. Thomas Kurfess and Dr. Dr. F. Levent Degertekin, School of Mechanical Engineering, Georgia Tech and Dr. Hakan Urey, Department of Electrical & Electronics Engineering, Koc University, Istanbul, Turkey. The project will address several issues in parallel optical metrology of dynamic MEMS (micro-electro-mechanical systems) devices using phase-sensitive diffraction grating microinterferometer arrays. For accurate measurement of MEMS device vibration profiles, the interferometer arrays need to be calibrated and the electrostatically actuated deformable gratings need to be characterized. In addition, an optical system approach is essential for uniform illumination of the interferometer array and efficient light collection from the MEMS devices under test. The Georgia Tech team will fabricate and provide a model for various dynamic MEMS devices and deformable diffraction gratings for microinterferometer arrays. These devices will be evaluated in terms of dynamic response and optical performance by Koc University. Based on these results, a more accurate model of the deformable gratings will be developed. A model for the optical system to deliver uniform light from a single laser source to an array of interferometers will be jointly developed and implemented. Furthermore, the thermal response of the deformable diffraction grating structures will be investigated with the help of a model to investigate the use of these structures for uncooled IR imaging arrays. A graduate student from Koc University will fabricate and evaluate several test structures for this purpose using the facilities at Georgia Tech. Scope and broader impacts: The proposed research will help improve the manufacturing processes of the emerging U.S. MEMS industry, which suffers from low yield and repeatability. The collaboration involves U.S. and Turkish scientists with complementary expertise and capabilities in optical MEMS design, fabrication, and characterization and opens up possibilities for joint studies in imaging arrays and optical MEMS. A graduate student from Koc University, a recently founded institution with excellent promise of contributing to scientific collaboration between Turkey and the United States, will participate in the project and will work with scientists and fellow graduate students at Georgia Tech. This project is funded jointly by OISE and the Division of Manufacturing and Industrial Innovation.

0423403 KurfessDescription：该项目支持Thomas Kurfess博士和F. Levent Degertekin博士，机械工程学院，Georgia Tech，Georgia Tech和Hakan Urey博士。 该项目将使用相位敏感的衍射光度微接线机阵列中的动态MEM（微电动机械系统）设备的平行光学计量学中的几个问题。为了准确测量MEMS设备振动轮廓，需要对干涉仪阵列进行校准，并且需要表征静电驱动的可变形光栅。 此外，光学系统方法对于从正在测试的MEMS设备中的干涉仪阵列均匀照明和有效的光收集至关重要。佐治亚理工学队将制造并为各种动态MEMS设备和微型介绍阵列的衍射光栅提供模型。 KOC大学将根据动态响应和光学性能评估这些设备。基于这些结果，将开发出更准确的可变形光栅模型。光学系统的模型将共同开发和实施，从单个激光源传递均匀的光线到一系列干涉仪。此外，将在模型的帮助下研究可变形衍射光栅结构的热响应，以研究这些结构对未冷的IR成像阵列的使用。 KOC大学的一名研究生将使用佐治亚理工学院的设施来制造和评估几种测试结构。范围和更广泛的影响：拟议的研究将有助于改善新兴美国MEMS行业的制造过程，该过程的产量低和可重复性。该合作涉及美国和土耳其科学家，具有光学MEMS设计，制造和表征的互补专业知识和能力，并为成像阵列和光学MEMS中的联合研究提供了可能性。 来自KOC大学的一名研究生是一家最近成立的机构，具有为土耳其与美国之间的科学合作做出贡献的极好的希望，将参加该项目，并将与佐治亚理工学院的科学家和研究生合作。 该项目由OISE和制造业和工业创新部共同资助。