U.S.-Turkey Cooperative Research: Optical Metrology of MEMS

项目描述：该项目支持乔治亚理工学院机械工程学院Thomas Kurfess博士和F. Levent Degertekin博士以及土耳其伊斯坦布尔Koc大学电气与电子工程系Hakan Urey博士的合作项目。该项目将利用相敏衍射光栅微干涉仪阵列解决动态MEMS（微机电系统）器件并行光学测量中的几个问题。为了精确测量MEMS器件的振动轮廓，需要对干涉仪阵列进行校准，并对静电驱动的变形光栅进行表征。此外，光学系统方法对于干涉仪阵列的均匀照明和被测MEMS器件的有效光收集至关重要。佐治亚理工学院的团队将为各种动态MEMS器件和微干涉仪阵列的可变形衍射光栅制造并提供模型。这些器件将由Koc大学在动态响应和光学性能方面进行评估。在此基础上，将建立更精确的变形光栅模型。一个光学系统的模型，从一个单一的激光源传输均匀的光到干涉仪阵列将共同开发和实施。此外，本文还将借助模型研究可变形衍射光栅结构的热响应，以研究这些结构在非冷却红外成像阵列中的应用。一名来自Koc大学的研究生将利用佐治亚理工学院的设备制造和评估几个测试结构。范围和更广泛的影响：拟议的研究将有助于改善美国新兴MEMS行业的制造工艺，该行业的生产效率低，重复性差。此次合作涉及美国和土耳其的科学家，他们在光学MEMS设计、制造和表征方面具有互补的专业知识和能力，并为成像阵列和光学MEMS的联合研究开辟了可能性。一名来自Koc大学的研究生将参与该项目，并将与佐治亚理工学院的科学家和研究生一起工作。Koc大学是最近成立的一所大学，有望为土耳其和美国之间的科学合作做出贡献。该项目由OISE和制造与工业创新部联合资助。

0423403 KurfessDescription: This project supports a cooperative project by Dr. Thomas Kurfess and Dr. Dr. F. Levent Degertekin, School of Mechanical Engineering, Georgia Tech and Dr. Hakan Urey, Department of Electrical & Electronics Engineering, Koc University, Istanbul, Turkey. The project will address several issues in parallel optical metrology of dynamic MEMS (micro-electro-mechanical systems) devices using phase-sensitive diffraction grating microinterferometer arrays. For accurate measurement of MEMS device vibration profiles, the interferometer arrays need to be calibrated and the electrostatically actuated deformable gratings need to be characterized. In addition, an optical system approach is essential for uniform illumination of the interferometer array and efficient light collection from the MEMS devices under test. The Georgia Tech team will fabricate and provide a model for various dynamic MEMS devices and deformable diffraction gratings for microinterferometer arrays. These devices will be evaluated in terms of dynamic response and optical performance by Koc University. Based on these results, a more accurate model of the deformable gratings will be developed. A model for the optical system to deliver uniform light from a single laser source to an array of interferometers will be jointly developed and implemented. Furthermore, the thermal response of the deformable diffraction grating structures will be investigated with the help of a model to investigate the use of these structures for uncooled IR imaging arrays. A graduate student from Koc University will fabricate and evaluate several test structures for this purpose using the facilities at Georgia Tech. Scope and broader impacts: The proposed research will help improve the manufacturing processes of the emerging U.S. MEMS industry, which suffers from low yield and repeatability. The collaboration involves U.S. and Turkish scientists with complementary expertise and capabilities in optical MEMS design, fabrication, and characterization and opens up possibilities for joint studies in imaging arrays and optical MEMS. A graduate student from Koc University, a recently founded institution with excellent promise of contributing to scientific collaboration between Turkey and the United States, will participate in the project and will work with scientists and fellow graduate students at Georgia Tech. This project is funded jointly by OISE and the Division of Manufacturing and Industrial Innovation.