U.S.-Turkey Cooperative Research: Optical Metrology of MEMS

美国-土耳其合作研究:MEMS光学计量

基本信息

  • 批准号:
    0423403
  • 负责人:
  • 金额:
    --
  • 依托单位:
  • 依托单位国家:
    美国
  • 项目类别:
    Standard Grant
  • 财政年份:
    2004
  • 资助国家:
    美国
  • 起止时间:
    2004-09-01 至 2008-02-29
  • 项目状态:
    已结题

项目摘要

0423403 KurfessDescription: This project supports a cooperative project by Dr. Thomas Kurfess and Dr. Dr. F. Levent Degertekin, School of Mechanical Engineering, Georgia Tech and Dr. Hakan Urey, Department of Electrical & Electronics Engineering, Koc University, Istanbul, Turkey. The project will address several issues in parallel optical metrology of dynamic MEMS (micro-electro-mechanical systems) devices using phase-sensitive diffraction grating microinterferometer arrays. For accurate measurement of MEMS device vibration profiles, the interferometer arrays need to be calibrated and the electrostatically actuated deformable gratings need to be characterized. In addition, an optical system approach is essential for uniform illumination of the interferometer array and efficient light collection from the MEMS devices under test. The Georgia Tech team will fabricate and provide a model for various dynamic MEMS devices and deformable diffraction gratings for microinterferometer arrays. These devices will be evaluated in terms of dynamic response and optical performance by Koc University. Based on these results, a more accurate model of the deformable gratings will be developed. A model for the optical system to deliver uniform light from a single laser source to an array of interferometers will be jointly developed and implemented. Furthermore, the thermal response of the deformable diffraction grating structures will be investigated with the help of a model to investigate the use of these structures for uncooled IR imaging arrays. A graduate student from Koc University will fabricate and evaluate several test structures for this purpose using the facilities at Georgia Tech. Scope and broader impacts: The proposed research will help improve the manufacturing processes of the emerging U.S. MEMS industry, which suffers from low yield and repeatability. The collaboration involves U.S. and Turkish scientists with complementary expertise and capabilities in optical MEMS design, fabrication, and characterization and opens up possibilities for joint studies in imaging arrays and optical MEMS. A graduate student from Koc University, a recently founded institution with excellent promise of contributing to scientific collaboration between Turkey and the United States, will participate in the project and will work with scientists and fellow graduate students at Georgia Tech. This project is funded jointly by OISE and the Division of Manufacturing and Industrial Innovation.
0423403 Kurfess描述:该项目支持托马斯Kurfess博士和F博士的合作项目。格鲁吉亚理工学院机械工程学院的Levent Degertekin和土耳其伊斯坦布尔Koc大学电气电子工程系的Hakan Urey博士。 该项目将解决几个问题,在并行光学测量的动态MEMS(微机电系统)设备使用相敏衍射光栅显微干涉仪阵列。为了精确测量MEMS器件的振动轮廓,需要对干涉仪阵列进行校准,并且需要对静电致动的可变形光栅进行表征。 此外,光学系统方法对于干涉仪阵列的均匀照明和来自被测MEMS器件的有效光收集是必不可少的。格鲁吉亚技术团队将制造和提供各种动态MEMS器件和微干涉仪阵列的可变形衍射光栅的模型。Koc大学将对这些器件的动态响应和光学性能进行评估。基于这些结果,一个更准确的模型的变形光栅将被开发。将联合开发和实施一个光学系统模型,从单一激光源向一组干涉仪提供均匀的光。此外,变形衍射光栅结构的热响应将与一个模型的帮助下,调查使用这些结构的非制冷红外成像阵列。 来自Koc大学的一名研究生将使用格鲁吉亚理工学院的设施制造和评估几种测试结构。范围和更广泛的影响:拟议的研究将有助于改善美国新兴MEMS行业的制造工艺,该行业的良率和可重复性较低。该合作涉及美国和土耳其科学家,他们在光学MEMS设计,制造和表征方面具有互补的专业知识和能力,并为成像阵列和光学MEMS的联合研究开辟了可能性。 来自Koc大学的一名研究生将参加该项目,并将与格鲁吉亚理工学院的科学家和研究生一起工作。Koc大学是一个最近成立的机构,有着为土耳其和美国之间的科学合作做出贡献的良好承诺。 该项目由OISE和制造和工业创新司共同资助。

项目成果

期刊论文数量(0)
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科研奖励数量(0)
会议论文数量(0)
专利数量(0)

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Levent Degertekin其他文献

Controlled two-step solid-phase crystallization for high-performance polysilicon TFT's
用于高性能多晶硅 TFT 的受控两步固相结晶
  • DOI:
    10.1109/55.605445
  • 发表时间:
    1997
  • 期刊:
  • 影响因子:
    4.9
  • 作者:
    Vivek Subramanian;P. Dankoski;Levent Degertekin;B. Khuri;K. C. Saraswat
  • 通讯作者:
    K. C. Saraswat

Levent Degertekin的其他文献

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{{ truncateString('Levent Degertekin', 18)}}的其他基金

Parametric Resonance as an Electromechanical Transduction Mechanism
参数共振作为机电转换机制
  • 批准号:
    1936776
  • 财政年份:
    2019
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
I-Corps: Acousto-optical RF Field Sensor for Magnetic Resonance Imaging
I-Corps:用于磁共振成像的声光射频场传感器
  • 批准号:
    1914574
  • 财政年份:
    2019
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
EAGER: Acoustic Wave Driven Parametric Electrical Resonators
EAGER:声波驱动参数电谐振器
  • 批准号:
    1829821
  • 财政年份:
    2018
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
I-Corps: Single Chip Intravascular and Intracardiac Ultrasound Imaging Systems
I-Corps:单芯片血管内和心内超声成像系统
  • 批准号:
    1517521
  • 财政年份:
    2015
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
NOISE-BASED HIGH RESOLUTION ULTRASOUND IMAGING USING MICROENGINEERED SURFACES AND TRANSDUCERS
使用微工程表面和换能器进行基于噪声的高分辨率超声成像
  • 批准号:
    1202118
  • 财政年份:
    2012
  • 资助金额:
    --
  • 项目类别:
    Continuing Grant
Advanced atomic force microscopy using the FIRAT probe
使用 FIRAT 探针的先进原子力显微镜
  • 批准号:
    0725618
  • 财政年份:
    2007
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
CAREER: Quantitative Ultrasonic Atomic Force Microscopy of Thin Films and Subsurface Interfaces
职业:薄膜和地下界面的定量超声原子力显微镜
  • 批准号:
    0348582
  • 财政年份:
    2004
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
NER: Acoustic Radiation Pressure Driven Atomic Force Microscope for Fast Imaging and Parallel Sensing of Biological and Chemical Processes at the Nanoscale
NER:声辐射压力驱动原子力显微镜,用于纳米级生物和化学过程的快速成像和并行传感
  • 批准号:
    0210415
  • 财政年份:
    2002
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
In-Line Optical Measurement of MicroElectroMechanical Systems (MEMS) Devices During Production
生产过程中微机电系统 (MEMS) 器件的在线光学测量
  • 批准号:
    0200331
  • 财政年份:
    2002
  • 资助金额:
    --
  • 项目类别:
    Continuing Grant

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