U.S.-Turkey Cooperative Research: Optical Metrology of MEMS

美国-土耳其合作研究：MEMS光学计量

• 批准号: 0423403
• 负责人: Levent Degertekin
• 金额: --
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2008-02-29
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0423403&HistoricalAwards=false
• 关键词: U.S.; Turkey; Cooperative; Research; Optical

0423403 KurfessDescription: This project supports a cooperative project by Dr. Thomas Kurfess and Dr. Dr. F. Levent Degertekin, School of Mechanical Engineering, Georgia Tech and Dr. Hakan Urey, Department of Electrical & Electronics Engineering, Koc University, Istanbul, Turkey. The project will address several issues in parallel optical metrology of dynamic MEMS (micro-electro-mechanical systems) devices using phase-sensitive diffraction grating microinterferometer arrays. For accurate measurement of MEMS device vibration profiles, the interferometer arrays need to be calibrated and the electrostatically actuated deformable gratings need to be characterized. In addition, an optical system approach is essential for uniform illumination of the interferometer array and efficient light collection from the MEMS devices under test. The Georgia Tech team will fabricate and provide a model for various dynamic MEMS devices and deformable diffraction gratings for microinterferometer arrays. These devices will be evaluated in terms of dynamic response and optical performance by Koc University. Based on these results, a more accurate model of the deformable gratings will be developed. A model for the optical system to deliver uniform light from a single laser source to an array of interferometers will be jointly developed and implemented. Furthermore, the thermal response of the deformable diffraction grating structures will be investigated with the help of a model to investigate the use of these structures for uncooled IR imaging arrays. A graduate student from Koc University will fabricate and evaluate several test structures for this purpose using the facilities at Georgia Tech. Scope and broader impacts: The proposed research will help improve the manufacturing processes of the emerging U.S. MEMS industry, which suffers from low yield and repeatability. The collaboration involves U.S. and Turkish scientists with complementary expertise and capabilities in optical MEMS design, fabrication, and characterization and opens up possibilities for joint studies in imaging arrays and optical MEMS. A graduate student from Koc University, a recently founded institution with excellent promise of contributing to scientific collaboration between Turkey and the United States, will participate in the project and will work with scientists and fellow graduate students at Georgia Tech. This project is funded jointly by OISE and the Division of Manufacturing and Industrial Innovation.

0423403 Kurfess描述：该项目支持托马斯Kurfess博士和F博士的合作项目。格鲁吉亚理工学院机械工程学院的Levent Degertekin和土耳其伊斯坦布尔Koc大学电气电子工程系的Hakan Urey博士。 该项目将解决使用相敏衍射光栅微干涉仪阵列的动态MEMS（微机电系统）设备并行光学计量中的几个问题。为了精确测量MEMS器件的振动轮廓，需要对干涉仪阵列进行校准，并且需要对静电致动的可变形光栅进行表征。 此外，光学系统方法对于干涉仪阵列的均匀照明和来自被测MEMS器件的有效光收集是必不可少的。格鲁吉亚技术团队将制造和提供各种动态MEMS器件和微干涉仪阵列的可变形衍射光栅的模型。Koc大学将对这些器件的动态响应和光学性能进行评估。基于这些结果，一个更准确的模型的变形光栅将被开发。将联合开发和实施一个光学系统模型，从单一激光源向一组干涉仪提供均匀的光。此外，变形衍射光栅结构的热响应将与一个模型的帮助下，调查使用这些结构的非制冷红外成像阵列。 科克大学的一名研究生将使用格鲁吉亚理工学院的设施为此目的制造和评估几个测试结构。范围和更广泛的影响：拟议的研究将有助于改善美国新兴MEMS行业的制造工艺，该行业的良率和可重复性较低。该合作涉及美国和土耳其科学家，他们在光学MEMS设计，制造和表征方面具有互补的专业知识和能力，并为成像阵列和光学MEMS的联合研究开辟了可能性。 来自Koc大学的一名研究生将参加该项目，并将与格鲁吉亚理工学院的科学家和研究生一起工作。Koc大学是一个最近成立的机构，有着为土耳其和美国之间的科学合作做出贡献的良好承诺。 该项目由OISE和制造和工业创新司共同资助。