U.S.-Turkey Cooperative Research: Optical Metrology of MEMS

美国-土耳其合作研究:MEMS光学计量

基本信息

  • 批准号:
    0423403
  • 负责人:
  • 金额:
    --
  • 依托单位:
  • 依托单位国家:
    美国
  • 项目类别:
    Standard Grant
  • 财政年份:
    2004
  • 资助国家:
    美国
  • 起止时间:
    2004-09-01 至 2008-02-29
  • 项目状态:
    已结题

项目摘要

0423403 KurfessDescription: This project supports a cooperative project by Dr. Thomas Kurfess and Dr. Dr. F. Levent Degertekin, School of Mechanical Engineering, Georgia Tech and Dr. Hakan Urey, Department of Electrical & Electronics Engineering, Koc University, Istanbul, Turkey. The project will address several issues in parallel optical metrology of dynamic MEMS (micro-electro-mechanical systems) devices using phase-sensitive diffraction grating microinterferometer arrays. For accurate measurement of MEMS device vibration profiles, the interferometer arrays need to be calibrated and the electrostatically actuated deformable gratings need to be characterized. In addition, an optical system approach is essential for uniform illumination of the interferometer array and efficient light collection from the MEMS devices under test. The Georgia Tech team will fabricate and provide a model for various dynamic MEMS devices and deformable diffraction gratings for microinterferometer arrays. These devices will be evaluated in terms of dynamic response and optical performance by Koc University. Based on these results, a more accurate model of the deformable gratings will be developed. A model for the optical system to deliver uniform light from a single laser source to an array of interferometers will be jointly developed and implemented. Furthermore, the thermal response of the deformable diffraction grating structures will be investigated with the help of a model to investigate the use of these structures for uncooled IR imaging arrays. A graduate student from Koc University will fabricate and evaluate several test structures for this purpose using the facilities at Georgia Tech. Scope and broader impacts: The proposed research will help improve the manufacturing processes of the emerging U.S. MEMS industry, which suffers from low yield and repeatability. The collaboration involves U.S. and Turkish scientists with complementary expertise and capabilities in optical MEMS design, fabrication, and characterization and opens up possibilities for joint studies in imaging arrays and optical MEMS. A graduate student from Koc University, a recently founded institution with excellent promise of contributing to scientific collaboration between Turkey and the United States, will participate in the project and will work with scientists and fellow graduate students at Georgia Tech. This project is funded jointly by OISE and the Division of Manufacturing and Industrial Innovation.
0423403库尔夫斯描述:该项目支持佐治亚理工学院机械工程学院的Thomas Kurfess博士、F.LEvent Degertekin博士和土耳其伊斯坦布尔科克大学电气与电子工程系的Hakan Urey博士的合作项目。该项目将解决使用相敏衍射光栅微干涉仪阵列的动态MEMS(微电子机械系统)设备的并行光学计量中的几个问题。为了准确测量MEMS器件的振动轮廓,需要对干涉仪阵列进行标定,并对静电驱动的可变形光栅进行表征。此外,光学系统方法对于干涉仪阵列的均匀照明和从被测MEMS器件高效地收集光是必不可少的。佐治亚理工学院的团队将为微型干涉仪阵列制造和提供各种动态MEMS器件和可变形衍射栅的模型。这些设备将由Koc大学从动态响应和光学性能方面进行评估。在此基础上,提出了一种更精确的可变形光栅模型。将共同开发和实施光学系统将单一激光光源的均匀光传输到干涉仪阵列的模型。此外,还将借助一个模型来研究可变形衍射光栅结构的热响应,以研究这些结构在非制冷红外成像阵列中的应用。科克大学的一名研究生将使用佐治亚理工学院的设施为此目的制造和评估几个测试结构。范围和更广泛的影响:拟议的研究将有助于改善美国新兴MEMS行业的制造工艺,该行业存在产量低和重复性差的问题。这项合作涉及美国和土耳其的科学家,他们在光学MEMS设计、制造和表征方面拥有互补的专业知识和能力,并为联合研究成像阵列和光学MEMS开辟了可能性。科克大学(Koc University)的一名研究生将参与该项目,并将与佐治亚理工学院的科学家和其他研究生合作。科克大学是一所最近成立的机构,有望为土耳其和美国之间的科学合作做出贡献。该项目由OISE和制造与工业创新司共同资助。

项目成果

期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)

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Levent Degertekin其他文献

Controlled two-step solid-phase crystallization for high-performance polysilicon TFT's
用于高性能多晶硅 TFT 的受控两步固相结晶
  • DOI:
    10.1109/55.605445
  • 发表时间:
    1997
  • 期刊:
  • 影响因子:
    4.9
  • 作者:
    Vivek Subramanian;P. Dankoski;Levent Degertekin;B. Khuri;K. C. Saraswat
  • 通讯作者:
    K. C. Saraswat

Levent Degertekin的其他文献

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{{ truncateString('Levent Degertekin', 18)}}的其他基金

Parametric Resonance as an Electromechanical Transduction Mechanism
参数共振作为机电转换机制
  • 批准号:
    1936776
  • 财政年份:
    2019
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
I-Corps: Acousto-optical RF Field Sensor for Magnetic Resonance Imaging
I-Corps:用于磁共振成像的声光射频场传感器
  • 批准号:
    1914574
  • 财政年份:
    2019
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
EAGER: Acoustic Wave Driven Parametric Electrical Resonators
EAGER:声波驱动参数电谐振器
  • 批准号:
    1829821
  • 财政年份:
    2018
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
I-Corps: Single Chip Intravascular and Intracardiac Ultrasound Imaging Systems
I-Corps:单芯片血管内和心内超声成像系统
  • 批准号:
    1517521
  • 财政年份:
    2015
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
NOISE-BASED HIGH RESOLUTION ULTRASOUND IMAGING USING MICROENGINEERED SURFACES AND TRANSDUCERS
使用微工程表面和换能器进行基于噪声的高分辨率超声成像
  • 批准号:
    1202118
  • 财政年份:
    2012
  • 资助金额:
    --
  • 项目类别:
    Continuing Grant
Advanced atomic force microscopy using the FIRAT probe
使用 FIRAT 探针的先进原子力显微镜
  • 批准号:
    0725618
  • 财政年份:
    2007
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
CAREER: Quantitative Ultrasonic Atomic Force Microscopy of Thin Films and Subsurface Interfaces
职业:薄膜和地下界面的定量超声原子力显微镜
  • 批准号:
    0348582
  • 财政年份:
    2004
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
NER: Acoustic Radiation Pressure Driven Atomic Force Microscope for Fast Imaging and Parallel Sensing of Biological and Chemical Processes at the Nanoscale
NER:声辐射压力驱动原子力显微镜,用于纳米级生物和化学过程的快速成像和并行传感
  • 批准号:
    0210415
  • 财政年份:
    2002
  • 资助金额:
    --
  • 项目类别:
    Standard Grant
In-Line Optical Measurement of MicroElectroMechanical Systems (MEMS) Devices During Production
生产过程中微机电系统 (MEMS) 器件的在线光学测量
  • 批准号:
    0200331
  • 财政年份:
    2002
  • 资助金额:
    --
  • 项目类别:
    Continuing Grant

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