NER: Synthesis of Boron Nitride Nanotubes for Nanoelectronics

本提案是对NER类别的纳米科学与工程计划NSF 01-157的响应。本研究的主要目的是加深对电子回旋共振微波等离子体化学气相沉积(ECR-MPCVD)制备/制备氮化硼纳米管(BN-NTS)的基本认识。纯BN纳米管为实际应用提供了一个诱人的机会。它们提供了独特的电气和机械性能组合。他们预测的宽带隙与管的结构无关，这揭示了基于场发射和冷阴极特性的新一代纳米电子器件的BN-NTS潜力。这个探索性的NER项目将使用ECR-MPECVD来合成BN-NTS。这项研究的独特之处在于选择新型的金属-有机前驱体，加入合适的催化剂，并提供特殊的表面处理来促进单壁和多壁BN-NTs的形成和生长。此外，还将进行与BN-NTS的形成和生长有关的等离子体化学和工艺参数的现场监测。这项研究将从两个独特的方面进行研究：(1)前驱体化学在BN-NTS合成中的作用；(2)衬底前处理，如种子表面改性和离子注入对BN-NTS形成和生长的影响。此外，还将考察特殊催化剂如Li3N和Mg3N对合成BN-NTS的影响。HRTEM、EELS、SEM、TED以及可能的其他分析技术将对纳米管进行表征。在更广泛的范围内，这项研究的成功完成将为合成具有优异的电、热和机械性能的BN-NTS在电子领域的应用奠定基础。预计未来一代的纳米结构电子器件可以基于BN-NTS。例如，BN-NTS可以作为封装在其中的任何导电材料的完美纳米绝缘管状屏蔽。这提供了在大范围内定制纳米管电传输的可能性。BN-NTS独特的场发射和冷阴极特性在平板显示器件中有着广泛的应用。该项目的另一个重要目标是通过参与该研究项目以及他们的硕士和博士论文来培养研究生和研究助理/博士后。此外，少数民族/女性高中生和本科生也将接受这项研究的指导和接触。

ABSTRACT0210283 SinghThis proposal was received in response to the Nanoscale Science and Engineering Initiative, Program Solicitation NSF 01-157, in the NER category. The primary objective of this research is to develop a fundamental understanding for synthesizing/manufacturing boron nitride nanotubes (BN-NTs) predictably and reproducibly by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition (ECR-MPCVD). Pure BN nanotubes present an attractive opportunity for practical applications. They offer a unique combination of electrical and mechanical properties. Their predicted wide band-gap is independent of tube structure, which reveals BN-NTs potential for new generations of nanoelectronic devices based on field emission and cold cathode characteristics. This exploratory NER project will use ECR-MPECVD to synthesize BN-NTs. The unique features of this study will be to select novel metal-organic precursors, incorporate appropriate catalysts, and provide special surface pre-treatments to enhance formation and growth of single and multi-walled BN-NTs. In addition, in situ monitoring of plasma chemistry and processing parameters will be performed to relate to BN-NTs formation and growth. The proposed research will investigate two unique aspects: (1) Roles of the precursor chemistry on the synthesis of BN-NTs, and (2) Effects of substrate pretreatment such as surface modification by seeding and ion implantation on the BN-NTs formation and growth. In addition, influence of special catalysts such as Li3N and Mg3N2 on the synthesis of BN-NTs will be investigated. HRTEM, EELS, SEM, TED and possibly other analytical techniques will characterize the nanotubes. In addition, selected electrical properties of BN-NTs will be measured for applications in electronics.On a broader scale, a successful completion of this research will lead to a knowledge base for synthesizing BN-NTs with exceptional electrical, thermal, and mechanical properties for applications in electronics. It is expected that future generations of nanostructure electronic devices can be based on BN-NTs. For example, BN-NTs may serve as a perfect nano-insulating tubular shield for any conducting material encapsulated within. This offers the possibility of nanotube electrical transport tailored over a wide range. Unique field emission and cold cathode characteristics of BN-NTs have applications in flat panel display devices. Another important goal of this project is to train graduate student and research associate/post doc through participation on this research project and their MS and Ph.D. theses. In addition, minority/women high school and undergraduate students will also be mentored and exposed to this research.