Acquisition of a Reactive Sputtering System for Magnetic Oxide Thin Film Research and Education

购置用于磁性氧化物薄膜研究和教育的反应溅射系统

• 批准号: 0211117
• 负责人: Christopher Leighton
• 金额: $ 15.5万
• 依托单位: University of Minnesota-Twin Cities
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-09-01 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0211117&HistoricalAwards=false
• 关键词: Acquisition; Reactive; Sputtering; System; Magnetic

This award from the MRI program supports the University of Minnesota-Twin Cities with the acquisition of a reactive sputtering system for magnetic oxide thin film research and education. The ultra high vacuum system will incorporate d.c. and r.f. sputtering methods at high substrate temperatures, with controlled oxygen partial pressures. A novel gas injection mechanism will be employed to yield the largest possible control over the ratio of inert gas pressure to oxygen pressure, amenable to the deposition of a wide variety of epitaxial oxides. This, along with a load locked sample introduction chamber and multi-sample access will provide a highly flexible system with relatively high throughput as well as the capability to grow conventional metallic and insulating samples. The system allows growing novel magnetic oxide materials of current and future interest. Possibilities include the deposition of heterostructured samples involving combinations of non-magnetic metals, ferromagnetic metals and magnetic oxides and tunnel barriers. Thin film cobaltites, LaFeO3 exchange, and antiferromagnet/ferromagnet superlattices will be studied. In addition to the research opportunities the instrument will also support a unique educational tool for the training and education of graduate and undergraduate research students.%%%This award from the MRI program supports the University of Minnesota-Twin Cities with the acquisition of a reactive sputtering system for magnetic oxide thin film research and education. The system allows growing novel magnetic oxide materials of current and future interest. Possibilities include the deposition of heterostructured samples involving combinations of non-magnetic metals, ferromagnetic metals and magnetic oxides and tunnel barriers. Thin film cobaltites, LaFeO3 exchange, and antiferromagnet/ferromagnet superlattices will be studied. In addition to the research opportunities the instrument will also support a unique educational tool for the training and education of graduate and undergraduate research students.

核磁共振项目的这一奖项支持明尼苏达大学双子城分校获得用于磁性氧化物薄膜研究和教育的反应溅射系统。超高真空系统将采用直流和射频溅射方法，在高衬底温度下，控制氧分压。一种新的气体注入机制将被用来最大限度地控制惰性气体压力与氧气压力的比例，从而适应各种外延氧化物的沉积。这与负载锁定的样品导入室和多样品访问一起，将提供一个高度灵活的系统，具有相对高的吞吐量以及培养传统金属和绝缘样品的能力。该系统允许生长当前和未来感兴趣的新型磁性氧化物材料。可能性包括沉积异质结构样品，包括非磁性金属、铁磁性金属、磁性氧化物和隧道势垒的组合。薄膜钴酸盐、LaFeO3交换和反铁磁体/铁磁体超晶格将被研究。除了提供研究机会外，该仪器还将为研究生和本科生的培训和教育提供独特的教育工具。核磁共振项目的这一奖项支持明尼苏达大学双子城分校获得用于磁性氧化物薄膜研究和教育的反应溅射系统。该系统允许生长当前和未来感兴趣的新型磁性氧化物材料。可能性包括沉积异质结构样品，包括非磁性金属、铁磁性金属、磁性氧化物和隧道势垒的组合。薄膜钴酸盐、LaFeO3交换和反铁磁体/铁磁体超晶格将被研究。除了提供研究机会外，该仪器还将为研究生和本科生的培训和教育提供独特的教育工具。