Acquisition of a Reactive Sputtering System for Magnetic Oxide Thin Film Research and Education

来自MRI项目的这一奖项支持明尼苏达大学双城分校收购用于磁性氧化物薄膜研究和教育的反应溅射系统。超高真空系统将包括直流和射频。在高衬底温度下的溅射方法，具有受控的氧分压。将采用一种新型的气体注入机制，以产生最大可能的控制惰性气体压力与氧气压力的比例，适合各种外延氧化物的沉积。这沿着负载锁定的样品引入室和多样品入口将提供具有相对高的吞吐量以及生长常规金属和绝缘样品的能力的高度灵活的系统。该系统允许生长当前和未来感兴趣的新型磁性氧化物材料。可能包括沉积异质结构样品，包括非磁性金属、铁磁性金属和磁性氧化物的组合以及隧道势垒。薄膜钴酸盐，LaFeO 3交换，反铁磁/铁磁超晶格将进行研究。 除了研究机会，该仪器还将支持一个独特的教育工具，用于研究生和本科生的培训和教育。%来自MRI项目的这一奖项支持明尼苏达大学双城分校收购用于磁性氧化物薄膜研究和教育的反应溅射系统。该系统允许生长当前和未来感兴趣的新型磁性氧化物材料。可能包括沉积异质结构样品，包括非磁性金属、铁磁性金属和磁性氧化物的组合以及隧道势垒。薄膜钴酸盐，LaFeO 3交换，反铁磁/铁磁超晶格将进行研究。 除了研究机会，该仪器还将支持一个独特的教育工具，用于研究生和本科研究生的培训和教育。

This award from the MRI program supports the University of Minnesota-Twin Cities with the acquisition of a reactive sputtering system for magnetic oxide thin film research and education. The ultra high vacuum system will incorporate d.c. and r.f. sputtering methods at high substrate temperatures, with controlled oxygen partial pressures. A novel gas injection mechanism will be employed to yield the largest possible control over the ratio of inert gas pressure to oxygen pressure, amenable to the deposition of a wide variety of epitaxial oxides. This, along with a load locked sample introduction chamber and multi-sample access will provide a highly flexible system with relatively high throughput as well as the capability to grow conventional metallic and insulating samples. The system allows growing novel magnetic oxide materials of current and future interest. Possibilities include the deposition of heterostructured samples involving combinations of non-magnetic metals, ferromagnetic metals and magnetic oxides and tunnel barriers. Thin film cobaltites, LaFeO3 exchange, and antiferromagnet/ferromagnet superlattices will be studied. In addition to the research opportunities the instrument will also support a unique educational tool for the training and education of graduate and undergraduate research students.%%%This award from the MRI program supports the University of Minnesota-Twin Cities with the acquisition of a reactive sputtering system for magnetic oxide thin film research and education. The system allows growing novel magnetic oxide materials of current and future interest. Possibilities include the deposition of heterostructured samples involving combinations of non-magnetic metals, ferromagnetic metals and magnetic oxides and tunnel barriers. Thin film cobaltites, LaFeO3 exchange, and antiferromagnet/ferromagnet superlattices will be studied. In addition to the research opportunities the instrument will also support a unique educational tool for the training and education of graduate and undergraduate research students.