Acquisition of a Time of Flight Secondary Ion Mass Spectrometer

来自主要研究仪器计划的这一奖项支持伊利诺伊大学厄巴纳尚潘分校购买飞行时间二次离子质谱仪（TOF-SIMS）。TOF-SIMS系统将能够以高质量分辨率、高横向分辨率和高分子量检测进行超灵敏的表面和深度分析。该仪器将配备一个超高真空样品制备室，用于进行薄膜生长和表面处理的原位实验。拟议的仪器将配备一个冷阶段，以满足用户在不断扩大的生物材料研究领域的需求。TOF-SIMS将位于材料微分析中心（CMM），该中心是位于伊利诺伊大学厄巴纳-香槟校区的Frederick Seitz材料研究实验室（FSMRL）的一部分。FSMRL是一个跨学科的研究单位，在跨学科研究和合作方面非常成功，涉及分布在七个学术部门的约130个教师研究小组。TOF-SIMS对伊利诺伊大学的许多研究项目至关重要，例如：（1）纳米生物学测定;（2）分子工程;（3）活的培养神经网络中单个神经元的生长;（4）硅纳米晶体管;（5）量子线结构;（6）纳米级量子点异质结构;（7）替代栅极电介质;（8）GaN基氮化物半导体与Mg的p掺杂;过渡金属（TM）氮化物扩散阻挡层和耐腐蚀层的失效机制;（9）大面积太阳能电池材料的微化学。除了上述项目外，新仪器还将广泛用于许多其他研究生研究和教育项目。据估计，每年有50-75名研究人员将在他们的项目中直接使用TOF-SIMS。来自主要研究仪器计划的这一奖项支持伊利诺伊大学厄巴纳尚潘购买飞行时间二次离子质谱仪（TOF-SIMS）。TOF-SIMS系统将能够以高质量分辨率、高横向分辨率和高分子量检测进行超灵敏的表面和深度分析。该仪器将配备一个超高真空样品制备室，以进行薄膜生长和表面处理的原位实验。该仪器将配备一个冷台，以满足用户在不断扩大的生物材料研究领域的需求。TOF-SIMS将位于材料微分析中心（CMM），该中心是位于伊利诺伊大学厄巴纳-香槟校区的Frederick Seitz材料研究实验室（FSMRL）的一部分。FSMRL是一个跨学科的研究单位，在跨学科研究和合作方面非常成功，涉及分布在七个学术部门的约130个教师研究小组。此外，新仪器将在许多其他研究生研究和教育项目中广泛使用。据估计，每年将有50-75名研究人员直接使用TOF-SIMS。

This award from the Major Research Instrumentation program supports the University of Illinois Urbana Champaign with the purchase of a time-of-flight secondary ion mass spectrometer (TOF-SIMS). The TOF-SIMS system will be capable of ultra-sensitive surface and in-depth analysis at high mass resolution, high lateral resolution and high molecular weight detection. The instrument will be equipped with a UHV sample preparation chamber to perform in-situ experiments of film growth and surface treatments. The proposed instrument will be equipped with a cold stage to meet the needs of users in the expanding research area of biomaterials. The TOF-SIMS will be located in the Center for Microanalysis of Materials (CMM) which is part of the Frederick Seitz Materials Research Laboratory (FSMRL) located on the Urbana-Champaign campus of the University of Illinois. The FSMRL is an interdisciplinary research unit that has been very successful in enabling cross-disciplinary research and collaboration involving about 130 faculty research groups distributed among seven academic departments. The TOF-SIMS is critical to many research programs active at the University of Illinois such as: (1) Nanobiology Assays; (2) Molecular Engineering; (3) Growth of Individual Neurons in a Living, Cultured Neural Network; (4) Silicon Nanotransitors; (5) quantum wire structures; (6) Nanoscale Quantum Dot Heterostructures; (7) Alternative Gate Dielectrics; (8) p-doping of GaN-based Nitride Semiconductors with Mg; Failure mechanisms in transition-metal (TM) nitride diffusion barriers and corrosion-resistant layers; (9) Microchemistry of large area solar cell materials. In addition to the above programs, the new instrument will see widespread use in many other graduate research and education programs. It is estimated that annually 50-75 researchers will directly utilize the TOF-SIMS in their programs.This award from the Major Research Instrumentation program supports the University of Illinois Urbana Champaign with the purchase of a time-of-flight secondary ion mass spectrometer (TOF-SIMS). The TOF-SIMS system will be capable of ultra-sensitive surface and in-depth analysis at high mass resolution, high lateral resolution and high molecular weight detection. The instrument will be equipped with an ultra high vacuum sample preparation chamber to perform in-situ experiments of film growth and surface treatments. The instrument will be equipped with a cold stage to meet the needs of users in the expanding research area of biomaterials. The TOF-SIMS will be located in the Center for Microanalysis of Materials (CMM) which is part of the Frederick Seitz Materials Research Laboratory (FSMRL) located on the Urbana-Champaign campus of the University of Illinois. The FSMRL is an interdisciplinary research unit that has been very successful in enabling cross-disciplinary research and collaboration involving about 130 faculty research groups distributed among seven academic departments. In addition, the new instrument will see widespread use in many other graduate research and education programs. It is estimated that annually 50-75 researchers will directly utilize the TOF-SIMS.