SGER: Explore Feasibility of a Novel Nano Mechanical Machining System-on-a-Chip (SOAC) for Nano Manufacturing

SGER：探索用于纳米制造的新型纳米机械加工片上系统 (SOAC) 的可行性

• 批准号: 0236465
• 负责人: Ajay Malshe
• 金额: $ 6.27万
• 依托单位: University of Arkansas
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-10-01 至 2003-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0236465&HistoricalAwards=false
• 关键词: SGER; Explore; Feasibility; Novel; Nano

The objective of this Small Grant for Exploratory Research (SGER) is to explore feasibility to design, fabricate and test a nano mechanical machining (mechanism) system-on-a-chip (tool, tool holder and their actuation), a dynamic scanning probe machining tool, with intention of performing operations such as drilling, milling, deburring, etc. This novel system-on-a-chip (SOAC) will be adaptable to scanning probe microscope (SPM) operation platform. Another unique feature of this innovation is that it will allow rotational motion to the nano tool tip, unlike mechanisms demonstrated by others, to realize new boundaries of traditional macro mechanical machine in nano paradigm. In this exploratory phase, this mechanism will be fabricated using well-established micro electro mechanical system (MEMS) platform through silicon multilayer fabrication. This project covers the research and education theme on "Manufacturing processes at Nanoscale".One of the most important areas which will impact all sections of nano technology, is the design and development of "tools" for nano fabrication, machining and manufacturing. The tools for nano machining can be classified in various ways, but predominantly one can classify them as (1) tools for wet versus dry process, (2) natural versus intentional organization, and (3) bottom-up or top-down fabrication. In the proposed project, we intend to pursue dry processing for intentional organization in top-down fabrication approach. Based upon today's direction of the field the findings will immediately impact semiconductor, optical, bio, pharmaceutical, etc. applications. This project will involve ethnic as well as gender minority undergraduate and graduate students in leading research projects through programs such as Carver Project, REU, etc. The PI would continue the proactive involvement through this project for bigger and better success by retaining and training minority students for higher education in this exciting and emerging area. Further, through the education task the PI will provide training to student on the project, introduce a new interdisciplinary class on Nanomanufacturing Processes at graduate level, and reach out through lab tours and creating an informative website "Nanotechnology for Dummies" for non-technical community and high school students. Moreover, nano science and engineering, particularly "nano manufacturing" is one of the major areas of emphasis for the state of Arkansas. The fields of biotechnology, electronics along with the traditional manufacturing are the major growing sectors in the state. On this background, the proposed subject area of research is of urgent academic and technological importance to many small hi-tech industries. The success of this seed project will enable PI to further establish a complete research and education program in the field of nanomanufacturing.

The objective of this Small Grant for Exploratory Research (SGER) is to explore feasibility to design, fabricate and test a nano mechanical machining (mechanism) system-on-a-chip (tool, tool holder and their actuation), a dynamic scanning probe machining tool, with intention of performing operations such as drilling, milling, deburring, etc. This novel system-on-a-chip (SOAC) will be adaptable to scanning probe显微镜（SPM）操作平台。这项创新的另一个独特功能是，它将允许向纳米工具尖端进行旋转运动，这与其他人所证明的机制不同，可以实现纳米范式中传统宏观机械机的新边界。在这个探索性阶段，将使用硅多层制造使用良好的微电动机械系统（MEMS）平台来制造该机制。该项目涵盖了有关“纳米级制造过程”的研究和教育主题。最重要的领域之一将影响纳米技术的所有部分，是用于纳米制造，加工和制造的“工具”的设计和开发。可以通过各种方式将纳米加工的工具分类，但是主要的工具可以将其归类为（1）湿过程与干过程的工具，（2）自然与故意组织，以及（3）自下而上或自上而下的制造。在拟议的项目中，我们打算以自上而下的制造方法进行故意组织的干燥处理。 根据当今的田地方向，发现将立即影响半导体，光学，生物，药物等应用。该项目将通过Carver Project，REU等计划涉及种族和性别少数本科生和研究生在领导研究项目中。PI将继续通过该项目积极主动参与，通过在这个令人兴奋和新兴领域中保留和培训少数民族的高等教育，以取得更大的成功。此外，通过教育任务，PI将向学生提供培训，在研究生一级为纳米制造过程提供新的跨学科课程，并通过实验室旅行与非技术社区和高中生创建信息丰富的网站“为虚拟的纳米技术”提供信息。此外，纳米科学和工程，尤其是“纳米制造”是阿肯色州的主要重点领域之一。生物技术，电子产品以及传统制造业的领域是该州的主要发展领域。在这种背景下，拟议的研究领域对许多小型高科技行业至关重要。这个种子项目的成功将使PI能够在纳米制造领域进一步建立完整的研究和教育计划。