SGER: Explore Feasibility of a Novel Nano Mechanical Machining System-on-a-Chip (SOAC) for Nano Manufacturing

这个探索性研究（SGER）的目的是探索设计，制造和测试纳米机械加工的可行性片上系统（工具、工具保持器和它们的致动）、动态扫描探针加工工具，意图执行诸如钻孔、铣削、去毛刺的操作，这种新型的片上系统（SOAC）将适用于扫描探针显微镜（SPM）操作平台。这项创新的另一个独特之处在于，它将允许纳米工具尖端的旋转运动，与其他人展示的机制不同，以实现纳米范式中传统宏观机械机器的新边界。在这个探索阶段，这个机制将使用成熟的微机电系统（MEMS）平台，通过硅多层制造。该项目涵盖了“纳米级制造工艺”的研究和教育主题。其中一个最重要的领域将影响纳米技术的所有部分，是设计和开发用于纳米制造，加工和制造的“工具”。纳米加工的工具可以以各种方式分类，但主要可以将其分类为（1）湿法与干法工艺的工具，（2）自然与有意组织，以及（3）自下而上或自上而下的制造。在建议的项目中，我们打算采用自上而下的制造方法进行有意组织的干法处理。 根据该领域今天的发展方向，这些发现将立即影响半导体、光学、生物、制药等应用。该项目将涉及少数民族以及性别少数的本科生和研究生通过如卡弗项目，REU等项目的领先研究项目，PI将继续通过该项目的更大和更好的成功，通过保留和培训少数民族学生接受高等教育在这个令人兴奋的新兴领域的积极参与。此外，通过教育任务，PI将为学生提供有关该项目的培训，在研究生阶段引入一个关于纳米制造过程的新的跨学科课程，并通过实验室图尔斯参观和为非技术社区和高中学生创建一个信息丰富的网站“纳米技术傻瓜”进行宣传。此外，纳米科学和工程，特别是“纳米制造”是阿肯色州的主要重点领域之一。生物技术、电子沿着传统制造业是该州主要的增长部门。在此背景下，建议的研究主题领域是迫切的学术和技术的重要性，许多小型高科技产业。该种子项目的成功将使PI能够进一步在纳米制造领域建立完整的研究和教育计划。

The objective of this Small Grant for Exploratory Research (SGER) is to explore feasibility to design, fabricate and test a nano mechanical machining (mechanism) system-on-a-chip (tool, tool holder and their actuation), a dynamic scanning probe machining tool, with intention of performing operations such as drilling, milling, deburring, etc. This novel system-on-a-chip (SOAC) will be adaptable to scanning probe microscope (SPM) operation platform. Another unique feature of this innovation is that it will allow rotational motion to the nano tool tip, unlike mechanisms demonstrated by others, to realize new boundaries of traditional macro mechanical machine in nano paradigm. In this exploratory phase, this mechanism will be fabricated using well-established micro electro mechanical system (MEMS) platform through silicon multilayer fabrication. This project covers the research and education theme on "Manufacturing processes at Nanoscale".One of the most important areas which will impact all sections of nano technology, is the design and development of "tools" for nano fabrication, machining and manufacturing. The tools for nano machining can be classified in various ways, but predominantly one can classify them as (1) tools for wet versus dry process, (2) natural versus intentional organization, and (3) bottom-up or top-down fabrication. In the proposed project, we intend to pursue dry processing for intentional organization in top-down fabrication approach. Based upon today's direction of the field the findings will immediately impact semiconductor, optical, bio, pharmaceutical, etc. applications. This project will involve ethnic as well as gender minority undergraduate and graduate students in leading research projects through programs such as Carver Project, REU, etc. The PI would continue the proactive involvement through this project for bigger and better success by retaining and training minority students for higher education in this exciting and emerging area. Further, through the education task the PI will provide training to student on the project, introduce a new interdisciplinary class on Nanomanufacturing Processes at graduate level, and reach out through lab tours and creating an informative website "Nanotechnology for Dummies" for non-technical community and high school students. Moreover, nano science and engineering, particularly "nano manufacturing" is one of the major areas of emphasis for the state of Arkansas. The fields of biotechnology, electronics along with the traditional manufacturing are the major growing sectors in the state. On this background, the proposed subject area of research is of urgent academic and technological importance to many small hi-tech industries. The success of this seed project will enable PI to further establish a complete research and education program in the field of nanomanufacturing.