SGER: Explore Feasibility of a Novel Nano Mechanical Machining System-on-a-Chip (SOAC) for Nano Manufacturing

这项探索性研究（SGER）小额资助的目的是探索设计、制造和测试纳米机械加工（机制）系统芯片（工具、刀架及其驱动）的可行性，这是一种动态扫描探针加工工具，旨在执行钻孔、铣削、去毛刺等操作。这种新型的片上系统（SOAC）将适用于扫描探针显微镜（SPM）的操作平台。这一创新的另一个独特之处在于，它将允许纳米工具尖端的旋转运动，不同于其他机制，在纳米范式中实现传统宏观机械机器的新边界。在这个探索阶段，该机制将通过硅多层制造，利用成熟的微机电系统（MEMS）平台制造。该项目涵盖了“纳米级制造工艺”的研究和教育主题。影响纳米技术各个领域的最重要领域之一是纳米制造、加工和制造“工具”的设计和开发。纳米加工的工具可以以各种方式分类，但主要可以将它们分类为(1)湿法与干法加工的工具，(2)自然组织与故意组织的工具，以及(3)自下而上或自上而下的制造。在提议的项目中，我们打算在自上而下的制造方法中追求有意组织的干加工。根据今天该领域的发展方向，这些发现将立即影响半导体、光学、生物、制药等领域的应用。该项目将通过卡弗项目、REU等项目，让少数民族和性别少数民族本科生和研究生参与主导研究项目。PI将继续积极参与这个项目，通过留住和培训少数民族学生在这个令人兴奋的新兴领域接受高等教育，取得更大更好的成功。此外，通过教育任务，PI将为学生提供项目培训，在研究生阶段引入纳米制造过程的新跨学科课程，并通过实验室参观和为非技术社区和高中生创建一个信息丰富的网站“纳米技术傻瓜”。此外，纳米科学和工程，特别是“纳米制造”是阿肯色州的主要重点领域之一。生物技术、电子以及传统制造业是该邦主要的增长领域。在此背景下，提出的研究课题对许多小型高科技产业具有迫切的学术和技术重要性。这个种子项目的成功将使PI进一步在纳米制造领域建立一个完整的研究和教育计划。

The objective of this Small Grant for Exploratory Research (SGER) is to explore feasibility to design, fabricate and test a nano mechanical machining (mechanism) system-on-a-chip (tool, tool holder and their actuation), a dynamic scanning probe machining tool, with intention of performing operations such as drilling, milling, deburring, etc. This novel system-on-a-chip (SOAC) will be adaptable to scanning probe microscope (SPM) operation platform. Another unique feature of this innovation is that it will allow rotational motion to the nano tool tip, unlike mechanisms demonstrated by others, to realize new boundaries of traditional macro mechanical machine in nano paradigm. In this exploratory phase, this mechanism will be fabricated using well-established micro electro mechanical system (MEMS) platform through silicon multilayer fabrication. This project covers the research and education theme on "Manufacturing processes at Nanoscale".One of the most important areas which will impact all sections of nano technology, is the design and development of "tools" for nano fabrication, machining and manufacturing. The tools for nano machining can be classified in various ways, but predominantly one can classify them as (1) tools for wet versus dry process, (2) natural versus intentional organization, and (3) bottom-up or top-down fabrication. In the proposed project, we intend to pursue dry processing for intentional organization in top-down fabrication approach. Based upon today's direction of the field the findings will immediately impact semiconductor, optical, bio, pharmaceutical, etc. applications. This project will involve ethnic as well as gender minority undergraduate and graduate students in leading research projects through programs such as Carver Project, REU, etc. The PI would continue the proactive involvement through this project for bigger and better success by retaining and training minority students for higher education in this exciting and emerging area. Further, through the education task the PI will provide training to student on the project, introduce a new interdisciplinary class on Nanomanufacturing Processes at graduate level, and reach out through lab tours and creating an informative website "Nanotechnology for Dummies" for non-technical community and high school students. Moreover, nano science and engineering, particularly "nano manufacturing" is one of the major areas of emphasis for the state of Arkansas. The fields of biotechnology, electronics along with the traditional manufacturing are the major growing sectors in the state. On this background, the proposed subject area of research is of urgent academic and technological importance to many small hi-tech industries. The success of this seed project will enable PI to further establish a complete research and education program in the field of nanomanufacturing.