Collaborative Research: Development Of Nano-Electrical Discharge Machining (NANO-EDM) For Advanced Manufacturing

合作研究：开发用于先进制造的纳米放电加工（NANO-EDM）

• 批准号: 0423698
• 负责人: Ajay Malshe
• 金额: --
• 依托单位: University of Arkansas
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-15 至 2008-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0423698&HistoricalAwards=false
• 关键词: Collaborative; Research; Development; Nano; Electrical

This grant provides funding to develop electrical discharge machining (EDM) process for nanometer scale cutting, "top-down" nanoscale machining. Initial experiments have successfully demonstrated feasibility of this technical approach to machine 40 nm (diameter) by 30 nm (deep) circular vias in atomically flat gold deposited on mica. Proposed nano-EDM process offers a unique and cogent opportunity to write precise nano structures, such as vias, at low cost (0.25 cent/hole according to current projection for a batch of 10x10 holes) and ultra high speed (currently the speed is 2 holes/minute for 25 nm dia x 15 nm deep hole), unlike the established processes such as focused ion-beam (FIB) and electron beam lithography (EBL). The investigators will explore theoretically and experimentally the role of process conditions and study effect of discharge energy density, voltage pulse duration, and discharge gap between the tool tip and the workpiece electrodes in various media. The unique collaboration between the U of A and UNL will bring interdisciplinary expertise and laboratory resources in related fields of nano mechanical machining, nano scale measurements, surface science and macro- and micro-EDM.The success of nano-EDM will practically allow the industry to work on gamut of electrically conducting as well as semiconducting materials in a non-vacuum environment. Nano-EDM will be instrumental for a wide range of emerging applications viz. nano vias for interconnects, single DNA detection device fabrication, etc. Further in the broader impact to the society, the PIs plan to introduce a course in the area of "Nano Mechanical Machining for Manufacturing". In the proposed research, the special emphasis will be to train underrepresented minorities. PIs will build partnerships with area schools and community colleges. Training is inevitable today, to the manufacturing community particularly in the Midwest, to create and retain new high paid nanomanufacturing related jobs in US.

该赠款提供了用于开发电气加工（EDM）工艺的资金，用于纳米尺度切割，“自上而下”的纳米级加工。最初的实验已成功证明了这种技术方法对机器40 nm（直径）的可行性，在沉积在云母上的原子金黄金中的30 nm（深）圆壳。 Proposed nano-EDM process offers a unique and cogent opportunity to write precise nano structures, such as vias, at low cost (0.25 cent/hole according to current projection for a batch of 10x10 holes) and ultra high speed (currently the speed is 2 holes/minute for 25 nm dia x 15 nm deep hole), unlike the established processes such as focused ion-beam (FIB) and electron beam lithography (EBL).研究人员将在理论和实验上探索过程条件的作用以及排放能量密度，电压脉冲持续时间以及工具尖端和工件电极之间的排放缝隙的作用。 A和UNL之间的独特合作将在纳米机械加工，纳米量表测量，表面科学以及宏观和微观edm的相关领域中带来跨学科的专业知识和实验室资源。纳米EDM的成功实际上会允许该行业在电动导电以及在非vacum ny-vacuum环境中的半导电材料方面工作。 Nano-EDM将对各种新兴应用有助于。用于互连的纳米vias，单个DNA检测装置制造等。进一步对社会的更广泛影响，PIS计划在“制造纳米机械加工”领域引入一门课程。在拟议的研究中，特别重点将是培训代表性不足的少数民族。 PIS将与地区学校和社区大学建立伙伴关系。如今，培训是不可避免的，特别是在中西部的制造业社区，以创造和保留新的高薪纳米制造业与美国。