Contacts to Group III Nitride Semiconductor Alloys

本项目研究III族氮化物半导体合金的欧姆接触。特别是，当接触退火时，半导体合金的成分变化将被研究。在此之前，最近观察到Al在Alx Ga1-x N中富集，Ga在退火Ni， Pd和Au触点中优先掺入。将研究金属类型（晚期与早期过渡金属）和半导体合金成分（Alx Ga1-x N， Inx Al1-x N或Inx Ga1-x N）的影响，以便建立一个热力学和动力学框架来描述这一现象。还将评估半导体合金中成分移位对触点电性能的影响。材料表征工作将主要依靠透射电子显微镜、x射线光电子能谱和扫描俄歇显微镜，而电学表征将包括电流电压、电容电压和欧姆接触电阻测量。该项目致力于与具有技术相关性的电子/光子材料相关的基础研究问题。III族氮化物半导体合金在电接触方面的基本进展将有利于开发用于节能照明的固态发射器，以及用于移动通信的高功率和高频率晶体管。该项目还为培养一名研究生和一名或多名本科生创造了机会。此外，首席研究员将把她的研究计划的各个方面纳入她的课堂教学。她的外展活动-少数民族学生暑期研究机会计划；从事科学与工程研究的女性；Nittany营（六年级和七年级女生科学营）在传统的大学围墙之外推广科学。* * *

This project addresses ohmic contacts to the group III nitride semiconductor alloys. In particular, compositional shifts in semiconductor alloys when contacts are annealed will be investigated. This follows recent observations of enrichment of Al in Alx Ga1-x N and preferential incorpora-tion of Ga in annealed Ni, Pd and Au contacts. The influence of the type of metal (late versus early transition metal) and composition of the semiconductor alloy (Alx Ga1-x N, Inx Al1-x N or Inx Ga1-x N) will be studied in order to develop a thermodynamic and kinetic framework to de-scribe the phenomenon. The effect of a compositional shift in the semiconductor alloy on the electrical properties of the contacts will also be evaluated. Materials characterization efforts will rely primarily on transmission electron microscopy, x-ray photoelectron spectroscopy and scan-ning Auger microscopy, while electrical characterization will include current-voltage, capaci-tance-voltage, and ohmic contact resistance measurements. %%% The project addresses fundamental research issues associated with electronic/photonic materials having technological relevance. Basic advances in electrical contacts to the group III nitride semiconductor alloys will benefit efforts to develop solid state emitters for energy-efficient light-ing, and transistors that operate at high power and high frequencies for mobile communications. The project also creates an opportunity for the training of a graduate student and one or more un-dergraduate students. Additionally, the principal investigator will incorporate aspects of her re-search program into her classroom instruction. Her outreach activities-Summer Research Opportunities Program for minority students; Women in Science and Engineering Research; Nittany Camp (Science Camp for 6th and 7th grade Girls) promote science beyond the traditional walls of the unversity. ***