GOALI: Heterogeneous Integration of Compound Semiconductor Material with Silicon CMOS

本研究的目的是研究和开发基于III-V化合物半导体的集成在可制造硅平台上的器件。AmberWave Systems公司开发了一种新型的选择性外延技术，称为长宽比捕获技术，该技术涉及在硅的高长宽比沟槽上选择性沉积化合物半导体。本项目将制作基本器件并进行表征，然后用硅电路实现III-V谐振隧道器件。智力优势：在硅上形成各种异质结构的能力对于增强集成电路的性能至关重要，因为硅器件的缩放正在接近基本极限。该提案包括一家小型创新公司AmberWave Systems和RIT之间的战略和协同合作伙伴关系，AmberWave Systems从事尖端的先进半导体衬底工程，RIT拥有一个高度认可的微电子工程项目和一个学生运行的集成电路实验室。这一建议将促进这种伙伴关系实现急需的突破。更广泛的影响：根据本提案开发的技术将对高频混合信号，光电，光子系统芯片技术的新领域以及扩展硅超越感知的技术路线图产生深远的影响。学生将置身于研发环境中，在学习先进技术的同时体验科技的发展。该公司将获得一个已建立的集成电路工厂，在那里，教职员工和学生可以进行大量的研发工作。外展活动的目标是让高中教师参与进来，吸引少数民族和市中心的学生。

The objective of this research is to investigate and develop III-V compound semiconductor based devices integrated on a manufacturable silicon platform. AmberWave Systems has developed a novel selective epitaxy technique known as Aspect Ratio Trapping that involves selective deposition of compound semiconductors on high aspect ratio trenches in silicon. In this project, basic devices will be fabricated and characterized followed by realizing III-V resonant tunnel devices with silicon circuitry. Intellectual merit: The ability to form a wide variety of heterostructures on silicon is critical for enhancing the performance of integrated circuits for future information technology revolution as scaling of silicon devices is approaching fundamental limits. This proposal encompasses a strategic and synergistic partnership between a small innovation company, AmberWave Systems, engaged in cutting edge advanced semiconductor substrate engineering and RIT that has a highly recognized microelectronic engineering program with a student run integrated circuit laboratory. This proposal will facilitate this partnership in achieving critically needed breakthroughs.Broader Impact: The technology developed under this proposal will have far reaching implications in new areas of high frequency mixed signal, optoelectronic, photonic system on chip technologies as well as in extending silicon beyond the perceived technology roadmap. The students will be exposed to an R&D environment and experience technology development while learning advanced techniques. The company will get access to an established integrated circuit fab where a significant amount of R&D work can be performed involving faculty and students. The outreach activities will be targeted at involvement of high school teachers and attracting minority and inner city students.