SBIR Phase I: Photon Enhanced SEM Platform for Nano-Manufacturing
SBIR Phase I: Photon Enhanced SEM Platform for Nano-Manufacturing
批准号:
0839497
负责人:
Thomas Moore
金额:
$10.0万
依托单位:
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
2009
资助国家:
美国
项目状态:
已结题
起止时间:
2009-01-01 至 2009-06-30
中文摘要
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英文摘要
This Small Business Innovation Research Phase I project will demonstrate the scientific and technical feasibility of introducing optical processing into conventional scanning electron microscopes (SEM). The addition of localized and site specific high photon flux offers the opportunity to enable a variety of novel patterned materials processing options in these tools, including enhanced deposition and etch processes at the nanometer scale.The broader impact of this project opens up a broad array of new applications in areas such as biology, medicine and nanotechnology.
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