课题基金 / 基金详情

Molecule Liftoff from Surfaces

Molecule Liftoff from Surfaces
分子从表面剥离
批准号:
0910564
负责人:
Barbara Garrison
金额:
$55.4万
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
2009
资助国家:
美国
项目状态:
已结题
起止时间:
2009-08-01 至 2013-07-31

项目摘要

项目成果

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中文摘要
翻译
宾夕法尼亚州立大学的芭芭拉·加里森(Barbara Garrison)获得了理论与计算化学项目的一项奖励,她的研究旨在模拟高能粒子轰击表面,以解决最先进实验中的基本问题。该研究是基于分子动力学(MD)模拟来了解深度剖面的潜在机制。这项研究涉及广泛的重要技术和制造工艺,包括表面清洁、表面光滑、半导体掺杂剂的注入、集成电路修复的聚焦离子束铣削、反应离子蚀刻以及二次离子质谱SIMS的分析技术,包括极高分辨率的三维成像。此外,它与自然过程有关,如土星卫星的侵蚀。
英文摘要
Barbara Garrison of Pennsylvania State University is supported by an award from the Theoretical and Computational Chemistry program to perform research aimed at modeling energetic particle bombardment of surfaces to address essential issues in state-of-the art experiments. The proposed research is based on molecular dynamics (MD) simulations to understand the underlying mechanisms involved in depth profiling. This research has relevance to a broad range of important technologies and manufacturing processes including surface cleaning, surface smoothing, implantation of dopants in semiconductors, focused ion beam milling for integrated circuit repair, reactive ion etching, and the analytical technique of secondary ion mass spectrometry SIMS, including extremely high resolution three-dimensional imaging. Additionally, it is relevant to natural processes such as the erosion of the moons of Saturn.
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Molecule Liftoff from Surfaces
ITR - (ASE) - (sim): Mesoscale Modeling of Laser Ablation of Polymers
Molecule Liftoff from Surfaces
Molecular Modeling of Organic Molecule Desorption from Surfaces
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