Continuous Atmospheric Pressure Atomic Layer Deposition Process for Controlled Nanoscale Thin Film Coatings

受控纳米级薄膜涂层的连续大气压原子层沉积工艺

• 批准号: 1000382
• 负责人: Gregory Parsons
• 金额: $ 37.2万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-06-01 至 2014-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1000382&HistoricalAwards=false
• 关键词: Continuous; Atmospheric; Pressure; Atomic; Layer

The objective of this research project is to expand the understanding of Atomic layer deposition (ALD) operation at atmospheric pressure and open new opportunities for low cost high speed coating.New methods to produce thin film coatings for electronic devices and improved textile materials are important for passivation and protection, and can provide new function. Most common methods are not compatible with temperature and throughput needed for coating high surface area polymer fibers. ALD is a relatively new coating process that can produce extremely well controlled coatings at low temperatures compatible with plastics. One downside to ALD is that it generally requires samples to be placed in a vacuum chamber, which can be costly and slow. The work has the potential for broad impact because it will define a new methodology for nanomanufacturing of organic electronics and nonwoven fiber surface stabilization. The work will advance discovery through the work of two PhD graduate students. Students from underrepresented groups will be recruited to participate. Research infrastructure will be enhanced by supporting existing shared user facilities, and by expanding the availability of ALD reactors at NC State. The PIs will also introduce these Nanotechnology concepts to middle and high school students through their participation in annual NC State University sponsored events.

本研究项目的目标是扩大对大气压下原子层沉积（ALD）操作的理解，并为低成本高速涂覆开辟新的机会。生产电子设备和改进纺织材料薄膜涂层的新方法对于钝化和保护非常重要，并可以提供新的功能。最常见的方法与涂覆高表面积聚合物纤维所需的温度和产量不相容。 ALD是一种相对较新的涂层工艺，可以在低温下生产与塑料相容的非常好的受控涂层。 ALD的一个缺点是它通常需要将样品放置在真空室中，这可能是昂贵且缓慢的。 这项工作有可能产生广泛的影响，因为它将为有机电子和非织造纤维表面稳定的纳米制造定义一种新的方法。 这项工作将通过两名博士研究生的工作推进发现。 将招募代表性不足群体的学生参加。研究基础设施将通过支持现有的共享用户设施和扩大北卡罗来纳州ALD反应堆的可用性来加强。 PI还将通过参加NC州立大学主办的年度活动向中学生介绍这些纳米技术概念。