Volatile Transition Metal Compounds with New Ligand Archetypes: Exploratory Synthesis, Small Molecule Reactivity, and Use as Molecular Precursors

具有新配体原型的挥发性过渡金属化合物：探索性合成、小分子反应性以及用作分子前体

• 批准号: 1112360
• 负责人: Gregory Girolami
• 金额: $ 39万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-08-15 至 2014-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1112360&HistoricalAwards=false
• 关键词: Volatile; Transition; Metal; Compounds; New

In this project funded by the Chemical Synthesis Program of the Chemistry Division, Professor Gregory S. Girolami of the Department of Chemistry of the University of Illinois will explore the synthesis of several classes of molecular precursors for electronic materials. The project involves the synthesis of new compounds, investigations of their chemical reactivities, and studies of their volatilities and utilities as thin film precursors. Some of the specific objectives of the current project are the development of volatile two-coordinate amido complexes of the late transition elements, and mechanistic studies of dealkylation reactions that are relevant both to chemical vapor deposition (CVD) and to the chemistry of dialkylamide ligands. In parallel, investigations of new CVD precursors for both metal borides and metal oxides will be carried out, using a new class of chelating borohydride ligands of the general formula NR2(BH3)2-. The broader impacts involve training undergraduate students, graduate students, and postdoctoral researchers, and broadening participation through the inclusion of researchers from underrepresented groups on the project. This work could lead to the development of better molecular precursors for chemical vapor deposition (CVD) and atomic layer deposition (ALD) growth of thin films. Such chemistry will have an impact on critical problems in the microelectronics industry, and could lead to faster and more capable microprocessors for computers and other electronic equipment. In addition, this project will provide excellent training of students, from pre-undergraduate to post-doctoral, including those from groups historically underrepresented in the sciences.

在这个由化学系化学合成计划资助的项目中，伊利诺伊大学化学系的格雷戈里·S·吉罗拉米教授将探索几类电子材料分子前体的合成。该项目包括新化合物的合成，它们的化学反应活性的研究，以及它们作为薄膜前体的挥发性和用途的研究。目前项目的一些具体目标是开发后过渡元素的挥发性双配位氨基配合物，以及与化学气相沉积(CVD)和二烷基酰胺配体化学有关的脱烷基化反应的机理研究。同时，将使用通式为NR2(BH3)2-的一类新的螯合硼氢化物配体，对金属硼化物和金属氧化物的新的CVD前体进行研究。更广泛的影响包括培训本科生、研究生和博士后研究人员，并通过纳入该项目代表性不足群体的研究人员来扩大参与。这项工作可以开发出更好的用于化学气相沉积(CVD)和原子层沉积(ALD)生长薄膜的分子前驱体。这种化学将对微电子行业的关键问题产生影响，并可能导致用于计算机和其他电子设备的更快、更强大的微处理器。此外，该项目将为学生提供极好的培训，从本科前到博士后，包括那些在科学界历来代表性不足的学生。