SBIR Phase I: Defect-Free Nano-Scale Printing: An Enabling Technology for Nanofabrication

这个小企业创新研究第一阶段项目将开发一种紧凑的，桌面，高通量的纳米光刻工具，能够打印任意形状的周期性特征阵列，具有低于50纳米的特征尺寸无缺陷。创新的印刷工具利用了塔尔博特效应，其中相干照明的周期性衍射结构（塔尔博特掩模）通过在称为塔尔博特平面的平面处的衍射而自成像，而不使用任何光学器件。使用极紫外（EUV）激光的相干照明允许将包含纳米级图案的掩模复制到光致抗蚀剂上。该方法是非接触的，它是无缺陷的，因为掩模中的任何缺陷都是在整个成像场上平均的。 该方法使用由XUV Lasers Inc.商业化的高平均功率、高相干台式EUV激光器。 拟议的紧凑型工具将带来具有成本效益的纳米图案化的能力，以小规模的公司和大学laborators.The更广泛的影响/商业潜力，该项目是在其能力，以简化纳米结构的周期性阵列的打印。 桌面纳米印刷EUV系统将显著提高以负担得起的多功能方式制造纳米结构的能力。 它的主要属性是它在纳米结构的印刷中提供无缺陷的印刷、高吞吐量和成本效益。 这些能力可能会对各个学科产生广泛的影响，包括材料科学，先进的光学元件制造，纳米电子学，生物学和医学。 纳米印刷工具针对需要印刷用于纳米结构生长的模板、化学微传感器、气体分离膜以及制造高密度衍射光栅、短波长光偏振器和等离子体结构的市场。

This Small Business Innovation Research Phase I project will develop a compact, table top, high-throughput nano-photolithography tool capable to print arrays of periodic features of arbitrary shape with sub-50 nm feature size defect-free. The innovative printing tool makes use of the Talbot effect, in which a coherently illuminated periodic diffractive structure (the Talbot mask) self-images by diffraction at planes known as Talbot planes without the use of any optics. Coherent illumination with extreme ultraviolet (EUV) laser light allows replication of masks containing nano-scale patterns onto photoresist. The method is non-contact and it is defect-free as any defect in the mask is averaged over the entire imaging field. The method uses a high average power, highly coherent table-top EUV laser commercialized by XUV Lasers Inc. The proposed compact tool will bring cost-effective nano-patterning capabilities to small size companies and university laboratories.The broader impact/commercial potential of this project is in its ability to simplify the printing of periodic arrays of nanostructures. The table-top nano-printing EUV system will significantly enhance the capabilities to fabricate nanostructures in an affordable and versatile way. Its main attributes are that it offers defect-free printing, high through-put, and cost-effectiveness in the printing of nanostructures. These capabilities could have a broad impact in various disciplines, including material science, advanced optical component manufacturing, nanoelectronics, biology and medicine. The nano-printing tool is aimed at markets that require the printing of templates for nanostructure growth, chemical micro-sensors, gas separation membranes, and the fabrication of high density diffraction gratings, short wavelength light polarizers, and plasmonic structures.