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Shape measurement of precision components by use of a dynamically tracking interferometric line sensor

使用动态跟踪干涉线传感器进行精密部件的形状测量

基本信息

批准号：
209933375
负责人：
Dr.-Ing. Gerd Ehret
金额：
--
依托单位：
Fachgebiet Messtechnik
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2011
资助国家：
德国
起止时间：
2010-12-31 至 2020-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/209933375?language=en
关键词：
Shape measurement precision components use

项目摘要

This project deals with the accurate form measurement of precisioncomponents based on a line-shaped multi-distance sensor, which isdynamically tracked to the contour of a measuring object. During thefirst phase of the project the concept for the measurement ofapproximately rotationally symmetrical optical surfaces wasdeveloped and verified experimentally. The measuring object islocated on a precise rotary table. The interferometric line sensor usesa sinusoidal modulation of the optical path length in the reference armof the interferometer and a line scan camera to record theinterference signals. This results in approx. 800,000 height values persecond. During a single revolution of the rotary table, the sensordetects the geometry of a circular-ring-shaped segment of the surfaceof the measuring object. Repeating such measurements for differentradial positions and stitching of the individual overlapping circular ringsegments, yields the complete geometry of the specimen. During thesecond project phase, the measuring system was extended by a fiberbasedillumination, an absolute height measurement option by meansof white light interferometry for calibration and scanning, and themotorized inclination tracking of the sensor. In addition, stitchingalgorithms have been developed and successively improved. Thesestitching algorithms selectively utilize the redundant height data fromthe overlapping regions to calculate 3D topographies with highprecision. In the proposed third project phase, the line-based formmeasuring system is to be extended by a multi-line camera, whichallows laterally displaced, simultaneous measurement of heightvalues. This will result in new evaluation possibilities andmeasurement strategies which are to be investigated. For example,surface gradients in the scanning direction can be detected and takeninto account during sensor tracking, or evaluation methods based onshearing algorithms can be used. In addition, the wobble error of therotary table, which currently limits the achievable measurementuncertainty, will be recorded during the measuring process and itsinfluence will be subsequently eliminated from the topographymeasurement values. The project further intends to extend themeasuring volume of the system, so that specimens of up to 200 mmin diameter can be measured. In addition, an on-the-fly tracking of thesensor is to be implemented so that free-form surfaces can also bemeasured. At the end of the third project phase, it is expected thatconsiderably more reliable measurements with lower measurementuncertainty will be even possible if the rotary table, as the only axisthat is moved during a circular ring measurement, does not achievethe highest accuracy requirements. This is intended to provide optimalpreconditions for the possible transfer of the measuring system intoapplication, e.g. within the framework of a transfer project.

该项目基于线形多距离传感器对精密部件进行精确形状测量，该传感器动态跟踪测量对象的轮廓。在该项目的第一阶段，开发了测量近似旋转对称光学表面的概念并进行了实验验证。测量对象位于精密转台上。干涉线传感器使用干涉仪参考臂中光路长度的正弦调制和线扫描相机来记录干涉信号。这导致大约。每秒 800,000 个高度值。在转台旋转一圈期间，传感器检测测量对象表面圆环形部分的几何形状。对不同的径向位置重复这样的测量并缝合各个重叠的圆环段，产生样本的完整几何形状。在项目的第二阶段，测量系统通过基于光纤的照明、通过白光干涉测量进行校准和扫描的绝对高度测量选项以及传感器的电动倾斜跟踪进行了扩展。此外，拼接算法也得到了发展并不断完善。这些拼接算法有选择地利用重叠区域的冗余高度数据来计算高精度的 3D 形貌。在拟议的第三项目阶段，基于线的形状测量系统将通过多线相机进行扩展，从而可以横向移动，同时测量高度值。这将产生新的评估可能性和有待研究的测量策略。例如，可以检测扫描方向上的表面梯度并在传感器跟踪期间将其考虑在内，或者可以使用基于剪切算法的评估方法。此外，目前限制可实现测量不确定度的转台摆动误差将在测量过程中被记录，并且其影响随后将从形貌测量值中消除。该项目还打算扩大系统的测量体积，以便可以测量直径达 200 毫米的样本。此外，还将实现传感器的动态跟踪，以便也可以测量自由形状的表面。在第三项目阶段结束时，预计即使转台（作为圆环测量期间唯一移动的轴）没有达到最高精度要求，也可以实现更可靠的测量和更低的测量不确定性。这样做的目的是为测量系统可能转移到应用中提供最佳的先决条件，例如：在转移项目的框架内。