MRI: Acquisition of a Photonic Materials Molecular Beam Epitaxy System

目的：通过这笔赠款，我们计划组装一个多室半导体外延系统，以创造高质量的光电材料和器件。该设备将包括一个自动化分子束外延（MBE）系统，可接入至少两个外延室。整个系统将提供给研究和商业界的每个人。此外，一名全职工程师将为系统配备人员，为外部用户生长样品。智力优势：系统腔室将有高带隙III-V和低带隙III-V腔室，沿着有可能扩展IV族（SiGeSn）和氧化物的能力。MBE腔室都将是Veeco Gen 10A/20 A MBE系统的一部分，该系统是全自动的，使新手用户易于操作。将现有系统的表征工具移至该系统的制备室。这种多室系统能够进行大量的实验，这些实验在单独的系统中是不可能的，因为暴露在大气中会造成破坏性影响。该系统中组件的混合将使从最基本的材料研究到高度先进设备的开发的一切成为可能。 这个工具将是世界上独一无二的，更好的是，它将提供给一般社区。更广泛的影响：多室外延系统将可供一般使用。虽然使用的标准费率将与NSF资助的NNIN中心的收费相同，但我们还打算捐赠高达10%的可用机器时间，供弱势和少数民族服务机构以大幅降低的费率甚至免费使用。塔夫茨致力于公共服务，其强大的财务偿付能力的支持，使其成为一个理想的位置，以容纳这种设备。此外，高科技初创公司，学院和大学在波士顿地区的集中增强了其安置的理想性。

Objective: Through this grant we plan to assemble a multi-chamber semiconductor epitaxy system to enable the creation of high-quality optoelectronic materials and devices. This apparatus will consist of an automated molecular beam epitaxy (MBE) system with access to at least two epitaxy chambers. The entire system will be available for everyone in the research and business community. Also, a full time engineer will staff the system to grow samples for outside users.Intellectual Merits: The systems chambers will have high band-gap III-V and Low band-gap III-V chambers along with the possibility for a Group IV (SiGeSn) and Oxide capability expansion. The MBE chambers will all be part of a Veeco Gen10A/20A MBE system, which is fully automated, making it easy for novice users to handle. A characterization tools from existing systems will be moved into the preparation chamber for this system. This multi-chamber system enables a significant number of experiments that would not be possible in separated systems due to the destructive influence exposure to atmosphere can cause. The mixture of components in this system will enable everything from the most fundamental materials research to the development of highly advances devices. This tool will be unique in the world and, better yet, it will be available to the general community.Broader Impact: The multi-chamber epitaxy system will be available for general use. While the standard rates used will be equal to those charged in NSF funded NNIN centers, we also intend to donate up to 10% of the available machine time for use by disadvantaged and minority serving institutions at substantially reduced rates or even for free. Tufts dedication to public service backed by its strong financial solvency makes it an ideal location to house this equipment. Additionally, the concentration of high-tech start-up companies, colleges, and universities in the Boston-area enhance the ideality of its placement.