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Solvent-based Roll-to-Roll Nanoimprinting for Large Area Nanopatterning

用于大面积纳米图案化的溶剂型卷对卷纳米压印

基本信息

批准号：
1661660
负责人：
Qiuming Yu
金额：
$ 30.86万
依托单位：
University of Washington
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2017
资助国家：
美国
起止时间：
2017-07-01 至 2020-10-31
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1661660&HistoricalAwards=false
关键词：
Solvent based Roll Nanoimprinting Large

项目摘要

Nanostructured materials exhibit extraordinary optical, electrical, mechanical and chemical properties that enable novel devices with enhanced performance and functionality. Nanostructures are frequently utilized in numerous applications including photovoltaics, chemical and biological sensing, biotechnology, solid-state lighting, hydrogen production via photocatalytic water splitting and other uses. These various areas of nanotechnology demand nanofabrication techniques that are cost effective and practical while maintaining quality control and process flexibility. The nanofabrication techniques must also be scalable in order to be seamlessly applied to real-world applications beyond the laboratory. Despite progress having been made, a versatile nanofabrication technology that can meets all necessary requirements is lacking. This research will open up a new nanomanufacturing process pathway that can be applied to speed-up laboratory and pilot-scale device development and also be scaled-up for large-area, high-throughput product manufacturing. This research will make significant impacts on the fields of nanotechnology, nanomanufacturing, plasmonics, optoelectronics and nanophotonics. Plans are for graduate and undergraduate students from underrepresented groups to receive training, participate in this highly interdisciplinary research and conduct experiments in the new Washington Clean Energy Testbeds facility.Nanoimprint lithography is a simple, low-cost, high-resolution and high-throughput nanofabrication technique with compatibility for large-scale roll-to-roll manufacturing. However, current roll-to-roll nanoimprint lithography processes are all based on either thermal or ultraviolet-based curing techniques that require either high temperature or special photopolymer resists. In addition, roller molds are typically made by time-consuming and costly fabrication processes. The research team aims to design and develop a new roll-to-roll nanoimprint lithography process using environmentally friendly polymer resists and a high-resolution composite belt mold. The research is accomplished through fundamental understanding of mechanics and fluid dynamics of mold cavity filling under solvent-assisted conditions to produce quality nanostructures on large area flexible substrates with high resolution and high throughput. Solvent-assisted nanoimprinting offers a low temperature and low pressure process, which eliminates issues resulting from thermal expansion variations between the mold, substrate and resist and reduces energy input costs while increasing processing speed. New composite elastomeric belt molds are easily and affordably replicated for rapid prototyping while providing high-resolution. The high quality nanostructures on flexible substrates are fabricated using this method and integrated in to novel flexible optoelectronic devices to demonstrate its capabilities.

纳米结构材料表现出非凡的光学、电学、机械和化学特性，使新型设备具有更高的性能和功能。纳米结构经常被用于许多应用，包括光伏、化学和生物传感、生物技术、固态照明、通过光催化水分解制氢和其他用途。这些不同的纳米技术领域需要具有成本效益和实用性的纳米制造技术，同时保持质量控制和工艺灵活性。纳米制造技术还必须具有可扩展性，以便无缝地应用于实验室以外的实际应用。尽管已经取得了进展，但仍然缺乏一种能够满足所有必要要求的通用纳米制造技术。这项研究将开辟一条新的纳米制造工艺途径，可用于加速实验室和中试规模的器件开发，也可用于大面积、高通量的产品制造。这项研究将对纳米技术、纳米制造、等离子体、光电子学和纳米光子学等领域产生重大影响。计划是让来自代表性不足群体的研究生和本科生接受培训，参与这项高度跨学科的研究，并在新的华盛顿清洁能源试验台设施中进行实验。纳米压印技术是一种简单、低成本、高分辨率和高通量的纳米制造技术，适合大规模的卷对卷制造。然而，目前的卷对卷纳米压印工艺都是基于热敏或紫外光固化技术，需要高温或特殊的光聚合物抗蚀剂。此外，滚轮模具通常是由耗时和昂贵的制造过程。研究小组的目标是设计和开发一种新的卷对卷纳米压印工艺，使用环保聚合物抗蚀剂和高分辨率复合带模具。本研究通过对溶剂辅助条件下模腔填充的力学和流体动力学的基本理解来完成，从而在大面积柔性基板上生产高分辨率和高通量的高质量纳米结构。溶剂辅助纳米压印提供了低温低压工艺，消除了模具、基材和抗蚀剂之间的热膨胀变化带来的问题，降低了能量输入成本，同时提高了加工速度。新的复合弹性体带模具是容易和经济的复制快速原型，同时提供高分辨率。利用该方法在柔性衬底上制备了高质量的纳米结构，并将其集成到新型柔性光电器件中。

项目成果

期刊论文数量（11）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Label-free raman observation of TET1 protein-mediated epigenetic alterations in DNA

无标记拉曼观察 TET1 蛋白介导的 DNA 表观遗传改变

DOI：
10.1021/acs.analchem.9b01004
发表时间：
2019
期刊：
Analytical Chemistry
影响因子：
7.4
作者：
Luo Xiaojun;Jiang Lijuan;Kang Tuli;Xing Yingfang;Zheng Erjin;Wu Ping;Cai Chenxin;Yu Qiuming
通讯作者：
Yu Qiuming

Revealing Stability of Inverted Planar MA-Free Perovskite Solar Cells and Electric Field-Induced Phase Instability

DOI：
10.1021/acs.jpcc.0c05357
发表时间：
2020-08
期刊：
Journal of Physical Chemistry C
影响因子：
3.7
作者：
Erjin Zheng;Zhiyin Niu;Gabriella A. Tosado;Haopeng Dong;Yaqoub Albrikan;Qiuming Yu
通讯作者：
Erjin Zheng;Zhiyin Niu;Gabriella A. Tosado;Haopeng Dong;Yaqoub Albrikan;Qiuming Yu

Incorporating Aluminum Plasmonic Nanohemisphere Arrays into Organic Ultraviolet Photodetectors for Improved Photoresponse