Solvent-based Roll-to-Roll Nanoimprinting for Large Area Nanopatterning

用于大面积纳米图案化的溶剂型卷对卷纳米压印

• 批准号: 2051617
• 负责人: Qiuming Yu
• 金额: $ 7.93万
• 依托单位: Cornell University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2020
• 资助国家: 美国
• 起止时间: 2020-07-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2051617&HistoricalAwards=false
• 关键词: Solvent; based; Roll; Nanoimprinting; Large

Nanostructured materials exhibit extraordinary optical, electrical, mechanical and chemical properties that enable novel devices with enhanced performance and functionality. Nanostructures are frequently utilized in numerous applications including photovoltaics, chemical and biological sensing, biotechnology, solid-state lighting, hydrogen production via photocatalytic water splitting and other uses. These various areas of nanotechnology demand nanofabrication techniques that are cost effective and practical while maintaining quality control and process flexibility. The nanofabrication techniques must also be scalable in order to be seamlessly applied to real-world applications beyond the laboratory. Despite progress having been made, a versatile nanofabrication technology that can meets all necessary requirements is lacking. This research will open up a new nanomanufacturing process pathway that can be applied to speed-up laboratory and pilot-scale device development and also be scaled-up for large-area, high-throughput product manufacturing. This research will make significant impacts on the fields of nanotechnology, nanomanufacturing, plasmonics, optoelectronics and nanophotonics. Plans are for graduate and undergraduate students from underrepresented groups to receive training, participate in this highly interdisciplinary research and conduct experiments in the new Washington Clean Energy Testbeds facility.Nanoimprint lithography is a simple, low-cost, high-resolution and high-throughput nanofabrication technique with compatibility for large-scale roll-to-roll manufacturing. However, current roll-to-roll nanoimprint lithography processes are all based on either thermal or ultraviolet-based curing techniques that require either high temperature or special photopolymer resists. In addition, roller molds are typically made by time-consuming and costly fabrication processes. The research team aims to design and develop a new roll-to-roll nanoimprint lithography process using environmentally friendly polymer resists and a high-resolution composite belt mold. The research is accomplished through fundamental understanding of mechanics and fluid dynamics of mold cavity filling under solvent-assisted conditions to produce quality nanostructures on large area flexible substrates with high resolution and high throughput. Solvent-assisted nanoimprinting offers a low temperature and low pressure process, which eliminates issues resulting from thermal expansion variations between the mold, substrate and resist and reduces energy input costs while increasing processing speed. New composite elastomeric belt molds are easily and affordably replicated for rapid prototyping while providing high-resolution. The high quality nanostructures on flexible substrates are fabricated using this method and integrated in to novel flexible optoelectronic devices to demonstrate its capabilities.

纳米结构材料具有非凡的光学，电气，机械和化学特性，可实现具有增强性能和功能的新型设备。纳米结构经常用于许多应用中，包括光伏，化学和生物传感，生物技术，固态照明，通过光催化水分分割和其他用途生产氢和其他用途。纳米技术的这些各个领域需要纳米制造技术，在维持质量控制和过程灵活性的同时，它们具有成本效益和实用性。为了无缝应用于实验室以外的现实应用程序，纳米制造技术也必须是可扩展的。尽管取得了进展，但缺乏可以满足所有必要要求的多功能纳米制作技术。这项研究将开放一种新的纳米制造过程途径，该过程可用于加速实验室和试点规模的设备开发，还可以扩展到大区域，高通量产品制造。这项研究将对纳米技术，纳米制造，血浆原料，光电子和纳米摄氏的领域产生重大影响。计划是来自代表性不足小组的研究生和本科生接受培训的计划，参加了新的华盛顿清洁能源测试台设施的高度跨学科研究和行为实验。Nanoimprint刻板图是一项简单，低成本，高分辨率，高分辨率和高通量的Nanofutation技术，具有适用于大型制造滚动的兼容性。但是，当前的卷到滚动纳米图形光刻过程均基于需要高温或特殊光聚合物抵抗的基于热或紫外线的固化技术。此外，滚筒模具通常是由耗时且昂贵的制造工艺制成的。研究小组旨在使用环保聚合物抵抗和高分辨率复合带模具来设计和开发新的卷到卷纳米膜印刷过程。这项研究是通过对溶剂辅助条件下的霉菌腔填充力学和流体动力学的基本了解来完成的，以在高分辨率和高吞吐量的大面积柔性基材上产生优质的纳米结构。溶剂辅助纳米印刷提供了低温和低压工艺，从而消除了模具，底物和抵抗之间的热膨胀变化所产生的问题，并降低了能量输入成本，同时又提高了处理速度。新的复合弹性皮带模具易于易于复制，以快速原型制作，同时提供高分辨率。使用这种方法制造了柔性基材上的高质量纳米结构，并将其集成到新型的柔性光电设备中，以证明其功能。