SNM: Carbon Nanotubes Wafers

SNM：碳纳米管晶圆

• 批准号: 1727523
• 负责人: Michael Arnold
• 金额: $ 149.03万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-09-01 至 2023-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1727523&HistoricalAwards=false
• 关键词: SNM; Carbon; Nanotubes; Wafers

This Scalable NanoManufacturing (SNM) research project will advance the scalable manufacturing of ordered assemblies of carbon nanotubes and of radio frequency electronic devices and systems fabricated from these assemblies. Semiconducting carbon nanotubes are among the best semiconductors that have ever been discovered. They promise to significantly improve the speed, energy efficiency, and sensitivity of a wide range of electronic devices including central processing units (the brains) of personal computers, servers, laptops, and tablets; circuits that send and receive signals for cell phones and communication devices; and sensors such as those employed when screening for diseases or new drugs. The tremendous promise of nanotubes was first discovered 25 years ago, but the field has been held back by materials, processing, and manufacturing roadblocks particularly pertaining to the organization and assembly of aligned arrays of nanotubes. A novel, multiphase fluid process recently discovered by this team called tangential flow interfacial self-assembly with promise for overcoming these roadblocks will be researched in this project. The project is motivated by compelling preliminary results, in which the team has assembled nanotubes into aligned arrays to create field effect transistors (the fundamental building block of electronics) with nearly 10 times higher on-state electrical conductance than previous nanotube transistors' that also exceed the on-state conductance of transistors fabricated from state-of-the-art semiconductors including silicon and gallium arsenide for the first time. In addition to graduate students, underrepresented researchers and undergraduate students from primarily undergraduate institutions will participate in the research effort. The supported graduate students will conduct science-related activities at a local Boys and Girls Clubs and develop new activities via collaboration with an outreach specialist. Local K-12 teachers will also be hosted for summer research experiences.The overarching goal of the project is to assemble semiconducting nanotubes into aligned arrays that are organized across multiple length-scales and that can be integrated into devices and circuits, via a continuous scalable process. The ideal array microstructure consists of parallel semiconducting nanotubes that are densely packed but individualized at a pitch of 5-10 nanometers. This microstructure needs to be uniformly repeated on the wafer-scale. Our approach for scalably realizing this microstructure will be to hierarchically control the structure and organization of nanotubes via multiple stages of self-assembly. Specific research activities will focus on: (1) designing and tailoring the structure of polymer-nanotube conjugates to improve the Nano-, micro-, and millimeter-scale uniformity and reproducibility of ordered nanotubes arrays; (2) uncovering the fundamental factors that control the assembly of nanotubes during the recently discovered tangential flow interfacial self-assembly process; (3) scaling this process; and, (4) integrating assembled nanotube arrays into complex devices, circuits, and systems for next-generation radio frequency communications technologies. At the project's conclusion, the PI aims to provide: (i) a pilot-scale instrument for the continuous deposition of aligned nanotube arrays with exquisite control over microstructure; (ii) the first example of a uniform, densely aligned array of semiconducting nanotubes on the 200 mm wafer-scale - a scale relevant for commercialization; and, (iii) performance-superior radio frequency low-noise amplifiers and mixers fabricated from these arrays and wafers, of relevance for next-generation cellular, WiFi, and Internet of Things technologies.

这个可扩展的纳米制造（SNM）研究项目将推进碳纳米管有序组件的可扩展制造，以及由这些组件制造的射频电子设备和系统。半导体碳纳米管是迄今为止发现的最好的半导体之一。它们有望显着提高各种电子设备的速度，能源效率和灵敏度，包括个人电脑，服务器，笔记本电脑和平板电脑的中央处理器（大脑）;手机和通信设备发送和接收信号的电路;以及传感器，例如在筛查疾病或新药时使用的传感器。纳米管的巨大前景在25年前首次被发现，但该领域一直受到材料，加工和制造障碍的阻碍，特别是与纳米管阵列的组织和组装有关。本项目将研究该团队最近发现的一种新的多相流体过程，称为切向流界面自组装，有望克服这些障碍。该项目的动机是令人信服的初步结果，其中，该团队将纳米管组装成对齐的阵列，以创建场效应晶体管（电子器件的基本构建块），其导通状态电导率比以前的纳米管晶体管高出近10倍，并且首次超过了由最先进的半导体（包括硅和砷化镓）制造的晶体管的导通状态电导率。除了研究生之外，代表性不足的研究人员和主要来自本科院校的本科生也将参与研究工作。支持的研究生将在当地的男孩和女孩俱乐部进行科学相关的活动，并通过与外展专家合作开发新的活动。该项目的总体目标是将半导体纳米管组装成对齐的阵列，这些阵列在多个长度尺度上组织，并且可以通过连续的可扩展过程集成到设备和电路中。理想的阵列微结构由平行的半导体纳米管组成，这些纳米管密集堆积，但以5-10纳米的间距进行个性化。这种微结构需要在晶圆级上均匀重复。我们的方法可扩展地实现这种微结构将是分层控制的结构和组织的纳米管通过多个阶段的自组装。具体的研究活动将集中在：（1）设计和定制聚合物-纳米管共轭物的结构，以改善有序纳米管阵列的纳米、微米和毫米级均匀性和可重复性;（2）揭示在最近发现的切向流界面自组装过程中控制纳米管组装的基本因素;（3）缩放该过程;以及（4）将组装的纳米管阵列集成到用于下一代射频通信技术的复杂器件、电路和系统中。在该项目结束时，PI的目标是提供：（一）一个中试规模的仪器，用于连续沉积对齐的纳米管阵列，并对微观结构进行精确控制;（二）在200毫米晶圆级上均匀，密集排列的半导体纳米管阵列的第一个例子-与商业化相关的规模;以及，（iii）由这些阵列和晶片制造的性能优越的射频低噪声放大器和混频器，与下一代蜂窝、WiFi和物联网技术相关。

项目成果

High transconductance and current density in field effect transistors using arrays of bundled semiconducting carbon nanotubes

• DOI: 10.1063/5.0093859
• 发表时间: 2022-08
• 期刊: Applied Physics Letters
• 影响因子: 4
• 作者: Sean M. Foradori;Jonathan H. Dwyer;Anjali Suresh;P. Gopalan;M. Arnold

Nonlinear Luttinger liquid plasmons in semiconducting single-walled carbon nanotubes

半导体单壁碳纳米管中的非线性Luttinger液体等离子体激元

• DOI: 10.1038/s41563-020-0652-5
• 发表时间: 2020-03
• 期刊: Nature Materials
• 影响因子: 41.2
• 作者: Wang Sheng;Zhao Sihan;Shi Zhiwen;Wu Fanqi;Zhao Zhiyuan;Jiang Lili;Watanabe Kenji;Taniguchi Takashi;Zettl Alex;Zhou Chongwu;Wang Feng
• 通讯作者: Wang Feng

Link among array non-uniformity, threshold voltage, and subthreshold swing degradation in aligned array carbon nanotube field effect transistors

• DOI: 10.1063/5.0031082
• 发表时间: 2020-12
• 期刊: Journal of Applied Physics
• 影响因子: 3.2
• 作者: Sean M. Foradori;K. Jinkins;M. Arnold

Using Bottom-Up Lithography and Optical Nonlocality to Create Short-Wave Infrared Plasmonic Resonances in Graphene

• DOI: 10.1021/acsphotonics.1c00149
• 发表时间: 2021-04
• 期刊: ACS Photonics
• 影响因子: 7
• 作者: Joel. F. Siegel;Jonathan H. Dwyer;Anjali Suresh;N. Safron;Margaret Fortman;C. Wan;Jonathan W. Choi;Wei Wei-Wei;V. Saraswat;Wyatt A. Behn;M. Kats;M. Arnold;P. Gopalan;V. Brar

Boundary-directed epitaxy of block copolymers

嵌段共聚物的边界定向外延

• DOI: 10.1038/s41467-020-17938-3
• 发表时间: 2020-08-19
• 期刊: NATURE COMMUNICATIONS
• 影响因子: 16.6
• 作者: Jacobberger, Robert M.;Thapar, Vikram;Arnold, Michael S.
• 通讯作者: Arnold, Michael S.