Atomic scale surface damage by ion bombardment at grazing incidence

掠射时离子轰击造成的原子级表面损伤

• 批准号: 24121582
• 负责人: Professor Dr. Thomas Werner Michely
• 金额: --
• 依托单位: Institut für Experimentalphysik
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2006
• 资助国家: 德国
• 起止时间: 2005-12-31 至 2010-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/24121582?language=en
• 关键词: Atomic; scale; surface; damage; ion

By grazing incidence ion scattering from metal surfaces a wealth of information and a deep understanding of many aspects of the ion-surface interaction has been obtained through the analysis and spectroscopy of the scattered particles. Despite of this, virtually nothing is known about the damage left behind on the surface as a consequence of the collision. In view of the actual and potential applications of grazing incidence ion beams in surface analysis (processes and properties), pattern formation, manipulation of thin film growth and surface smoothening it would be desirable to obtain an elementary understanding of the damage mechanisms under this specific scattering geometry. It is thus the goal of the proposed research project to undertake a joint theoretical and experimental effort combining molecular dynamics simulations and low temperature scanning tunneling microscopy to achieve a detailed understanding of the damage mechanism of grazing incidence ions on metal surfaces. Of specific interest is the damage caused by surface defects (steps, clusters, adatoms, adsorbates) as well as its variation with the projectile properties and the scattering geometry.

通过金属表面的掠入射离子散射，通过对散射粒子的分析和光谱分析，获得了丰富的信息，并对离子-表面相互作用的许多方面有了深入的了解。尽管如此，对于碰撞在地表留下的损害，人们几乎一无所知。鉴于掠入射离子束在表面分析(工艺和性质)、图案形成、薄膜生长操作和表面光滑化方面的实际和潜在应用，希望对这种特殊散射几何结构下的损伤机制有一个初步的了解。因此，将分子动力学模拟和低温扫描隧道显微镜相结合，对掠入射离子在金属表面的损伤机制进行详细的理论和实验研究是本研究项目的目标。特别感兴趣的是表面缺陷(台阶、团簇、吸附原子、吸附)造成的损伤，以及它随射弹性质和散射几何形状的变化。