A new scanning electrostatic force microscope for noncontact surface profile measurement of micro-specimens of bio-optics

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In this research, a new scanning electrostatic force microscope has been developed for noncontact surface profile measurement of micro-specimens of bio-optics. A charged conducting probe tip is oscillated by a tuning fork quartz crystal resonator. The probe tip is scanned over the sample surface by using an XY scanner in such a way that the frequency shift of the tuning fork oscillation, which corresponds to the electrostatic force gradient, is kept constant by controlling the probe Z position with a Z scanner. A dual height method is proposed to accurately obtain the tip to sample distances through removing the influence of the electric field distribution on the sample surface.