ICP Plasma Etching System

这里提出的电感耦合等离子体刻蚀系统是对萨尔兰大学量子光学小组的基础设施的补充，为处理钻石中的微结构和纳米结构提供了非常必要的设备。这种结构的制造能够实现金刚石中色心与光子晶体结构中的光腔的耦合实验，实现金刚石中色心的自旋-光子界面，并且对于制造用于色心的光学纳米天线和用于高空间分辨率的磁测量的金刚石中的扫描探针结构是必需的。这些实验只能在由电感耦合等离子体刻蚀系统提供的制造平台下进行。这里提到的研究课题的长期目标既是探索单量子系统水平上的光-物质相互作用的基本效应，也是为量子技术中的应用提供固态系统(如钻石中的色心)和单光子。我们致力于进一步开发新的应用潜力，例如在安全通信(量子通信)或高灵敏度测量技术(量子传感)领域。后一领域是新的欧盟量子技术旗舰的中心栏目，因此有助于最近的研究课题。

The ICP plasma etching system proposed here complements the infrastructure of the Quantum Optics group at Saarland University with a strongly required device for processing of micro- and nanostructures in diamond. Fabrication of such structures enables experiments on coupling of color centers in diamond to optical cavities in photonic crystal structures, on realization of spin-photon interfaces for color centers in diamond, and is required for fabrication of optical nano-antennas for color centers and for fabrication of scanning probe structures in diamond for magnetometry with high spatial resolution. These experiments can only be conducted given the fabrication platform provided by an ICP plasma etching system. Long term goals of the research topics mentioned here are both the exploration of fundamental effects of light-matter interaction at the level of single quantum systems and the supply of solid-state systems (such as color centers in diamond) and single photons for applications in quantum technologies. We strive for further development of new application potential, e.g. in fields of secure communication (quantum communication) or highly sensitive measurement technologies (quantum sensing). The latter fields are central columns of the new EU quantum technologies flagship and thus contribute to highly recent research topics.