Research on thin film metallic glasses as MEMS material and those three dimensional fabrication methods

本研究旨在通过对薄膜金属玻璃及其微细加工方法的基础研究和应用，实现具有优异特性的新型薄膜金属玻璃MEMS材料，并实现薄膜金属玻璃三维MEMS的制造。更具体地说，审查并澄清了以下项目。基础研究：a）寻找新的薄膜金属玻璃：采用组合电弧等离子体沉积技术，发现了Ru基薄膜金属玻璃（Ru_<75>Zr_<24>Al_1，玻璃化转变温度Tg= 902 K，晶化温度Tx= 973 K）。B<50><50>）新型薄膜金属玻璃性能的评价：对Ru基薄膜金属玻璃和Cu基薄膜金属玻璃的力学性能进行了测试。两种薄膜金属玻璃都显示出 关于我们 c）薄膜金属玻璃性能的改善：Pd基薄膜金属玻璃的电阻率和杨氏模量等性能通过过冷液相区退火得到改善。a）多自由度微致动器：使用具有两个致动PZT膜的Pd基薄膜金属玻璃的弯曲微梁构造新的两自由度（2-DOF）。所制造的致动器作为2-DOF微致动器，在每个方向上具有大约10微米的行程。B）通过微吹制的微圆顶成功地展示了由薄膜金属玻璃制成的微圆顶。首先，研究了使用密封Ar气体的微吹制。该工艺原理是基于TFMG在过冷液相区软化和Ar气体在真空中受热膨胀。接着，研究了使用密封除气材料（Cu_3N）的微吹制。制作了直径100μm、间距120μm的10×10集成微圆顶。c）有源电子器件：提出了一种新型的片上微可变电感，采用薄膜金属玻璃三维微成形技术制作。线圈高度可以从零到几百微米变化。电感变化约3%，取决于线圈的高度。少

In this research, we aimed at realization of new thin film metallic glass as MEMS material that had outstanding characteristics and fabrication of three dimensional MEMS made of thin film metallic glass by developing fundamental research and applications on thin film metallic glasses and those micro fabrication methods. More specifically, the following items were examined and clarified.* Fundamental research.a) Search for new thin film metallic glasses : Ru based thin film metallic glass (Ru_<75>Zr_<24>Al_1, glass transition tempereture : Tg=902K, crystallize temperature : Tx=973K) was discovered by combinatorial arc plasma deposition. Moreover, Cu based thin film metallic glass (Cu_<50>Zr_<50>, Tg:672K, Tx:715K)was fabricated by multi-cathode carousel type sputtering system.b) Evaluation of new thin film metallic glass property : The mechanical property of Ru based thin film metallic glass and Cu based thin film metallic glass were measured. Both thin film metallic glasses showed the … More good mechanical property and over 1 GPa of tensile strength.c) Improvement of thin film metallic glass property : Pd based thin film metallic glass properties, such as resistivity and Young's modulus, were improved by annealing at the supercooled liquid region.* Applications.a) Multi degrees of freedom micro actuator : A new two-degrees-of-freedom (2-DOF) is constructed using a bent microbeam of a Pd-based thin film metallic glass with two actuating PZT films. The fabricated actuator acts as 2-DOF microactuator with an approximately 10-micron-stroke in each direction.b) Micro domes by micro blowing Micro domes that are made of thin film metallic glass are successfully demonstrated. First, micro blowing using sealed Ar gas was examined. The process principal was based on that TFMG soften in the supercooled liquid region and the Ar gas expanded with heat in a vacuum. Next, micro blowing using seal outgas material (Cu_3N) was examined. 10×10 integrated micro domes that a diameter of 100μm and pitch of 120μm had formed.c) Activity electronic device : We proposed a new type of an on-chip micro variable inductor fabricated by using three dimensional micro forming of thin film metallic glass. The coil height can be changed from zero to several hundred micrometers. The inductance was changed about 3% by depending on the height of a coil. Less