Research on thin film metallic glasses as MEMS material and those three dimensional fabrication methods
MEMS材料薄膜金属玻璃及其三维制备方法研究
基本信息
- 批准号:15206015
- 负责人:
- 金额:$ 32.03万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for Scientific Research (A)
- 财政年份:2003
- 资助国家:日本
- 起止时间:2003 至 2005
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
In this research, we aimed at realization of new thin film metallic glass as MEMS material that had outstanding characteristics and fabrication of three dimensional MEMS made of thin film metallic glass by developing fundamental research and applications on thin film metallic glasses and those micro fabrication methods. More specifically, the following items were examined and clarified.* Fundamental research.a) Search for new thin film metallic glasses : Ru based thin film metallic glass (Ru_<75>Zr_<24>Al_1, glass transition tempereture : Tg=902K, crystallize temperature : Tx=973K) was discovered by combinatorial arc plasma deposition. Moreover, Cu based thin film metallic glass (Cu_<50>Zr_<50>, Tg:672K, Tx:715K)was fabricated by multi-cathode carousel type sputtering system.b) Evaluation of new thin film metallic glass property : The mechanical property of Ru based thin film metallic glass and Cu based thin film metallic glass were measured. Both thin film metallic glasses showed the … More good mechanical property and over 1 GPa of tensile strength.c) Improvement of thin film metallic glass property : Pd based thin film metallic glass properties, such as resistivity and Young's modulus, were improved by annealing at the supercooled liquid region.* Applications.a) Multi degrees of freedom micro actuator : A new two-degrees-of-freedom (2-DOF) is constructed using a bent microbeam of a Pd-based thin film metallic glass with two actuating PZT films. The fabricated actuator acts as 2-DOF microactuator with an approximately 10-micron-stroke in each direction.b) Micro domes by micro blowing Micro domes that are made of thin film metallic glass are successfully demonstrated. First, micro blowing using sealed Ar gas was examined. The process principal was based on that TFMG soften in the supercooled liquid region and the Ar gas expanded with heat in a vacuum. Next, micro blowing using seal outgas material (Cu_3N) was examined. 10×10 integrated micro domes that a diameter of 100μm and pitch of 120μm had formed.c) Activity electronic device : We proposed a new type of an on-chip micro variable inductor fabricated by using three dimensional micro forming of thin film metallic glass. The coil height can be changed from zero to several hundred micrometers. The inductance was changed about 3% by depending on the height of a coil. Less
本研究旨在通过对薄膜金属玻璃及其微细加工方法的基础研究和应用,实现具有优异特性的新型薄膜金属玻璃MEMS材料,并实现薄膜金属玻璃三维MEMS的制造。更具体地说,审查并澄清了以下项目。基础研究:a)寻找新的薄膜金属玻璃:采用组合电弧等离子体沉积技术,发现了Ru基薄膜金属玻璃(Ru_<75>Zr_<24>Al_1,玻璃化转变温度Tg= 902 K,晶化温度Tx= 973 K)。B<50><50>)新型薄膜金属玻璃性能的评价:对Ru基薄膜金属玻璃和Cu基薄膜金属玻璃的力学性能进行了测试。两种薄膜金属玻璃都显示出 ...更多信息 c)薄膜金属玻璃性能的改善:通过在过冷液相区退火,Pd基薄膜金属玻璃的电阻率和杨氏模量等性能得到改善。a)多自由度微致动器:使用具有两个致动PZT膜的Pd基薄膜金属玻璃的弯曲微梁构造新的两自由度(2-DOF)。所制造的致动器作为2-DOF微致动器,在每个方向上具有大约10微米的行程。B)通过微吹制的微圆顶成功地展示了由薄膜金属玻璃制成的微圆顶。首先,研究了使用密封Ar气体的微吹制。该工艺原理是基于TFMG在过冷液相区软化和Ar气体在真空中受热膨胀。接着,研究了使用密封除气材料(Cu_3N)的微吹制。制作了直径100μm、间距120μm的10×10集成微圆顶。c)有源电子器件:提出了一种新型的片上微可变电感,采用薄膜金属玻璃三维微成形技术制作。线圈高度可以从零到几百微米变化。电感变化约3%,取决于线圈的高度。少
项目成果
期刊论文数量(221)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
新しい静電型MEMSアクチュエータ=円すいばねMEMSアクチュエータとその固着防止駆動法=
新型静电MEMS执行器=锥形弹簧MEMS执行器及其防粘驱动方法=
- DOI:
- 发表时间:2004
- 期刊:
- 影响因子:0
- 作者:秦 誠一;福重孝志
- 通讯作者:福重孝志
A MEMS complete blood count sensor with vanes
带叶片的 MEMS 全血细胞计数传感器
- DOI:
- 发表时间:2005
- 期刊:
- 影响因子:0
- 作者:Rikiya Tanabe;Seiichi Hata;Akira Shimokohbe
- 通讯作者:Akira Shimokohbe
Integrated conical spring linear actuators for tilting-mirror applications
适用于倾斜镜应用的集成锥形弹簧线性执行器
- DOI:
- 发表时间:2005
- 期刊:
- 影响因子:0
- 作者:T.Fukushige;S.Hata;A.Shimokohbe
- 通讯作者:A.Shimokohbe
Basic Research on an Out-of-plane Rotating Microactuator
平面外旋转微执行器的基础研究
- DOI:
- 发表时间:2005
- 期刊:
- 影响因子:0
- 作者:Hiroaki Akamatu;Seiichi Hata;Takashi Fukushige;Akira Shimokohbe
- 通讯作者:Akira Shimokohbe
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SHIMOKOHBE Akira其他文献
SHIMOKOHBE Akira的其他文献
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{{ truncateString('SHIMOKOHBE Akira', 18)}}的其他基金
Research of sub-nano motion mechanism
亚纳米运动机理研究
- 批准号:
13450054 - 财政年份:2001
- 资助金额:
$ 32.03万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Three dimensional micro forming of thin film metallic glass cantilevers and its application for micro probes
薄膜金属玻璃悬臂梁三维微成形及其在微型探针中的应用
- 批准号:
12355007 - 财政年份:2000
- 资助金额:
$ 32.03万 - 项目类别:
Grant-in-Aid for Scientific Research (A)
Dynamics and Control of Nano-Motion Mechanisms
纳米运动机构的动力学与控制
- 批准号:
10305013 - 财政年份:1998
- 资助金额:
$ 32.03万 - 项目类别:
Grant-in-Aid for Scientific Research (A).
Advanced Design and Production Engineering
先进的设计和生产工程
- 批准号:
09044142 - 财政年份:1997
- 资助金额:
$ 32.03万 - 项目类别:
Grant-in-Aid for international Scientific Research
Study on Advanced Coordinate Metrology
先进坐标计量学研究
- 批准号:
07305007 - 财政年份:1995
- 资助金额:
$ 32.03万 - 项目类别:
Grant-in-Aid for Scientific Research (A)
Trial Study of Ultra-Precision Magnetic Bearing
超精密磁力轴承的试验研究
- 批准号:
07555051 - 财政年份:1995
- 资助金额:
$ 32.03万 - 项目类别:
Grant-in-Aid for Scientific Research (A)
Study on Measurement and Control of Dynamic Behavior of Subnano-mechanism
亚纳米机构动态行为测量与控制研究
- 批准号:
06452168 - 财政年份:1994
- 资助金额:
$ 32.03万 - 项目类别:
Grant-in-Aid for General Scientific Research (B)
Development of In-process Optical Sensor for Ultra Precision Machining
开发用于超精密加工的在线光学传感器
- 批准号:
05555040 - 财政年份:1993
- 资助金额:
$ 32.03万 - 项目类别:
Grant-in-Aid for Developmental Scientific Research (B)
Active Air Rotary Bearing
主动空气旋转轴承
- 批准号:
02555026 - 财政年份:1990
- 资助金额:
$ 32.03万 - 项目类别:
Grant-in-Aid for Developmental Scientific Research (B)
An Active Air Bearing
主动空气轴承
- 批准号:
63850030 - 财政年份:1988
- 资助金额:
$ 32.03万 - 项目类别:
Grant-in-Aid for Developmental Scientific Research