Research on thin film metallic glasses as MEMS material and those three dimensional fabrication methods

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In this research, we aimed at realization of new thin film metallic glass as MEMS material that had outstanding characteristics and fabrication of three dimensional MEMS made of thin film metallic glass by developing fundamental research and applications on thin film metallic glasses and those micro fabrication methods. More specifically, the following items were examined and clarified.* Fundamental research.a) Search for new thin film metallic glasses : Ru based thin film metallic glass (Ru_<75>Zr_<24>Al_1, glass transition tempereture : Tg=902K, crystallize temperature : Tx=973K) was discovered by combinatorial arc plasma deposition. Moreover, Cu based thin film metallic glass (Cu_<50>Zr_<50>, Tg:672K, Tx:715K)was fabricated by multi-cathode carousel type sputtering system.b) Evaluation of new thin film metallic glass property : The mechanical property of Ru based thin film metallic glass and Cu based thin film metallic glass were measured. Both thin film metallic glasses showed the … More good mechanical property and over 1 GPa of tensile strength.c) Improvement of thin film metallic glass property : Pd based thin film metallic glass properties, such as resistivity and Young's modulus, were improved by annealing at the supercooled liquid region.* Applications.a) Multi degrees of freedom micro actuator : A new two-degrees-of-freedom (2-DOF) is constructed using a bent microbeam of a Pd-based thin film metallic glass with two actuating PZT films. The fabricated actuator acts as 2-DOF microactuator with an approximately 10-micron-stroke in each direction.b) Micro domes by micro blowing Micro domes that are made of thin film metallic glass are successfully demonstrated. First, micro blowing using sealed Ar gas was examined. The process principal was based on that TFMG soften in the supercooled liquid region and the Ar gas expanded with heat in a vacuum. Next, micro blowing using seal outgas material (Cu_3N) was examined. 10×10 integrated micro domes that a diameter of 100μm and pitch of 120μm had formed.c) Activity electronic device : We proposed a new type of an on-chip micro variable inductor fabricated by using three dimensional micro forming of thin film metallic glass. The coil height can be changed from zero to several hundred micrometers. The inductance was changed about 3% by depending on the height of a coil. Less