Research on thin film metallic glasses as MEMS material and those three dimensional fabrication methods

在本研究中，我们旨在通过对薄膜金属玻璃及其微加工方法的基础研究和应用，实现具有优异特性的新型薄膜金属玻璃作为MEMS材料，并制造由薄膜金属玻璃制成的三维MEMS。更具体地说，审查和澄清了下列项目。*基础研究。a)寻找新的薄膜金属玻璃：通过组合电弧等离子沉积，发现了Ru基薄膜金属玻璃（Ru_<75>Zr_<24>Al_1，玻璃化转变温度Tg=902K，结晶温度Tx=973K）。采用多阴极旋转溅射法制备了Cu基薄膜金属玻璃（Cu_<50>Zr_<50>, Tg:672K, Tx:715K）。b)新型薄膜金属玻璃性能评价：测量了Ru基薄膜金属玻璃和Cu基薄膜金属玻璃的力学性能。c)金属玻璃薄膜性能的改善：通过过冷液区退火，钯基金属玻璃薄膜的电阻率和杨氏模量等性能得到了改善。*应用程序。a)多自由度微致动器：利用带有两个致动PZT薄膜的pd基薄膜金属玻璃的弯曲微光束构建了一个新的二自由度（2-DOF）。制作的驱动器作为2-DOF微驱动器，每个方向的行程约为10微米。b)微吹制微圆顶成功展示了由金属玻璃薄膜制成的微圆顶。首先，对密闭氩气微吹进行了研究。工艺原理是TFMG在过冷液区软化，氩气在真空中受热膨胀。其次，采用密封出气材料（Cu_3N）进行微吹试验。10×10集成了直径为100μm，间距为120μm的微圆顶。c)活动电子器件：我们提出了一种新型的片上微变量电感器，采用薄膜金属玻璃的三维微成形制造。线圈高度可以从零到几百微米改变。由于线圈的高度不同，电感的变化约为3%。少

In this research, we aimed at realization of new thin film metallic glass as MEMS material that had outstanding characteristics and fabrication of three dimensional MEMS made of thin film metallic glass by developing fundamental research and applications on thin film metallic glasses and those micro fabrication methods. More specifically, the following items were examined and clarified.* Fundamental research.a) Search for new thin film metallic glasses : Ru based thin film metallic glass (Ru_<75>Zr_<24>Al_1, glass transition tempereture : Tg=902K, crystallize temperature : Tx=973K) was discovered by combinatorial arc plasma deposition. Moreover, Cu based thin film metallic glass (Cu_<50>Zr_<50>, Tg:672K, Tx:715K)was fabricated by multi-cathode carousel type sputtering system.b) Evaluation of new thin film metallic glass property : The mechanical property of Ru based thin film metallic glass and Cu based thin film metallic glass were measured. Both thin film metallic glasses showed the … More good mechanical property and over 1 GPa of tensile strength.c) Improvement of thin film metallic glass property : Pd based thin film metallic glass properties, such as resistivity and Young's modulus, were improved by annealing at the supercooled liquid region.* Applications.a) Multi degrees of freedom micro actuator : A new two-degrees-of-freedom (2-DOF) is constructed using a bent microbeam of a Pd-based thin film metallic glass with two actuating PZT films. The fabricated actuator acts as 2-DOF microactuator with an approximately 10-micron-stroke in each direction.b) Micro domes by micro blowing Micro domes that are made of thin film metallic glass are successfully demonstrated. First, micro blowing using sealed Ar gas was examined. The process principal was based on that TFMG soften in the supercooled liquid region and the Ar gas expanded with heat in a vacuum. Next, micro blowing using seal outgas material (Cu_3N) was examined. 10×10 integrated micro domes that a diameter of 100μm and pitch of 120μm had formed.c) Activity electronic device : We proposed a new type of an on-chip micro variable inductor fabricated by using three dimensional micro forming of thin film metallic glass. The coil height can be changed from zero to several hundred micrometers. The inductance was changed about 3% by depending on the height of a coil. Less