Trial Study of Ultra-Precision Magnetic Bearing

超精密磁力轴承的试验研究

• 批准号: 07555051
• 负责人: SHIMOKOHBE Akira
• 金额: $ 10.11万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555051/
• 关键词: Magnetic Bearing; Optimal Control; Repetitive Control; Profile Error; Rotational Accuracy; Positioning Accuracy; 静電容量型変位計; モデルの同定

Magnetic bearings are not accurate enough for precision equipment. In this study, first, a two-degree-of-freedom magnetic bearing with an optimal state feedback controller is introduced Eddy current displacement sensors and capacitance micrometer are used as feedback sensors. The positioning accuracy is 15nm when the axis does not rotate. Then, to improve the rotational accuracy, a repetitive controller is added to the bearing. The rotational error with the optimal and repetitive controllers is 250nm at 120rpm which is caused by the profile error of the axis and by the arrangement of the sensors and electromagnets.

磁力轴承对于精密设备来说不够精确。在本研究中，首先介绍一个具有最佳状态回授控制器的二自由度磁悬浮轴承，并以电涡流位移感测器与电容测微计作为回授感测器。在轴不旋转的情况下，定位精度为15nm。然后，为了提高旋转精度，重复控制器被添加到轴承。最优重复控制器在120rpm下的旋转误差为250nm，这是由轴的轮廓误差以及传感器和电磁铁的布置引起的。

项目成果

下河辺 明 ほか: "高精度磁気軸受の研究-回転精度について-" 日本機械学会第74期通常総会講演会講演論文集. (発表予定). (1997)

Akira Shimokawabe 等：“高精度磁力轴承的研究 - 关于旋转精度 -”日本机械工程学会第 74 届普通大会论文集（待提交）（1997 年）。