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Development of In-process Optical Sensor for Ultra Precision Machining

开发用于超精密加工的在线光学传感器

基本信息

批准号：
05555040
负责人：
SHIMOKOHBE Akira
金额：
$ 7.74万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1993
资助国家：
日本
起止时间：
1993 至 1994
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05555040/
关键词：
Non contact sensor Laser diode Optical fiber coupler Selfoc lens Laser heterodyne interferometer Measurement of surface roughness Measurement of displacement Measurement of absolute distance 周波数変調ヘテロダイン干渉光アイソレータ応答速度

项目摘要

The aim of this research project was to develop the optical non contact displacement sensor which has following characteristics : (1) high resolution, (2) large measurement range, (3) direct displacement measurement capability for any surfaces and (4) high follow-up speed. The developed sensor comprises a single mode optical fiber coupler and a selfoc lens for setting up a Fizeau type interferometer. The displacement of the object surface is obtained by the measurement of the phase change of the beat signal generated by a frequency modulation of the laser diode.First, the basic performance improvement method of the sensor was discussed. By using the optical isolator, (a) the measurement range was enlarged from 26mm to more than 46mm, and (b) the displacement of the mirror target could be measured in addition to 10 kinds of the rough surfaces. By using triangular modulation method, in comparison with the sawtooth one, (a) the resolution was improved from 20nm to 10nm, and (b) 15.4 mm/s follow-up speed was obtained. The performance of the sensor was independence of object material and roughness.Secondly, By the sensor, the surface roughness was tried to measure. The experimental results shows that the sensor can measure the wave of which the pitch is similar to that of the target.Lastly, the absolute distance sensor which has the same optical devices as the displacement sensor was developed. The absolute distance is calculated from the frequency of the beat signal. The experimental results prove that the sensor can measure the absolute distance from 45mm to 70mm with 2mm accuracy.

本课题的目的是研制一种具有以下特点的光学非接触式位移传感器：（1）高分辨率;（2）大测量范围;（3）可直接测量任何表面的位移;（4）高跟踪速度。该传感器由单模光纤耦合器和自聚焦透镜组成，构成斐索型干涉仪。该传感器通过测量激光二极管频率调制产生的拍频信号的相位变化来获得物体表面的位移。首先，讨论了传感器的基本性能改进方法。通过使用光隔离器，（a）将测量范围从26mm扩大到46mm以上，（b）除了10种粗糙表面之外，还可以测量镜面目标的位移。采用三角形调制方法，与传统的单轴激光器相比，（a）分辨率由20nm提高到10nm，（B）跟踪速度达到15.4mm/s。该传感器的性能与被测物体的材料和粗糙度无关。其次，利用该传感器对表面粗糙度进行了测量。实验结果表明，该传感器可以测量与目标俯仰角相近的波。最后，研制了与位移传感器具有相同光学器件的绝对距离传感器。根据差拍信号的频率计算绝对距离。实验结果表明，该传感器可测量45~70mm的绝对距离，测量精度为2mm。