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Study on Advanced Coordinate Metrology

先进坐标计量学研究

基本信息

批准号：
07305007
负责人：
SHIMOKOHBE Akira
金额：
$ 2.24万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07305007/
关键词：
Nanometer metrology Software datum Coordinate metrology Optical probe Miniature robot Virtual CMM Crystalline lattice Active vibration control 自律校正ナノCMM 超小型自走機械微動テーブル

项目摘要

The aim of this research project was to clarify the essense of coordinate metrology and to propose advanced coordinate measuring system. For this aim, the following sub-researches were done ;(1) A new software datum method for on-machine measurements of roundness, whichis called the combined 3-point method, has been proposed. This method can accurately measure roundness profiles that include step-wise variations. A roundness measurement system have also been developed.(2) Using computer simulations by FEM.the thermal and stress deformations of nano-CMM are calculated. From these simulations, the prototype of nano-CMM has been developed. Novel data processing method has been developed to calculate the form deviations using statistical method. This method can be used for the evaluations of measurement uncertainties and a computational tolerancing.(3) A comparative length measurement instrument using a regular crystalline lattice as a reference scale and a STM asa detector has been developed. The experimental results using the instruments show feasibility for 1mum range comparative length measurement with sub-nanometer resolution.(4) A new non-contact probe called "optical ring image sensor" for 3-D CMM was developed, which can measure accurately 3-D edge profile as well as 3-D surface profile of the free form surfaces with steep inclination angles and edges.(5) A new style of measurement system combined with a coordinate measuring system and a miniature robot with microprobe was developed to extend those machine capabilities to sub-micron accuracy over wider working range.(6) A multi-degrees-of-freedom fine motion table for three dimensional measurement is examined. Control strategy against disturbance to the table are also examined.(7) For clarifying the effect of thermal deformation on CMM's measuring accuracy, a virtual CMM with FEM was developed in a supercomputer. Using the virtual CMM,the effects under many kinds of the thermal conditions were examined.

本课题的研究目的在于阐明坐标测量的本质，提出先进的坐标测量系统。（1）提出了一种新的在机测量圆度的软件基准方法--组合三点法。该方法可以精确测量包含阶跃变化的圆度轮廓。还研制了圆度测量系统。(2)采用有限元法对纳米三坐标测量机的热变形和应力变形进行了计算机模拟计算。从这些模拟，原型的纳米坐标测量机已经开发。开发了新的数据处理方法，利用统计方法计算形状偏差。该方法可用于测量不确定度的评定和公差的计算。(3)本文介绍了一种以规则晶格为参考尺度，以STM阿萨探测器的比较长度测量仪。实验结果表明，该仪器可实现1 μ m量级的亚纳米级的长度测量。(4)研制了一种用于三维三坐标测量机的新型非接触式测头--“光环图像传感器”，该测头不仅可以精确测量三维边缘轮廓，还可以测量具有大倾角和大边缘的自由曲面的三维表面轮廓。(5)为了在更宽的工作范围内实现亚微米级的测量精度，研制了一种新型的测量系统，该系统结合了坐标测量系统和微型机器人。(6)研究了一种用于三维测量的多自由度微动工作台。对转台的扰动控制策略也进行了研究。(7)为了研究热变形对三坐标测量机测量精度的影响，在大型计算机上建立了基于有限元法的虚拟三坐标测量机。利用虚拟三坐标测量机，考察了多种热条件下的影响。