Research of sub-nano motion mechanism

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The aim of the research is to realize high-speed and multi-degree-of-freedom mechanisms having sub-nano-meter-order resolution and accuracy in the space more than 100mm cubic. Three fundamental researches had been done as follows.1. Research of sub-nano motion control : PID or GA controllers for a linear positioning mechanism, which is suspended by air bearings and driven by an air lead screw, were examined to realize nanometer positioning. Moreover, the design of nominal characteristics trajectory following controller for a two-mass positioning mechanism was proposed and tested.2. Research of sub-nano motion actuator : A micro-actuator using light-enhanced magnetization was proposed. The implementation of the proposed actuator principle was verified using a micro-actuator consisting of a silicon cantilever and a GaAsFe/GaAs chip.3. Resarch of sub-nano motion bearing : Based on a planar rotor with a radial magnetic bearing, we proposed simple methods for removal of the vibration caused by rotor imbalance and disturbance force from the induction motor.