Research of sub-nano motion mechanism

亚纳米运动机理研究

• 批准号: 13450054
• 负责人: SHIMOKOHBE Akira
• 金额: $ 9.41万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13450054/
• 关键词: motion control; nanometer; precision positioning; light enhanced magnetization; micro-actuator; magnetic bearing; rotational accuracy; genetic algorithm; サブナノモーション; 空気ねじ; MEMS; GaAs-Fe; 磁気軸; 磁気形状記憶

The aim of the research is to realize high-speed and multi-degree-of-freedom mechanisms having sub-nano-meter-order resolution and accuracy in the space more than 100mm cubic. Three fundamental researches had been done as follows.1. Research of sub-nano motion control : PID or GA controllers for a linear positioning mechanism, which is suspended by air bearings and driven by an air lead screw, were examined to realize nanometer positioning. Moreover, the design of nominal characteristics trajectory following controller for a two-mass positioning mechanism was proposed and tested.2. Research of sub-nano motion actuator : A micro-actuator using light-enhanced magnetization was proposed. The implementation of the proposed actuator principle was verified using a micro-actuator consisting of a silicon cantilever and a GaAsFe/GaAs chip.3. Resarch of sub-nano motion bearing : Based on a planar rotor with a radial magnetic bearing, we proposed simple methods for removal of the vibration caused by rotor imbalance and disturbance force from the induction motor.

研究的目标是实现在100立方毫米以上的空间内具有亚纳米级分辨率和精度的高速多自由度机构。本文主要做了以下三个方面的基础性研究.亚纳米运动控制研究：以空气轴承悬浮、空气丝杠驱动的直线定位机构为研究对象，分别采用PID控制器和GA控制器实现亚纳米级的定位。提出了双质量定位机构名义特性轨迹跟踪控制器的设计方法，并进行了实验验证.亚纳米运动驱动器的研究：提出了一种基于光增强磁化的微驱动器。利用由硅悬臂梁和GaAsFe/GaAs芯片组成的微致动器验证了所提出的致动器原理的实现.亚纳米运动轴承的研究：基于径向磁轴承的平面转子，提出了消除转子不平衡和感应电机干扰力引起的振动的简单方法。

项目成果

Akira Shimokohbe et al.: "A simple method for rotation about the inertial axis of a rigid AMB rotor"8th International Symposium on Magnetic Bearing, August 26-28,2002,Mito, Japan. 405-410 (2002)

Akira Shimokohbe 等人：“一种绕刚性 AMB 转子惯性轴旋转的简单方法”第 8 届国际磁力轴承研讨会，2002 年 8 月 26-28 日，日本水户。

T.Shinshi, A.Shimokohbe: "Precision Radial Magnetic Bearing Using Estimation of the Center of Inertia and Repetitive Control"Proc. of 2002 euspen. 163-166 (2002)

T.Shinshi、A.Shimokohbe：“利用惯性中心估计和重复控制的精密径向磁力轴承”Proc。

Akira Shimokohbe et al.: "Practical control for two-mass positioning mechanism"Proc.of CPT2002, Daejeon, Korea. 206-211 (2002)

Akira Shimokohbe 等人：“两质量定位机构的实用控制”Proc.of CPT2002，大田，韩国。

K.Sato: "Practical Control for Two-mass Positioning Mechanism"Proc. of the 1^<st> Korean-Japan Conference on Positioning Technology. 206-211 (2002)

K.Sato：“两质量定位机构的实用控制”Proc。

下河辺 明, ほか: "ラジアル磁気軸受の高精度制御"精密工学会誌. 67,11. 1803 (2001)

Akira Shimokawabe 等人：“径向磁轴承的高精度控制”日本精密工程学会杂志 67,11。